Nanopositioners

ANGp101 RT Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/RT - goniometer for "phi" tilting

goniometer for Φ-positioning for ambient conditions

100 g

5.4 °

0 .. 100°C

1E-4 mbar

0 - 31 T

5.8

ANGp50 HV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp50/HV - goniometer for "phi" tilting

compact goniometer for Φ-positioning for high vacuum with pressures down to 1E-8 mbar

25 g

5.8 °

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSx3050/StSt/NUM+/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

15000 g

30 mm

5E-11 mbar

1 nm

ANPx51 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/RES/RT - linear x-nanopositioner

compact linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

25 g

3 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ECSx3030/Al/NUM/RT

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, for ambient conditions

9000 g

20 mm

0 .. 100°C

1E-4 mbar

1 nm

ANPx341 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

2000 g

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSx5050 Al HL RT Nanopositionierer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECSx5050/Al/HL/RT - nanopositioner made from Aluminum,

linear bearing based nanopositioner for horizontal motion with high dynamic force, for ambient conditions

15000 g

30 mm

0 .. 100°C

1E-4 mbar

ECSx5050 Al NUM HL RT Nanopositionierer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECSx5050/Al/HL/NUM/RT - nanopositioner made from Aluminum,

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

15000 g

30 mm

0 .. 100°C

1E-4 mbar

1 nm

ANR51 RES UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR51/RES/UHV - rotator (360° endless)

compact rotator with vertical rotation axis with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

30 g

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 6 m°

ECSx3050/StSt/NUM+/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

15000 g

30 mm

1E-8 mbar

1 nm

ANPz30 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz30/RT - linear z-nanopositioner

smallest linear nanopositioner for vertical motion for ambient conditions

10 g

2.5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANR101 RES UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR101/RES/UHV - rotator (360° endless)

rotator with vertical rotation axis with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 6 m°

ECSx3040/StSt/HV

linear bearing based nanopositioner for horizontal motion

12000 g

25 mm

0 .. 100°C

1E-8 mbar

ECSx5050/StSt/HL/HV

linear bearing based nanopositioner for horizontal motion with high dynamic force,

15000 g

30 mm

0 .. 100°C

1E-8 mbar

ANR51 RES RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR51/RES/RT - rotator (360° endless)

compact rotator with vertical rotation axis with integrated resistive encoder, for ambient conditions

30 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 6 m°

ANR101 RES HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR101/RES/HV - rotator (360° endless)

rotator with vertical rotation axis with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 6 m°

ECR5050hs/StSt/NUM+/UHV

high stability bearing based rotator with integrated optoelectronic encoder optimized for low heat generation in vacuum,

2000 g

360 ° endless

1E-9 mbar

0.01 m°

ANR101 UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR101/UHV - rotator (360° endless)

rotator with vertical rotation axis for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

ECSx5050 StSt NUM+ HL HV Nanopositioners for Ambient and Vacuum Conditions

ECSx5050/StSt/HL/NUM+/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force,

15000 g

30 mm

1E-8 mbar

1 nm

ECR5050hs/StSt/NUM+/HV

high stability bearing based rotator with integrated optoelectronic encoder optimized for low heat generation in vacuum,

2000 g

360 ° endless

1E-8 mbar

0.01 m°

ANPx311 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

2000 g

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx321 HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

15 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ECGp5050/StSt/HV

bearing based goniometer for Φ-positioning

1000 g

10 °

0 .. 100°C

1E-8 mbar

ANSxy100lr UHV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100lr/UHV xy-Scanner made from Titanium

long range open loop xy-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

0 .. 100°C

5E-11 mbar

0 - 31 T

ANRv51 RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv51/RT- rotator (360° endless)

compact rotator with horizontal rotation axis for ambient conditions

20 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

ECR5050hs/StSt/HV

high stability bearing based rotator

2000 g

360 ° endless

0 .. 100°C

1E-8 mbar

ANPx321 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

15 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANGt101 RT Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RT - goniometer for "theta" tilting

goniometer for Θ-positioning for ambient conditions

100 g

6.6 °

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSxy50 HV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy50/HV xy-Scanner made from Titanium

compact open loop xy-scanner for high vacuum with pressures down to 1E-8 mbar

50 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz102 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/HV - linear z-nanopositioner

linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANRv220 RES UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv220/RES/UHV - rotator (360° endless)

highest stability rotator with horizontal rotation axis providing with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 6 m°

ANPz51eXT UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51eXT/UHV - linear z-nanopositioner

compact linear nanopositioner for vertical motion with extended range for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

6 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPz101 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ECSx3080 Al NUM HL RT Nanopositioner aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECSx3080/Al/HL/NUM/RT - nanopositioner made from Aluminum,

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

24000 g

50 mm

0 .. 100°C

1E-4 mbar

1 nm

ANPx101 UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/UHV - linear x-nanopositioner

linear nanopositioner for horizontal motion for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx51 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/RT - linear x-nanopositioner

compact linear nanopositioner for horizontal motion for ambient conditions

25 g

3 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ECGt5050 Al HL RT Goniometer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECGt5050/Al/HL/RT - goniometer made from Aluminum

bearing based goniometer for Θ-positioning with high dynamic force, for ambient conditions

1000 g

10 °

0 .. 100°C

1E-4 mbar

ANGt101 RES HV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RES/HV - goniometer for "theta" tilting

goniometer for Θ-positioning with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

6.6 °

0 .. 100°C

1E-8 mbar

0 - 31 T

0.1 m°

ANPx341 RES HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

20 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ECSx3030/StSt/UHV

linear bearing based nanopositioner for horizontal motion

9000 g

20 mm

0 .. 100°C

5E-11 mbar

ANPx311 HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ambient conditions

2000 g

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSz5050/Al/NUM/RT

compact linear bearing based nanopositioner for vertical motion with integrated optoelectronic encoder, for ambient conditions

800 g

8 mm

0 .. 100°C

1E-4 mbar

1 nm

ANSz100hs HV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100hs/HV z-Scanner made from Titanium

high stability open loop z-scanner for high vacuum with pressures down to 1E-8 mbar

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSx3050/Al/RT

linear bearing based nanopositioner for horizontal motion for ambient conditions

15000 g

30 mm

0 .. 100°C

1E-4 mbar

ANPz101 RES HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ECGt5050/Al/NUM/RT

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder, for ambient conditions

1000 g

10 °

0 .. 100°C

1E-4 mbar

1 µ°

ANPz101eXT12 RES HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RES/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

12 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ECSx3050 StSt NUM HL UHV Nanopositioners for Ambient and Vacuum Conditions

ECSx3050/StSt/HL/NUM/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, with high dynamic force,

15000 g

30 mm

0 .. 100°C

5E-11 mbar

1 nm

7.2

ANGt50 UHV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt50/UHV - goniometer for "theta" tilting

compact goniometer for Θ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

25 g

7.2 °

0 .. 100°C

5E-11 mbar

0 - 31 T

ECGt5050/StSt/NUM/UHV

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder,

1000 g

10 °

0 .. 100°C

5E-11 mbar

1 µ°

ECSx3030/StSt/NUM/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder,

9000 g

20 mm

0 .. 100°C

1E-8 mbar

1 nm

ECR4040/Al/RT

bearing based rotator for ambient conditions

2000 g

360 ° endless

0 .. 100°C

ANSz50 UHV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz50/UHV z-Scanner made from Titanium,

compact open loop z-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

0 .. 100°C

5E-11 mbar

0 - 31 T

ANRv51 HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv51/HV - rotator (360° endless)

compact rotator with horizontal rotation axis for high vacuum with pressures down to 1E-8 mbar

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxyz100std UHV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100/UHV xyz-Scanner made from Titanium

standard range open loop xyz-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

0 .. 100°C

5E-11 mbar

0 - 31 T

5.8

ANGp50 UHV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp50/UHV - goniometer for "phi" tilting

compact goniometer for Φ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

25 g

5.8 °

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx321 HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/RT - - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ambient conditions

2000 g

15 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx3050/StSt/HL/UHV

linear bearing based nanopositioner for horizontal motion with high dynamic force,

15000 g

30 mm

0 .. 100°C

5E-11 mbar

ANRv220 RES HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv220/RES/HV - rotator (360° endless)

highest stability rotator with horizontal rotation axis providing with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 6 m°

ANPz101eXT12 RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RES/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

12 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx311 RES HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

6 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANR51 UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR51/UHV - rotator (360° endless)

compact rotator with vertical rotation axis for ultra-high vacuum with pressures down to 5 E-11 mbar

30 g

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

ECSx5050/StSt/NUM+/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

15000 g

30 mm

5E-11 mbar

1 nm

ANPz51 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/UHV - linear z-nanopositioner

compact linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

2.5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx341 HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ambient conditions

2000 g

20 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz102 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for ambient conditions

200 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANR51 RES HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR51/RES/HV - rotator (360° endless)

compact rotator with vertical rotation axis with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

30 g

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 6 m°

ECSxy5050/Al/NUM/RT

monolithic bearing based xy positioner for horizontal motion with integrated optoelectronic encoder, for ambient conditions

15000 g

25 mm

1E-4 mbar

1 nm

ECSx3050 Al HL RT Nanopositionierer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECSx3050/Al/HL/RT - nanopositioner made from Aluminum,

linear bearing based nanopositioner for horizontal motion with high dynamic force, for ambient conditions

15000 g

30 mm

0 .. 100°C

1E-4 mbar

ANGp101 RES HV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/RES/HV - goniometer for "phi" tilting

goniometer for Φ-positioning with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

5.4 °

0 .. 100°C

1E-8 mbar

0 - 31 T

0.1 m°

ANPx101 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/HV - linear x-nanopositioner

linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSz3030/Al/NUM/RT

compact linear bearing based nanopositioner for vertical motion with integrated optoelectronic encoder, for ambient conditions

800 g

5 mm

0 .. 100°C

1E-4 mbar

1 nm

ANSxy50 UHV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy50/UHV xy-Scanner made from Titanium

compact open loop xy-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx341 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

20 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANR31 HV Rotator aus Titan und BeCu Nanopositioners for Ambient and Vacuum Conditions

ANR31/HV rotator made from Titanium and CuBe

smallest rotator with vertical rotation axis for high vacuum with pressures down to 1E-8 mbar

5 g

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx341 HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2000 g

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ECGp5050/StSt/NUM+/HV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum,

1000 g

10 °

1E-8 mbar

1 µ°

ANPz101 RES HL UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/HL/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz51eXT RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51eXT/RES/UHV - linear z-nanopositioner

compact linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

6 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx321 HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2000 g

15 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx51 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/HV - linear x-nanopositioner

compact linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

25 g

3 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANRv51 UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv51/UHV - rotator (360° endless)

compact rotator with horizontal rotation axis for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

ANRv220 RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv220/RT - rotator (360° endless)

highest stability rotator with horizontal rotation axis providing for ambient conditions

100 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSz100std RT z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100std/RT z-Scanner made from Titanium

standard range open loop z-scanner for ambient conditions

100 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ANGp101 UHV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/UHV - goniometer for "phi" tilting

goniometer for Φ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

5.4 °

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx311 RES HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ambient conditions

2000 g

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANSz100std UHV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100std/UHV z-Scanner made from Titanium

standard range open loop z-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx321 RES HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ambient conditions

2000 g

15 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANRv220 UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv220/UHV - rotator (360° endless)

highest stability rotator with horizontal rotation axis providing for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

7.2

ANGt50 RT Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt50/RT - goniometer for "theta" tilting

compact goniometer for Θ-positioning for ambient conditions

25 g

7.2 °

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz51 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/RT - linear z-nanopositioner

compact linear nanopositioner for vertical motion for ambient conditions

50 g

2.5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx5050/StSt/UHV

linear bearing based nanopositioner for horizontal motion

15000 g

30 mm

0 .. 100°C

5E-11 mbar

ANGp101 RES RT Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/RES/RT - goniometer for "phi" tilting

goniometer for Φ-positioning with integrated resistive encoder, for ambient conditions

100 g

5.4 °

0 .. 100°C

1E-4 mbar

0 - 31 T

0.1 m°

ECGt5050 Al NUM HL RT Goniometer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECGt5050/Al/HL/NUM/RT - goniometer made from Aluminum,

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

1000 g

10 °

0 .. 100°C

1E-4 mbar

1 µ°

ANSz100hs UHV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100sr/UHV z-Scanner made from Titanium

high stability open loop z-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

0 .. 100°C

5E-11 mbar

0 - 31 T

ECR3030/StSt/HV

compact bearing based rotator

2000 g

360 ° endless

0 .. 100°C

1E-8 mbar

ANPx341 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for ambient conditions

2000 g

20 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSz100lr RT z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100lr/RT z-Scanner made from Titanium

long range open loop z-scanner for ambient conditions

100 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ANR51 RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR51/RT - rotator (360° endless)

compact rotator with vertical rotation axis for ambient conditions

30 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

ECGp5050/StSt/NUM+/UHV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum,

1000 g

10 °

5E-11 mbar

1 µ°

ANPz51 RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/RES/UHV - linear z-nanopositioner

compact linear nanopositioner for vertical motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

2.5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANGt101 RES UHV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RES/UHV - goniometer for "theta" tilting

goniometer for Θ-positioning with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

6.6 °

0 .. 100°C

5E-11 mbar

0 - 31 T

0.1 m°

ANSx150 HV x Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSx150/HV x-Scanner made from Titanium

large range open-loop x-scanner for high vacuum with pressures down to 1E-8 mbar

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz51eXT RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51eXT/RES/RT - linear z-nanopositioner

compact linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for ambient conditions

50 g

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPz101eXT12 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range for ambient conditions

200 g

12 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANRv51 RES UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv51/RES/UHV - rotator (360° endless)

compact rotator with horizontal rotation axis with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 6 m°

ANGt101 RES RT Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RES/RT - goniometer for "theta" tilting

goniometer for Θ-positioning with integrated resistive encoder, for ambient conditions

100 g

6.6 °

0 .. 100°C

1E-4 mbar

0 - 31 T

0.1 m°

ANSxy100lr HV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100lr/HV xy-Scanner made from Titanium

long range open loop xy-scanner for high vacuum with pressures down to 1E-8 mbar

0 .. 100°C

1E-8 mbar

0 - 31 T

ECR4040/Al/NUM/RT

bearing based rotator with integrated optoelectronic encoder, for ambient conditions

2000 g

360 ° endless

0 .. 100°C

0.04 m°

ECSx3050/StSt/HL/HV

linear bearing based nanopositioner for horizontal motion with high dynamic force,

15000 g

30 mm

0 .. 100°C

1E-8 mbar

ANPz101eXT12 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for ambient conditions

200 g

12 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ECGp5050 Al HL RT Goniometer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECGp5050/Al/HL/RT - goniometer made from Aluminum,

bearing based goniometer for Φ-positioning with high dynamic force, for ambient conditions

1000 g

10 °

0 .. 100°C

1E-4 mbar

ECSx5050/StSt/NUM/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder,

15000 g

30 mm

0 .. 100°C

5E-11 mbar

1 nm

ANPx341 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

2000 g

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPz101 RES HL HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/HL/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANGt101 HV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/HV - goniometer for "theta" tilting

goniometer for Θ-positioning for high vacuum with pressures down to 1E-8 mbar

6.6 °

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz101 HL HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSx3050/StSt/NUM/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder,

15000 g

30 mm

0 .. 100°C

1E-8 mbar

1 nm

ECSx3030/StSt/NUM/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder,

9000 g

20 mm

0 .. 100°C

5E-11 mbar

1 nm

ANPz101 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HV - linear z-nanopositioner

linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx101 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RES/HV - linear x-nanopositioner

linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANRv51 RES RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv51/RES/RT - rotator (360° endless)

compact rotator with horizontal rotation axis with integrated resistive encoder, for ambient conditions

20 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 6 m°

ECR3030/Al/NUM/RT

compact bearing based rotator with integrated optoelectronic encoder, for ambient conditions

2000 g

360 ° endless

0 .. 100°C

1E-4 mbar

0.01 m°

ANGt101 UHV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/UHV - goniometer for "theta" tilting

goniometer for Θ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

6.6 °

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx321 RES HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2000 g

15 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPz101 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RT - linear z-nanopositioner

linear nanopositioner for vertical motion for ambient conditions

200 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx321 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

2000 g

15 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ECR5050/AL/NUM/RT

N/A with integrated optoelectronic encoder, for ambient conditions

2000 g

360 ° endless

0 .. 100°C

1E-4 mbar

0.01 m°

ANR51 HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR51/HV - rotator (360° endless)

compact rotator with vertical rotation axis for high vacuum with pressures down to 1E-8 mbar

30 g

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz51eXT RES HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51eXT/RES/HV - linear z-nanopositioner

compact linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

50 g

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx311 HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2000 g

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz101 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for ambient conditions

200 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANSxyz100hs UHV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100hs/UHV xyz-Scanner made from Titanium

high stability open loop xyz-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

0 .. 100°C

5E-11 mbar

0 - 31 T

ECR3030/StSt/NUM/UHV

compact bearing based rotator with integrated optoelectronic encoder,

2000 g

360 ° endless

0 .. 100°C

5E-11 mbar

0.01 m°

5.8

ANGp50 RT Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp50/RT - goniometer for "phi" tilting

compact goniometer for Φ-positioning for ambient conditions

25 g

5.8 °

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz101 HL UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANR240 RES HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR240/RES/HV - rotator (360° endless)

rotator with vertical rotation axis, large aperture and ultra low wobble with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 6 m°

ANR240 RES RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR240/RES/RT - rotator (360° endless)

rotator with vertical rotation axis, large aperture and ultra low wobble with integrated resistive encoder, for ambient conditions

200 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 6 m°

ANPx101 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RT - linear x-nanopositioner

linear nanopositioner for horizontal motion for ambient conditions

100 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANR240 RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR240/RT - rotator (360° endless)

rotator with vertical rotation axis, large aperture and ultra low wobble for ambient conditions

200 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSz50 HV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz50/HV z-Scanner made from Titanium,

compact open loop z-scanner for high vacuum with pressures down to 1E-8 mbar

50 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSx3080/StSt/NUM+/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

24000 g

50 mm

5E-11 mbar

1 nm

ECGp5050/StSt/NUM/UHV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder,

1000 g

10 °

0 .. 100°C

5E-11 mbar

1 µ°

ANPz101eXT12 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range for high vacuum with pressures down to 1E-8 mbar

12 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx311 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

2000 g

6 mm

0 .. 100°C

1E-8 mbar

~ 200 nm

ECSx5050/StSt/HL/NUM/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, with high dynamic force,

15000 g

30 mm

0 .. 100°C

1E-8 mbar

1 nm

ANR31 UHV Rotator aus Titan und BeCu Nanopositioners for Ambient and Vacuum Conditions

ANR31/UHV rotator made from Titanium and CuBe

smallest rotator with vertical rotation axis for ultra-high vacuum with pressures down to 5 E-11 mbar

5 g

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

ANR101 RT Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR101/RT - rotator (360° endless)

rotator with vertical rotation axis for ambient conditions

100 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

ECR3030/StSt/NUM+/HV

compact bearing based rotator with integrated optoelectronic encoder optimized for low heat generation in vacuum,

2000 g

360 ° endless

1E-8 mbar

0.01 m°

ECSx3050 Al NUM HL RT Nanopositionierer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECSx3050/Al/HL/NUM/RT - nanopositioner made from Aluminum,

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

15000 g

30 mm

0 .. 100°C

1E-4 mbar

1 nm

ANPx312 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx312/RT - linear x-nanopositioner

ultra stable bearing based linear nanopositioner for horizontal motion for ambient conditions

2000 g

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx3080/StSt/NUM/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder,

24000 g

50 mm

0 .. 100°C

5E-11 mbar

1 nm

ECSx3050 StSt NUM+ HL HV Nanopositioners for Ambient and Vacuum Conditions

ECSx3050/StSt/HL/NUM+/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force,

15000 g

30 mm

1E-8 mbar

1 nm

ECSx3080/StSt/NUM/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder,

24000 g

50 mm

0 .. 100°C

1E-8 mbar

1 nm

ANSxyz100hs RT xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100hs/RT xyz-Scanner made from Titanium

high stability open loop xyz-scanner for ambient conditions

100 g

40 x 40 x 4.3 µm³

9 x 9 x 2 µm³

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx3030/StSt/NUM+/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

9000 g

20 mm

1E-8 mbar

1 nm

ANR240 UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR240/UHV - rotator (360° endless)

rotator with vertical rotation axis, large aperture and ultra low wobble for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx101 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RES/RT - linear x-nanopositioner

linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

100 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ECSx3080/StSt/NUM+/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

24000 g

50 mm

1E-8 mbar

1 nm

ANR240 RES UHV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR240/RES/UHV - rotator (360° endless)

rotator with vertical rotation axis, large aperture and ultra low wobble with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

360 ° endless

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 6 m°

ANPx311 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

6 mm

0 .. 100°C

5E-11 mbar

~ 200 nm

ANRv51 RES HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv51/RES/HV - rotator (360° endless)

compact rotator with horizontal rotation axis with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 6 m°

ECSx3050/StSt/UHV

linear bearing based nanopositioner for horizontal motion

15000 g

30 mm

0 .. 100°C

5E-11 mbar

ECGt5050/StSt/NUM+/UHV

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum,

1000 g

10 °

5E-11 mbar

1 µ°

ANRv220 HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANRv220/HV - rotator (360° endless)

highest stability rotator with horizontal rotation axis providing for high vacuum with pressures down to 1E-8 mbar

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSx3050/StSt/HL/NUM/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, with high dynamic force,

15000 g

30 mm

0 .. 100°C

1E-8 mbar

1 nm

ECSx3030/StSt/NUM+/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

9000 g

20 mm

5E-11 mbar

1 nm

ECGp5050/StSt/NUM/HV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder,

1000 g

10 °

0 .. 100°C

1E-8 mbar

1 µ°

ANSz50 RT z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz50/RT z-Scanner made from Titanium,

compact open loop z-scanner for ambient conditions

50 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx5050/StSt/NUM+/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum,

15000 g

30 mm

1E-8 mbar

1 nm

ANGp101 HV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/HV - goniometer for "phi" tilting

goniometer for Φ-positioning for high vacuum with pressures down to 1E-8 mbar

5.4 °

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx341 HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

20 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx51 UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/UHV - linear x-nanopositioner

compact linear nanopositioner for horizontal motion for ultra-high vacuum with pressures down to 5 E-11 mbar

25 g

3 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPz30 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz30/UHV z-positioner made from Titanium

smallest linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

10 g

2.5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ECSx5050/StSt/NUM/HV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder,

15000 g

30 mm

0 .. 100°C

1E-8 mbar

1 nm

ANPz101 RES HL RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, with high dynamic force, for ambient conditions

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANSxyz100hs HV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100hs/HV xyz-Scanner made from Titanium

high stability open loop xyz-scanner for high vacuum with pressures down to 1E-8 mbar

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxy100std HV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100std/HV xy-Scanner made from Titanium

standard range open loop xy-scanner for high vacuum with pressures down to 1E-8 mbar

0 .. 100°C

1E-8 mbar

0 - 31 T

7.2

ANGt50 HV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt50/HV - goniometer for "theta" tilting

compact goniometer for Θ-positioning for high vacuum with pressures down to 1E-8 mbar

25 g

7.2 °

0 .. 100°C

1E-8 mbar

0 - 31 T

ECSxy5050/Al/RT

monolithic bearing based xy positioner for horizontal motion for ambient conditions

15000 g

25 mm

1E-4 mbar

ANPz101 HL RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with high dynamic force, for ambient conditions

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ECR3030/Al/RT

compact bearing based rotator for ambient conditions

2000 g

360 ° endless

0 .. 100°C

1E-4 mbar

ANPz51 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/RES/RT - linear z-nanopositioner

compact linear nanopositioner for vertical motion with integrated resistive encoder, for ambient conditions

50 g

2.5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANR31 RT Rotator aus Titan und BeCu Nanopositioners for Ambient and Vacuum Conditions

ANR31/RT rotator made from Titanium and CuBe

smallest rotator with vertical rotation axis for ambient conditions

5 g

360 ° endless

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx5050 StSt NUM+ HL UHV Nanopositioners for Ambient and Vacuum Conditions

ECSx5050/StSt/HL/NUM+/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force,

15000 g

30 mm

5E-11 mbar

1 nm

ECGp5050/StSt/UHV

bearing based goniometer for Φ-positioning

1000 g

10 °

0 .. 100°C

5E-11 mbar

ECSx3050/Al/NUM/RT

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, for ambient conditions

15000 g

30 mm

0 .. 100°C

1E-4 mbar

1 nm

ANR101 HV Rotator (360° Endlosdrehung) Nanopositioners for Ambient and Vacuum Conditions

ANR101/HV - rotator (360° endless)

rotator with vertical rotation axis for high vacuum with pressures down to 1E-8 mbar

360 ° endless

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxyz50 RT xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz50/RT xyz-Scanner made from Titanium

compact open loop xyz-scanner for ambient conditions

100 g

30 x 30 x 4.3 µm³

15 x 15 x 2 µm³

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx5050/StSt/HL/UHV

linear bearing based nanopositioner for horizontal motion with high dynamic force,

15000 g

30 mm

0 .. 100°C

5E-11 mbar

ECSz3030/Al/RT

compact linear bearing based nanopositioner for vertical motion for ambient conditions

800 g

5 mm

0 .. 100°C

1E-4 mbar

ECSx3080/Al/RT

linear bearing based nanopositioner for horizontal motion for ambient conditions

24000 g

50 mm

0 .. 100°C

1E-4 mbar

ANSx150 RT x Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSx150/RT x-Scanner made from Titanium

large range open-loop x-scanner for ambient conditions

100 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSz5050/Al/RT

compact linear bearing based nanopositioner for vertical motion for ambient conditions

800 g

8 mm

0 .. 100°C

1E-4 mbar

ANGp101 RES UHV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/RES/UHV - goniometer for "phi" tilting

goniometer for Φ-positioning with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

5.4 °

0 .. 100°C

5E-11 mbar

0 - 31 T

0.1 m°

ECSx3050/StSt/HL/NUM+/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force,

15000 g

30 mm

5E-11 mbar

1 nm

ANPx321 UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for ultra-high vacuum with pressures down to 5 E-11 mbar

2000 g

15 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPz102 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/RT - linear z-nanopositioner

linear nanopositioner for vertical motion for ambient conditions

200 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ECSx5050/StSt/HL/NUM/UHV

linear bearing based nanopositioner for horizontal motion with integrated optoelectronic encoder, with high dynamic force,

15000 g

30 mm

0 .. 100°C

5E-11 mbar

1 nm

ECSx3080 Al HL RT Nanopositioner aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECSx3080/Al/HL/RT - nanopositioner made from Aluminum,

linear bearing based nanopositioner for horizontal motion with high dynamic force, for ambient conditions

24000 g

50 mm

0 .. 100°C

1E-4 mbar

ANPx321 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

2000 g

15 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx311 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

2000 g

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz30 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz30/HV - linear z-nanopositioner

smallest linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

10 g

2.5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz102 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ANPx101 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RES/UHV - linear x-nanopositioner

linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz51 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/HV - linear z-nanopositioner

compact linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

50 g

2.5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx341 RES HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2000 g

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx311 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for ambient conditions

2000 g

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSxyz100std HV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100/HV xyz-Scanner made from Titanium

standard range open loop xyz-scanner for high vacuum with pressures down to 1E-8 mbar

0 .. 100°C

1E-8 mbar

0 - 31 T

ECGt5050/StSt/HV

bearing based goniometer for Θ-positioning

1000 g

10 °

0 .. 100°C

1E-8 mbar

ECSx3080/StSt/HV

linear bearing based nanopositioner for horizontal motion

24000 g

50 mm

0 .. 100°C

1E-8 mbar

ANPz102 RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/RES/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz101eXT12 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range for ultra-high vacuum with pressures down to 5 E-11 mbar

12 mm

0 .. 100°C

5E-11 mbar

0 - 31 T

ECGt5050/StSt/NUM+/HV

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum,

1000 g

10 °

1E-8 mbar

1 µ°

ANPx51 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/RES/HV - linear x-nanopositioner

compact linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

25 g

3 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANSxyz100std RT xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100/RT xyz-Scanner made from Titanium

standard range open loop xyz-scanner for ambient conditions

100 g

50 x 50 x 24 µm³

30 x 30 x 15 µm³

0 .. 100°C

1E-4 mbar

0 - 31 T