Nanopositioners

ANPz30 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz30/RT - linear z-nanopositioner

smallest linear nanopositioner for vertical motion for ambient conditions

10 g

2.5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz30 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz30/HV - linear z-nanopositioner

smallest linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

10 g

2.5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz30 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz30/UHV z-positioner made from Titanium

smallest linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

10 g

2.5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPx51 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/RT - linear x-nanopositioner

compact linear nanopositioner for horizontal motion for ambient conditions

25 g

3 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx51 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/RES/RT - linear x-nanopositioner

compact linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

25 g

3 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx51 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/HV - linear x-nanopositioner

compact linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

25 g

3 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx51 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/RES/HV - linear x-nanopositioner

compact linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

25 g

3 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx51 UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/UHV - linear x-nanopositioner

compact linear nanopositioner for horizontal motion for ultra-high vacuum with pressures down to 5 E-11 mbar

25 g

3 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPx51 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx51/RES/UHV - linear x-nanopositioner

compact linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

25 g

3 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz51 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/RT - linear z-nanopositioner

compact linear nanopositioner for vertical motion for ambient conditions

50 g

2.5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz51 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/RES/RT - linear z-nanopositioner

compact linear nanopositioner for vertical motion with integrated resistive encoder, for ambient conditions

50 g

2.5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPz51 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/HV - linear z-nanopositioner

compact linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

50 g

2.5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz51 RES HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/RES/HV - linear z-nanopositioner

compact linear nanopositioner for vertical motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

50 g

2.5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPz51 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/UHV - linear z-nanopositioner

compact linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

2.5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPz51 RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz51/RES/UHV - linear z-nanopositioner

compact linear nanopositioner for vertical motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

2.5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx101 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RT - linear x-nanopositioner

linear nanopositioner for horizontal motion for ambient conditions

100 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx101 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RES/RT - linear x-nanopositioner

linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

100 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx101 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/HV - linear x-nanopositioner

linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

100 g

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx101 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RES/HV - linear x-nanopositioner

linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

100 g

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx101 UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/UHV - linear x-nanopositioner

linear nanopositioner for horizontal motion for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPx101 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx101/RES/UHV - linear x-nanopositioner

linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz101 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RT - linear z-nanopositioner

linear nanopositioner for vertical motion for ambient conditions

200 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz101eXT12 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range for ambient conditions

200 g

12 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz101 HL RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with high dynamic force, for ambient conditions

300 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz101 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for ambient conditions

200 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPz101eXT12 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for ambient conditions

200 g

12 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPz101 RES HL RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, with high dynamic force, for ambient conditions

200 g

5 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPz101 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HV - linear z-nanopositioner

linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

200 g

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz101eXT12 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range for high vacuum with pressures down to 1E-8 mbar

200 g

12 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz101 HL HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

300 g

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz101 RES HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

200 g

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPz101eXT12 RES HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RES/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

200 g

12 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPz101 RES HL HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/HL/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

200 g

5 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPz101 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPz101eXT12 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range for ultra-high vacuum with pressures down to 5 E-11 mbar

200 g

12 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPz101 HL UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/HL/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPz101 RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

200 g

5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz101eXT12 RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101eXT12/RES/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with extended range with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

200 g

12 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz101 RES HL UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz101/RES/HL/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

200 g

5 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPz102 RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/RT - linear z-nanopositioner

linear nanopositioner for vertical motion for ambient conditions

200 g

4.8 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPz102 RES RT Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/RES/RT - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for ambient conditions

200 g

4.8 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPz102 HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/HV - linear z-nanopositioner

linear nanopositioner for vertical motion for high vacuum with pressures down to 1E-8 mbar

200 g

4.8 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPz102 RES HV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/RES/HV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

200 g

4.8 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPz102 UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion for ultra-high vacuum with pressures down to 5 E-11 mbar

200 g

4.8 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPz102 RES UHV Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPz102/RES/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

200 g

4.8 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx311 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for ambient conditions

2 kg

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx311 HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ambient conditions

2 kg

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx311 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

2 kg

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx311 RES HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ambient conditions

2 kg

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx311 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

2 kg

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx311 HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2 kg

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx311 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

2 kg

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx311 RES HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2 kg

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx311 HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

6 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPx311 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

6 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx311 RES HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx311/HL/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

6 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx312 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx312/RT - linear x-nanopositioner

ultra stable bearing based linear nanopositioner for horizontal motion for ambient conditions

2 kg

6 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx312 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx312/HV - linear x-nanopositioner

ultra stable bearing based linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

2 kg

6 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx321 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for ambient conditions

2 kg

15 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx321 HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/RT - - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ambient conditions

2 kg

15 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx321 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

2 kg

15 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx321 RES HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ambient conditions

2 kg

15 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx321 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

2 kg

15 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx321 HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2 kg

15 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx321 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

2 kg

15 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx321 RES HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2 kg

15 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx321 UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

15 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPx321 HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

15 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPx321 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

15 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx321 RES HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx321/HL/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

15 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx341 RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for ambient conditions

2 kg

20 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx341 HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ambient conditions

2 kg

20 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

ANPx341 RES RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ambient conditions

2 kg

20 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx341 RES HL RT Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/RES/RT - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ambient conditions

2 kg

20 mm

0 .. 100°C

1E-4 mbar

0 - 31 T

~ 200 nm

ANPx341 HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion for high vacuum with pressures down to 1E-8 mbar

2 kg

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx341 HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2 kg

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

ANPx341 RES HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

2 kg

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx341 RES HL HV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

2 kg

20 mm

0 .. 100°C

1E-8 mbar

0 - 31 T

~ 200 nm

ANPx341 HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

20 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

ANPx341 RES UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

20 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANPx341 RES HL UHV Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions

ANPx341/HL/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar

2 kg

20 mm

0 .. 150°C

5E-11 mbar

0 - 31 T

~ 200 nm

ANSxy50 RT xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy50/RT xy-Scanner made from Titanium

compact open loop xy-scanner for ambient conditions

50 g

30 x 30 µm²

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSxy50 HV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy50/HV xy-Scanner made from Titanium

compact open loop xy-scanner for high vacuum with pressures down to 1E-8 mbar

50 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxy50 UHV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy50/UHV xy-Scanner made from Titanium

compact open loop xy-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSz50 RT z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz50/RT z-Scanner made from Titanium

compact open loop z-scanner for ambient conditions

50 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSz50 HV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz50/HV z-Scanner made from Titanium

compact open loop z-scanner for high vacuum with pressures down to 1E-8 mbar

50 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSz50 UHV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz50/UHV z-Scanner made from Titanium

compact open loop z-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSxyz50 RT xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz50/RT xyz-Scanner made from Titanium

compact open loop xyz-scanner for ambient conditions

100 g

30 x 30 x 4.3 µm³

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSxyz50 HV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz50/HV xyz-Scanner made from Titanium

compact open loop xyz-scanner for high vacuum with pressures down to 1E-8 mbar

50 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxyz50 UHV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz50/UHV xyz-Scanner made from Titanium

compact open loop xyz-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

50 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSxy100lr RT xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100lr/RT xy-Scanner made from Titanium

long range open loop xy-scanner for ambient conditions

100 g

50 x 50 µm²

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSxy100std RT xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100std/RT xy-Scanner made from Titanium

standard range open loop xy-scanner for ambient conditions

100 g

40 x 40 µm²

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSxy100lr HV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100lr/HV xy-Scanner made from Titanium

long range open loop xy-scanner for high vacuum with pressures down to 1E-8 mbar

100 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxy100std HV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100std/HV xy-Scanner made from Titanium

standard range open loop xy-scanner for high vacuum with pressures down to 1E-8 mbar

100 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxy100lr UHV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100lr/UHV xy-Scanner made from Titanium

long range open loop xy-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSxy100std UHV xy Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxy100std/UHV xy-Scanner made from Titanium

standard range open loop xy-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSz100lr RT z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100lr/RT z-Scanner made from Titanium

long range open loop z-scanner for ambient conditions

100 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSz100std RT z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100std/RT z-Scanner made from Titanium

standard range open loop z-scanner for ambient conditions

100 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSz100std HV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100/HV z-Scanner made from Titanium

standard range open loop z-scanner for high vacuum with pressures down to 1E-8 mbar

100 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSz100lr HV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100lr/HV z-Scanner made from Titanium

long range open loop z-scanner for high vacuum with pressures down to 1E-8 mbar

100 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSz100lr UHV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100lr/UHV z-Scanner made from Titanium

long range open loop z-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSz100std UHV z Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSz100std/UHV z-Scanner made from Titanium

standard range open loop z-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSxyz100std RT xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100/RT xyz-Scanner made from Titanium

standard range open loop xyz-scanner for ambient conditions

100 g

50 x 50 x 24 µm³

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSxyz100std HV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100/HV xyz-Scanner made from Titanium

standard range open loop xyz-scanner for high vacuum with pressures down to 1E-8 mbar

100 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSxyz100std UHV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSxyz100/UHV xyz-Scanner made from Titanium

standard range open loop xyz-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ANSx150 RT x Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSx150/RT x-Scanner made from Titanium

large range open-loop x-scanner for ambient conditions

100 g

0 .. 100°C

1E-4 mbar

0 - 31 T

ANSx150 HV x Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSx150/HV x-Scanner made from Titanium

large range open-loop x-scanner for high vacuum with pressures down to 1E-8 mbar

100 g

0 .. 100°C

1E-8 mbar

0 - 31 T

ANSx150 UHV x Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions

ANSx150/UHV x-Scanner made from Titanium

large range open-loop x-scanner for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

0 .. 150°C

5E-11 mbar

0 - 31 T

ECGt5050/Al/RT

bearing based goniometer for Θ-positioning for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

ECGt5050 Al HL RT Goniometer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECGt5050/Al/HL/RT - goniometer made from Aluminum

bearing based goniometer for Θ-positioning with high dynamic force, for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

ECGt5050/Al/NUM/RT

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder, for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

1 µ°

ECGt5050 Al NUM HL RT Goniometer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECGt5050/Al/HL/NUM/RT - goniometer made from Aluminum,

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

1 µ°

ECGt5050/StSt/NUM/HV

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

1 kg

10 °

0 .. 100°C

1E-8 mbar

1 µ°

ECGt5050/StSt/NUM+/HV

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

1 kg

10 °

0 .. 100°C

1E-8 mbar

1 µ°

ECGt5050/StSt/NUM/UHV

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar

1 kg

10 °

0 .. 100°C

5E-11 mbar

1 µ°

ECGt5050/StSt/NUM+/UHV

bearing based goniometer for Θ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar

1 kg

10 °

0 .. 100°C

5E-11 mbar

1 µ°

ECGp5050/Al/RT

bearing based goniometer for Φ-positioning for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

ECGp5050 Al HL RT Goniometer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECGp5050/Al/HL/RT - goniometer made from Aluminum,

bearing based goniometer for Φ-positioning with high dynamic force, for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

ECGp5050/Al/NUM/RT

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder, for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

1 µ°

ECGp5050 Al NUM HL RT Goniometer aus Aluminium Nanopositioners for Ambient and Vacuum Conditions

ECGp5050/Al/HL/NUM/RT - goniometer made from Aluminum,

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

1 kg

10 °

0 .. 100°C

1E-4 mbar

1 µ°

ECGp5050/StSt/NUM/HV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

1 kg

10 °

0 .. 100°C

1E-8 mbar

1 µ°

ECGp5050/StSt/NUM+/HV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

1 kg

10 °

0 .. 100°C

1E-8 mbar

1 µ°

ECGp5050/StSt/NUM/UHV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar

1 kg

10 °

0 .. 100°C

5E-11 mbar

1 µ°

ECGp5050/StSt/NUM+/UHV

bearing based goniometer for Φ-positioning with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar

1 kg

10 °

0 .. 100°C

5E-11 mbar

1 µ°

7.2

ANGt50 RT Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt50/RT - goniometer for "theta" tilting

compact goniometer for Θ-positioning for ambient conditions

25 g

7.2 °

0 .. 100°C

1E-4 mbar

0 - 31 T

7.2

ANGt50 HV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt50/HV - goniometer for "theta" tilting

compact goniometer for Θ-positioning for high vacuum with pressures down to 1E-8 mbar

25 g

7.2 °

0 .. 100°C

1E-8 mbar

0 - 31 T

7.2

ANGt50 UHV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt50/UHV - goniometer for "theta" tilting

compact goniometer for Θ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

25 g

7.2 °

0 .. 150°C

5E-11 mbar

0 - 31 T

5.8

ANGp50 RT Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp50/RT - goniometer for "phi" tilting

compact goniometer for Φ-positioning for ambient conditions

25 g

5.8 °

0 .. 100°C

1E-4 mbar

0 - 31 T

5.8

ANGp50 HV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp50/HV - goniometer for "phi" tilting

compact goniometer for Φ-positioning for high vacuum with pressures down to 1E-8 mbar

25 g

5.8 °

0 .. 100°C

1E-8 mbar

0 - 31 T

5.8

ANGp50 UHV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp50/UHV - goniometer for "phi" tilting

compact goniometer for Φ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

25 g

5.8 °

0 .. 150°C

5E-11 mbar

0 - 31 T

ANGt101 RT Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RT - goniometer for "theta" tilting

goniometer for Θ-positioning for ambient conditions

100 g

6.6 °

0 .. 100°C

1E-4 mbar

0 - 31 T

ANGt101 RES RT Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RES/RT - goniometer for "theta" tilting

goniometer for Θ-positioning with integrated resistive encoder, for ambient conditions

100 g

6.6 °

0 .. 100°C

1E-4 mbar

0 - 31 T

0.1 m°

ANGt101 HV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/HV - goniometer for "theta" tilting

goniometer for Θ-positioning for high vacuum with pressures down to 1E-8 mbar

100 g

6.6 °

0 .. 100°C

1E-8 mbar

0 - 31 T

ANGt101 RES HV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RES/HV - goniometer for "theta" tilting

goniometer for Θ-positioning with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

100 g

6.6 °

0 .. 100°C

1E-8 mbar

0 - 31 T

0.1 m°

ANGt101 UHV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/UHV - goniometer for "theta" tilting

goniometer for Θ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

6.6 °

0 .. 150°C

5E-11 mbar

0 - 31 T

ANGt101 RES UHV Goniometer zur Theta Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGt101/RES/UHV - goniometer for "theta" tilting

goniometer for Θ-positioning with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

6.6 °

0 .. 150°C

5E-11 mbar

0 - 31 T

0.1 m°

ANGp101 RT Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/RT - goniometer for "phi" tilting

goniometer for Φ-positioning for ambient conditions

100 g

5.4 °

0 .. 100°C

1E-4 mbar

0 - 31 T

ANGp101 RES RT Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/RES/RT - goniometer for "phi" tilting

goniometer for Φ-positioning with integrated resistive encoder, for ambient conditions

100 g

5.4 °

0 .. 100°C

1E-4 mbar

0 - 31 T

0.1 m°

ANGp101 HV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/HV - goniometer for "phi" tilting

goniometer for Φ-positioning for high vacuum with pressures down to 1E-8 mbar

100 g

5.4 °

0 .. 100°C

1E-8 mbar

0 - 31 T

ANGp101 RES HV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/RES/HV - goniometer for "phi" tilting

goniometer for Φ-positioning with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

100 g

5.4 °

0 .. 100°C

1E-8 mbar

0 - 31 T

0.1 m°

ANGp101 UHV Goniometer zur Phi Verkippung Nanopositioners for Ambient and Vacuum Conditions

ANGp101/UHV - goniometer for "phi" tilting

goniometer for Φ-positioning for ultra-high vacuum with pressures down to 5 E-11 mbar

100 g

5.4 °

0 .. 150°C

5E-11 mbar

0 - 31 T