Ambient and Vacuum Nanopositioners

Ambient and Vacuum Nanopositioners

piezo-based nano drives for atmospheric and vacuum conditions

attocube’s nanopositioners all incorporate a piezoelectric motor to achieve motion with nanometer precision, and are available in a variety of different materials for the body, sizes and options depending on the application of the customer.

For our bearing-based EC* series positioners, light weight and strong aluminium is used for applications in atmosphere, while a stainless steel housing is compatible with vacuum conditions up to UHV. The AN* series is suitable for special requirements such as limited space or non-magnetic demands, and, therefore, built up from titanium or beryllium copper. 

The product finder takes the hassle out of finding the nanopositioner for your setup by sorting the entire portfolio according to the specifications important to you.

nanopositoners, high loads, icon

High Loads

Facilitated by their unique piezodrive technology, their stiff mechanical design, and the application of crossed roller bearings, ambient and vacuum nanopospositioners are capable of moving and placing loads of up to several kg on the nanometer scale.

nanopositoners, closed loop control, icon

Closed Loop Control

In conjunction with the three-axis drive electronics AMC100, ambient and vacuum nanopospositioners are capable of a closed-loop positioning resolution of 1 nm (1 μ°) while providing travel velocities of up to 4.5 mm/s (10°/s). A position repeatability of 50 nm ( 50 μ°) tops off the specification of these nanopositioners.

nanopositioners, vacuum compatibility, icon

Vacuum Compatibility

Ambient and vacuum nanopospositioners are dedicated for operation at room temperature and pressures ranging from ultra high vacuum to ambient. All stages are either available in anodized Aluminum or stainless steel, satisfying both optical and UHV applications.

nanopositioners, materials and life expectancy, icon

Materials & Life Expectancy

For ambient and vacuum nanopospositioners special emphasis was put on both life endurance and cost effective manufacturing. The room temperature optimized drive mechanism, combined with the choice of aluminum or stainless steel as main body material, enables a significant cost reduction, while achieving a life span about 500,000 cycles.

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Overview
Positioners

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with your choice

Type of Positioner

Type of encoder

Minimum Required Pressure

Direction of Movement

Min. Travel Range

Material

ECSx3030/Al/RT

for ambient conditions

ECSx3030/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECSx3030/StSt/HV

for high vacuum with pressures down to 1E-8 mbar

ECSx3030/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECSx3030/StSt/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

ECSx3030/StSt/UHV

for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3030/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3030/StSt/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3030

view options

compact linear bearing based nanopositioner for horizontal motion

ECSx3030
Icon Load

up to 1 kg

Icon Travel Range Linear

up to 20 mm

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 1 nm

ECSx3050/Al/RT

for ambient conditions

ECSx3050/Al/HL/RT

with high dynamic force, for ambient conditions

ECSx3050/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECSx3050/Al/HL/NUM/RT

with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

ECSx3050/StSt/HV

for high vacuum with pressures down to 1E-8 mbar

ECSx3050/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECSx3050/StSt/HL/NUM/HV

with integrated optoelectronic encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ECSx3050/StSt/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

ECSx3050/StSt/HL/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ECSx3050/StSt/UHV

for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3050/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3050/StSt/HL/NUM/UHV

with integrated optoelectronic encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3050/StSt/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3050/StSt/HL/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3050

view options

linear bearing based nanopositioner for horizontal motion

ECSx3050
Icon Load

up to 2 kg

Icon Travel Range Linear

up to 30 mm

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 1 nm

ECSx3080/Al/RT

for ambient conditions

ECSx3080/Al/HL/RT

with high dynamic force, for ambient conditions

ECSx3080/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECSx3080/Al/HL/NUM/RT

with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

ECSx3080/StSt/HV

for high vacuum with pressures down to 1E-8 mbar

ECSx3080/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECSx3080/StSt/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

ECSx3080/StSt/UHV

for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3080/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3080/StSt/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx3080

view options

linear bearing based nanopositioner for horizontal motion

ECSx3080
Icon Load

up to 2 kg

Icon Travel Range Linear

up to 50 mm

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 1 nm

ECSx5050/Al/RT

for ambient conditions

ECSx5050/Al/HL/RT

with high dynamic force, for ambient conditions

ECSx5050/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECSx5050/Al/HL/NUM/RT

with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

ECSx5050/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECSx5050/StSt/HL/NUM/HV

with integrated optoelectronic encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ECSx5050/StSt/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

ECSx5050/StSt/HL/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ECSx5050/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx5050/StSt/HL/NUM/UHV

with integrated optoelectronic encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx5050/StSt/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx5050/StSt/HL/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, with high dynamic force, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECSx5050

view options

linear bearing based nanopositioner for horizontal motion

ECSx5050
Icon Load

up to 2 kg

Icon Travel Range Linear

up to 30 mm

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 1 nm

ECSxy5050/Al/RT

for ambient conditions

ECSxy5050/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECSxy5050

view options

monolithic bearing based xy-positioner for horizontal motion

ECSxy5050
Icon Load

up to 2 kg

Icon Travel Range Linear

up to 25 mm x 25 mm

Icon Room Temperature

273 - 373 K

Icon Pressure

ambient

Icon Resolution

optional 1 nm

ECSz3030/Al/RT

for ambient conditions

ECSz3030/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECSz3030

view options

compact linear bearing based nanopositioner for vertical motion

ECSz3030
Icon Load

up to 0,8 kg

Icon Travel Range Linear

up to 5 mm

Icon Room Temperature

273 - 373 K

Icon Pressure

ambient

Icon Resolution

optional 1 nm

ECSz5050/Al/RT

for ambient conditions

ECSz5050/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECSz5050

view options

linear bearing based nanopositioner for vertical motion

ECSz5050
Icon Load

up to 0,8 kg

Icon Travel Range Linear

up to 8 mm

Icon Room Temperature

273 - 373 K

Icon Pressure

ambient

Icon Resolution

optional 1 nm

ANPz30/RT - linear z-nanopositioner

for ambient conditions

ANPz30/HV - linear z-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPz30/UHV z-positioner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz30

view options

smallest linear nanopositioner for vertical motion

ANPz30
Icon Load

up to 10 g

Icon Travel Range Linear

up to 2,5 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANPx51/RT - linear x-nanopositioner

for ambient conditions

ANPx51/RES/RT - linear x-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPx51/HV - linear x-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPx51/RES/HV - linear x-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPx51/UHV - linear x-nanopositioner

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx51/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx51

view options

compact linear nanopositioner for horizontal motion

ANPx51
Icon Load

up to 25 g

Icon Travel Range Linear

up to 3 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPz51/RT - linear z-nanopositioner

for ambient conditions

ANPz51/RES/RT - linear z-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPz51/HV - linear z-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPz51/RES/HV - linear z-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPz51/UHV - linear z-nanopositioner

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz51/RES/UHV - linear z-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz51

view options

compact linear nanopositioner for vertical motion

ANPz51
Icon Load

up to 50 g

Icon Travel Range Linear

up to 2,5 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPx101/RT - linear x-nanopositioner

for ambient conditions

ANPx101/RES/RT - linear x-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPx101/HV - linear x-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPx101/RES/HV - linear x-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPx101/UHV - linear x-nanopositioner

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx101/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx101

view options

linear nanopositioner for horizontal motion

ANPx101
Icon Load

up to 100g

Icon Travel Range Linear

up to 5 mm

Icon Room Temperature

0,01 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPz101eXT12/RT - linear z-nanopositioner

for ambient conditions

ANPz101eXT12/RES/RT - linear z-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPz101eXT12/HV - linear z-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPz101eXT12/RES/HV - linear z-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPz101eXT12/UHV - linear z-nanopositioner

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz101eXT12/RES/UHV - linear z-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz101eXT12

view options

linear nanopositioner for vertical motion with extended range

ANPz101eXT12
Icon Load

up to 200 g

Icon Travel Range Linear

up to 12 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPz101/RT - linear z-nanopositioner

for ambient conditions

ANPz101/RES/RT - linear z-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPz101/HV - linear z-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPz101/RES/HV - linear z-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPz101/UHV - linear z-nanopositioner

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz101/RES/UHV - linear z-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz101

view options

linear nanopositioner for vertical motion

ANPz101
Icon Load

up to 300 g

Icon Travel Range Linear

up to 5 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPz102/RT - linear z-nanopositioner

for ambient conditions

ANPz102/RES/RT - linear z-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPz102/HV - linear z-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPz102/RES/HV - linear z-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPz102/UHV - linear z-nanopositioner

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz102/RES/UHV - linear z-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPz102

view options

linear nanopositioner for vertical motion with ultra-low lateral runout

ANPz102
Icon Load

up to 200 g

Icon Travel Range Linear

up to 5 mm

Icon Room Temperature

0,01 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPx311/RT - linear x-nanopositioner

for ambient conditions

ANPx311/HL/RT - linear x-nanopositioner

with high dynamic force, for ambient conditions

ANPx311/RES/RT - linear x-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPx311/HL/RES/RT - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for ambient conditions

ANPx311/HV - linear x-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPx311/HL/HV - linear x-nanopositioner

with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ANPx311/RES/HV - linear x-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPx311/HL/RES/HV - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ANPx311/HL/UHV - linear x-nanopositioner

with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx311/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx311/HL/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx311

view options

bearing based linear nanopositioner for horizontal motion

ANPx311
Icon Load

up to 2 kg

Icon Travel Range Linear

up to 6 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPx321/RT - linear x-nanopositioner

for ambient conditions

ANPx321/HL/RT - - linear x-nanopositioner

with high dynamic force, for ambient conditions

ANPx321/RES/RT - linear x-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPx321/HL/RES/RT - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for ambient conditions

ANPx321/HV - linear x-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPx321/HL/HV - linear x-nanopositioner

with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ANPx321/RES/HV - linear x-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPx321/HL/RES/HV - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ANPx321/UHV - linear x-nanopositioner

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx321/HL/UHV - linear x-nanopositioner

with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx321/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx321/HL/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx321

view options

bearing based linear nanopositioner for horizontal motion

ANPx321
Icon Load

up to 2 kg

Icon Travel Range Linear

up to 15 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANPx341/RT - linear x-nanopositioner

for ambient conditions

ANPx341/HL/RT - linear x-nanopositioner

with high dynamic force, for ambient conditions

ANPx341/RES/RT - linear x-nanopositioner

with integrated resistive encoder, for ambient conditions

ANPx341/HL/RES/RT - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for ambient conditions

ANPx341/HV - linear x-nanopositioner

for high vacuum with pressures down to 1E-8 mbar

ANPx341/HL/HV - linear x-nanopositioner

with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ANPx341/RES/HV - linear x-nanopositioner

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANPx341/HL/RES/HV - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for high vacuum with pressures down to 1E-8 mbar

ANPx341/HL/UHV - linear x-nanopositioner

with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx341/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx341/HL/RES/UHV - linear x-nanopositioner

with integrated resistive encoder, with high dynamic force, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANPx341

view options

large range bearing based linear nanopositioner for horizontal motion

ANPx341
Icon Load

up to 2 kg

Icon Travel Range Linear

up to 20 mm

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 200 nm

ANSxy50/RT xy-Scanner made from Titanium

for ambient conditions

ANSxy50/HV xy-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSxy50/UHV xy-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSxy50

view options

compact open loop xy-scanner

ANSxy50
Icon Load

up to 50 g

Icon Travel Range Linear

up to 30 µm x 30 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSz50/RT z-Scanner made from Titanium

for ambient conditions

ANSz50/HV z-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSz50/UHV z-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSz50

view options

compact open loop z-scanner

ANSz50
Icon Load

up to 50 g

Icon Travel Range Linear

up to 4,3 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSxyz50/RT xyz-Scanner made from Titanium

for ambient conditions

ANSxyz50/HV xyz-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSxyz50/UHV xyz-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSxyz50

view options

compact open loop xyz-scanner

ANSxyz50
Icon Load

up to 50 g

Icon Travel Range Linear

up to 30 µm x 30 µm x 4,3 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSxy100std/RT xy-Scanner made from Titanium

for ambient conditions

ANSxy100std/HV xy-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSxy100std/UHV xy-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSxy100std

view options

standard range open loop xy-scanner

ANSxy100std
Icon Load

up to 200 g

Icon Travel Range Linear

up to 40 µm x 40 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSxy100lr/RT xy-Scanner made from Titanium

for ambient conditions

ANSxy100lr/HV xy-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSxy100lr/UHV xy-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSxy100lr

view options

large range open loop xy-scanner

ANSxy100lr
Icon Load

up to 100 g

Icon Travel Range Linear

up to 50 µm x 50 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSz100lr/RT z-Scanner made from Titanium

for ambient conditions

ANSz100lr/HV z-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSz100lr/UHV z-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSz100lr

view options

large range open loop z-scanner

ANSz100lr
Icon Load

up to 100 g

Icon Travel Range Linear

up to 50 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSz100std/RT z-Scanner made from Titanium

for ambient conditions

ANSz100/HV z-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSz100std/UHV z-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSz100std

view options

standard range open loop z-scanner

ANSz100std
Icon Load

up to 100 g

Icon Travel Range Linear

up to 24 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSxyz100/RT xyz-Scanner made from Titanium

for ambient conditions

ANSxyz100/HV xyz-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSxyz100/UHV xyz-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSxyz100std

view options

open loop xyz-scanner

ANSxyz100std
Icon Load

up to 100 g

Icon Travel Range Linear

up to 50 µm x 50 µm x 24 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANSx150/RT x-Scanner made from Titanium

for ambient conditions

ANSx150/HV x-Scanner made from Titanium

for high vacuum with pressures down to 1E-8 mbar

ANSx150/UHV x-Scanner made from Titanium

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANSx150

view options

large range open loop x-scanner

ANSx150
Icon Load

up to 100 g

Icon Travel Range Linear

up to 125 µm *

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ECGt5050/Al/RT

for ambient conditions

ECGt5050/Al/HL/RT

with high dynamic force, for ambient conditions

ECGt5050/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECGt5050/Al/HL/NUM/RT

with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

ECGt5050/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECGt5050/StSt/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

ECGt5050/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECGt5050/StSt/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECGt5050

view options

bearing based goniometer for T-positioning

ECGt5050
Icon Load

up to 1 kg

Icon Travel Range Gonio

up to 10°

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 1E-11 mbar

Icon Resolution

optional 1 µ°

ECGp5050/Al/RT

for ambient conditions

ECGp5050/Al/HL/RT

with high dynamic force, for ambient conditions

ECGp5050/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECGp5050/Al/HL/NUM/RT

with integrated optoelectronic encoder, with high dynamic force, for ambient conditions

ECGp5050/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECGp5050/StSt/NUM+/HV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for high vacuum with pressures down to 1E-8 mbar

ECGp5050/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECGp5050/StSt/NUM+/UHV

with integrated optoelectronic encoder optimized for low heat generation in vacuum, for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C

ECGp5050

view options

bearing based goniometer for F-positioning

ECGp5050
Icon Load

up to 1 kg

Icon Travel Range Gonio

up to 10°

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 1E-11 mbar

Icon Resolution

optional 1 µ°

ANGt101/RT - goniometer for "theta" tilting

for ambient conditions

ANGt101/RES/RT - goniometer for "theta" tilting

with integrated resistive encoder, for ambient conditions

ANGt101/HV - goniometer for "theta" tilting

for high vacuum with pressures down to 1E-8 mbar

ANGt101/RES/HV - goniometer for "theta" tilting

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANGt101/UHV - goniometer for "theta" tilting

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANGt101/RES/UHV - goniometer for "theta" tilting

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANGt101

view options

goniometer for Θ-positioning

ANGt101
Icon Load

up to 100 g

Icon Travel Range Gonio

up to 6,6°

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 0,1 m°

ANGp101/RT - goniometer for "phi" tilting

for ambient conditions

ANGp101/RES/RT - goniometer for "phi" tilting

with integrated resistive encoder, for ambient conditions

ANGp101/HV - goniometer for "phi" tilting

for high vacuum with pressures down to 1E-8 mbar

ANGp101/RES/HV - goniometer for "phi" tilting

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANGp101/UHV - goniometer for "phi" tilting

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANGp101/RES/UHV - goniometer for "phi" tilting

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANGp101

view options

goniometer for Φ-positioning

ANGp101
Icon Load

up to 100 g

Icon Travel Range Gonio

up to 5,4°

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 0,1 m°

ECR3030/Al/RT

for ambient conditions

ECR3030/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECR3030/StSt/HV

for high vacuum with pressures down to 1E-8 mbar

ECR3030/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECR3030/StSt/UHV

for ultra-high vacuum with pressures down to 1E-9 mbar (/UHV), all rotators can be baked out up to 150 °C

ECR3030/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 1E-9 mbar (/UHV), all rotators can be baked out up to 150 °C

ECR3030

view options

compact bearing based rotator

ECR3030
Icon Load

up to 0,5 kg

Icon Travel Range Gonio

360°

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 1E-9 mbar

Icon Resolution

optional 0,01 m°

ECR4040/Al/RT

for ambient conditions

ECR4040/Al/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECR4040

view options

bearing based rotator

ECR4040
Icon Load

up to 2 kg

Icon Travel Range Gonio

360°

Icon Room Temperature

273 - 373 K

Icon Pressure

ambient

Icon Resolution

optional 0,04 m°

ECR5050hs/Al/RT

for ambient conditions

ECR5050hs/AL/NUM/RT

with integrated optoelectronic encoder, for ambient conditions

ECR5050hs/StSt/HV

for high vacuum with pressures down to 1E-8 mbar

ECR5050hs/StSt/NUM/HV

with integrated optoelectronic encoder, for high vacuum with pressures down to 1E-8 mbar

ECR5050hs/StSt/UHV

for ultra-high vacuum with pressures down to 1E-9 mbar (/UHV), all rotators can be baked out up to 150 °C

ECR5050hs/StSt/NUM/UHV

with integrated optoelectronic encoder, for ultra-high vacuum with pressures down to 1E-9 mbar (/UHV), all rotators can be baked out up to 150 °C

ECR5050hs

view options

high stability bearing based rotator

ECR5050hs
Icon Load

up to 2 kg

Icon Travel Range Gonio

360°

Icon Room Temperature

273 - 423 K

Icon Pressure

down to 1E-9 mbar

Icon Resolution

optional 0,01 m°

ANR31/RT rotator made from Titanium and CuBe

for ambient conditions

ANR31/HV rotator made from Titanium and CuBe

for high vacuum with pressures down to 1E-8 mbar

ANR31/UHV rotator made from Titanium and CuBe

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANR31

view options

smallest rotator with vertical rotation axis

ANR31
Icon Load

up to 5 g

Icon Travel Range Gonio

360°

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

ANR51/RT - rotator (360° endless)

for ambient conditions

ANR51/RES/RT - rotator (360° endless)

with integrated resistive encoder, for ambient conditions

ANR51/HV - rotator (360° endless)

for high vacuum with pressures down to 1E-8 mbar

ANR51/RES/HV - rotator (360° endless)

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANR51/UHV - rotator (360° endless)

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANR51/RES/UHV - rotator (360° endless)

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANR51

view options

compact rotator with vertical rotation axis

ANR51
Icon Load

up to 30 g

Icon Travel Range Gonio

360°

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 6 m°

ANRv51/RT- rotator (360° endless)

for ambient conditions

ANRv51/RES/RT - rotator (360° endless)

with integrated resistive encoder, for ambient conditions

ANRv51/HV - rotator (360° endless)

for high vacuum with pressures down to 1E-8 mbar

ANRv51/RES/HV - rotator (360° endless)

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANRv51/UHV - rotator (360° endless)

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANRv51/RES/UHV - rotator (360° endless)

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANRv51

view options

compact rotator with horizontal rotation axis

ANRv51
Icon Load

up to 20 g

Icon Travel Range Gonio

360°

Icon Room Temperature

0,01 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 6 m°

ANR101/RT - rotator (360° endless)

for ambient conditions

ANR101/RES/RT - rotator (360° endless)

with integrated resistive encoder, for ambient conditions

ANR101/HV - rotator (360° endless)

for high vacuum with pressures down to 1E-8 mbar

ANR101/RES/HV - rotator (360° endless)

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANR101/UHV - rotator (360° endless)

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANR101/RES/UHV - rotator (360° endless)

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANR101

view options

rotator with vertical rotation axis

ANR101
Icon Load

up to 100 g

Icon Travel Range Gonio

360°

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 6 m°

ANRv220/RT - rotator (360° endless)

for ambient conditions

ANRv220/RES/RT - rotator (360° endless)

with integrated resistive encoder, for ambient conditions

ANRv220/HV - rotator (360° endless)

for high vacuum with pressures down to 1E-8 mbar

ANRv220/RES/HV - rotator (360° endless)

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANRv220/UHV - rotator (360° endless)

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANRv220/RES/UHV - rotator (360° endless)

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANRv220

view options

highest stability rotator with horizontal rotation axis

ANRv220
Icon Load

up to 100 g

Icon Travel Range Gonio

360°

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 6 m°

ANR240/RT - rotator (360° endless)

for ambient conditions

ANR240/RES/RT - rotator (360° endless)

with integrated resistive encoder, for ambient conditions

ANR240/HV - rotator (360° endless)

for high vacuum with pressures down to 1E-8 mbar

ANR240/RES/HV - rotator (360° endless)

with integrated resistive encoder, for high vacuum with pressures down to 1E-8 mbar

ANR240/UHV - rotator (360° endless)

for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANR240/RES/UHV - rotator (360° endless)

with integrated resistive encoder, for ultra-high vacuum with pressures down to 5 E-11 mbar, all positioners can be baked out up to 150°C

ANR240

view options

rotator with vertical rotation axis, large aperture and ultra-low wobble

ANR240
Icon Load

up to 200 g

Icon Travel Range Gonio

360°

Icon Room Temperature

1 - 423 K

Icon Pressure

down to 5E-11 mbar

Icon Resolution

optional 6 m°