Closed Loop Motion Control
automated compensation of displacements
A closed loop positioning system automatically measures and adjusts the position of the moving component and compensates deviations originating from thermal drifts or other external influences. Besides the positioners for performing the motion, a closed loop system requires a sensor for tracking the displacement. A laser interferometer in this application has the advantages of using a noncontact method, making a high precision measurement, and being easy to integrate. In manufacturing processes or measurement tasks, the relative position between tool and work piece need to be regulated. attocube's interferometer can be used for position tracking of the moving parts in many kinds of machines, including single axes, X-Y tables, machine bridges, machine tables, positioning tables, and piezo-based positioners. The majority of existing machine tools use a glass scale as length measuring device. However, in areas requiring higher accuracy, including 3D-printing, computer tomography, microscopy, micro manufacturing, and semiconductor manufacturing, glass scales are not accurate and flexible enough. Additionally, in experimental setups involving light, the optical components like mirrors, lenses, or beam splitters must be placed relative to each other in a manner that is robust against thermal drifts. Since attocube's laser interferometer can measure directly on the target regardless of the material, it is ideal for closed loop positioning for a wide variety of components.
In situ Position Capturing in Coordinate Measurement Machines
Long distance and high-speed displacement measurements using the FPS3010
Machine Integrated Sensors for Motion Capturing
Ultra Precise In-Line Travel Property Control
OEM Interferometers for motion tracking in coordinate measurement machines
Rotation motion error compensation for stable probe positioning
Synchronous Data Acquisition for Detecting Vibration Propagation
Detecting vibration propagation and parasitic motions with picometer resolution
Rotation motion error compensation using interferometry
Profilometry on Micron-sized Objects
Fiber based laser interferometry stimulating the development of highly precise micro manufacturing
Characterizing a scanning fluorescence X-ray microscope
Displacement Sensing in Additive Manufacturing with attocube's Interferometer
Detection of Object Displacement and Geometrical Errors of a Dimensional Cone-beam Computed Tomography System
Displacement Measuring Interferometer
The compact and modular IDS3010 - interferometric displacement sensor - easy to integrate into challenging OEM applications in ambient conditions or extreme environments.
Sensoric OEM Solutions
Customized components, integrated modules and system solutions for customer-specific sensing applications.