one dimensional interferometer with nanometer accuracy
attocube‘s laser displacement sensor measures linear motions of a target. The miniaturized interferometer device is capable of measuring in three axes. Based on a Fabry-Perot Interferometer, it enables large working distances ranging from a few millimeters to several meters. The laser interferometer performs most accurate measurements on different materials and geometries. The patented, fiber-based technology of attocube provides a modular measurement setup and extremely compact laser sensor heads. This technology also enables vibration measurements, runout measurements of rotations, or calibration of machine tools. The position signal can be used as the input for a closed-loop positioning system.
Fields of Applications
Motion Analysis and Accuracy Determination.
Wafer and Mask Inspection
Components used in quality control and inspection of wafers or optical components.
Detection of thermal drift and tension induced material deformation.
Closed Loop Motion Control
Interferometric displacement sensing for closed loop motion control in integrated systems.
Position control of devices under challenging conditions such as vacuum, extreme temperatures and harsh radiation.
Laboratory tests and research applications, such as material deformation, vibration analysis or others.
Vibration detection for increasing manufacturing accuracy.
Calibration and accuracy evaluation for machine tools, measurement instruments, and drive systems.
Positioning with highest accuracy in integrated setups using interferometric sensors and nanopositioners.
In situ Position Capturing in Coordinate Measurement Machines
Long distance and high-speed displacement measurements using the FPS3010
Machine Integrated Sensors for Motion Capturing
Ultra Precise In-Line Travel Property Control
OEM Interferometers for motion tracking in coordinate measurement machines
Ultra-wide frequency range vibrometry
The SpaceDrive Project - The IDS3010 to gauge a thrust balance in the sub-µN range
In situ Measurements of Irradiation-Induced Creep on Amorphous Micropillars
Rotation motion error compensation for stable probe positioning
Synchronous Data Acquisition for Detecting Vibration Propagation
Vibration of high-power precision laser mirror
Laser Interferometry in Radiation Harsh Environments using the FPS3010
Detecting vibration propagation and parasitic motions with picometer resolution
Rotation motion error compensation using interferometry
Using the FPS3010 Optical Interferometer in Quality Control of a Nanopositioner
Measuring Water Surface Displacements
Ultra-precise contactless detection of bearing errors
Contactless Frequency Analysis of Motor Vibrations
Measuring Brownian Motion of Comercial Micro-Cantilevers
Profilometry on Micron-sized Objects
Fiber based laser interferometry stimulating the development of highly precise micro manufacturing
Measuring a speakers‘ frequency response using the interferometric sensor
Characterizing a scanning fluorescence X-ray microscope
Displacement Sensing in Additive Manufacturing with attocube's Interferometer
Detection of Object Displacement and Geometrical Errors of a Dimensional Cone-beam Computed Tomography System
Fast Calibration of Machine Tools based on the IDS3010
Life Science: 3D Imaging System Showing Natural Colour
Prof. Dr. M. Tajmar
Institute for Aerospace Engineering, Dresden University of Technology, Germany
The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab – thanks to the great support from attocube.
Dipl.-Ing. Nanxi Kong
Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany
The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions.
Nicolas Stübe, Dr. Alke Meents
DESY/suna-precision GmbH, Hamburg, Germany
Thanks to the fast adjustment and precise sub-nanometer resolution of the sensor, we`re able to easily identify the trajectories and eigen frequencies for the optimization of flexure-based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications. With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of 2015, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm within by beginning of next year.
Dr. Stefan Kubsky
Synchrotron Soleil St. Aubin, France
An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensorheads. We rapidly managed to file a patent application implying interferometric metrology.
Dr. T. Zickler
CERN / Magnetic Measurement Section, Geneva, Switzerland
Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.
Dr. Jonathan Kelly
Diamond Light Source Ltd., Didcot, UK
The WAVE software has proved very useful in characterising and commissioning the interferometers on our P99, Ptychography test set-up. It enabled easy measurement and identification of the mechanical resonances of the system. It is also ideal for sampling positions at a wide range of rates for use in other applications.