Displacement Sensor

one dimensional interferometer with nanometer accuracy

attocube‘s laser displacement sensor measures linear motions of a target. The miniaturized interferometer device is capable of measuring in three axes. Based on a Fabry-Perot Interferometer, it enables large working distances ranging from a few millimeters to several meters. The laser interferometer performs most accurate measurements on different materials and geometries. The patented, fiber-based technology of attocube provides a modular measurement setup and extremely compact laser sensor heads. This technology also enables vibration measurements, runout measurements of rotations, or calibration of machine tools. The position signal can be used as the input for a closed-loop positioning system.

Application Snippets

Measuring the Deformation of a Magnetically Levitated Plate displacement sensor

Measuring the Deformation of a Magnetically Levitated Plate

Ultra Precise Motion Tracking in Multilayer Zone Plate Imaging laser interferometer IDS3010

Ultra Precise Motion Tracking in Multilayer Zone Plate Imaging

IDS3010 Detecting Vibrations with Picometer Resolution laser interferometer IDS3010

IDS3010 Detecting Vibrations with Picometer Resolution

Fast Calibration of Machine Tools based on the IDS3010 displacement sensing

Fast Calibration of Machine Tools based on the IDS3010

Detection of Object Displacement and Geometrical Errors of a Dimensional Cone beam Computed Tomography System IDS3010  displacement sensor

Detection of Object Displacement and Geometrical Errors of a Dimensional Cone-beam Computed Tomography System

Displacement Sensing in Additive Manufacturing with attocube's Interferometer IDS + OEM

Displacement Sensing in Additive Manufacturing with attocube's Interferometer

Characterizing a scanning fluorescence X ray microscope  made with the displacement sensor

Characterizing a scanning fluorescence X-ray microscope

Measuring a speakers‘ frequency response using the interferometric sensor made with the displacement sensor

Measuring a speakers‘ frequency response using the interferometric sensor

Fiber based laser interferometry stimulating the development of highly precise micro manufacturing made with the displacement sensor

Fiber based laser interferometry stimulating the development of highly precise micro manufacturing

Profilometry on Micron sized Objects made with the displacement sensor

Profilometry on Micron-sized Objects

Measuring Brownian Motion of Comercial Micro Cantilevers made with the displacement sensor

Measuring Brownian Motion of Comercial Micro-Cantilevers

Contactless Frequency Analysis of Motor Vibrations made with the displacement sensor

Contactless Frequency Analysis of Motor Vibrations

Ultra precise contactless detection of bearing errors made with the displacement sensor

Ultra-precise contactless detection of bearing errors

Measuring Water Surface Displacements made with the displacement sensor

Measuring Water Surface Displacements

Optical Interferometer in Quality Control of a Nanopositioner made with the displacement sensor

Optical Interferometer in Quality Control of a Nanopositioner

Rotation motion error compensation using interferometry made with the displacement sensor

Rotation motion error compensation using interferometry

Detecting vibration propagation and parasitic motions with picometer resolution IDS3010  displacement sensor

Detecting vibration propagation and parasitic motions with picometer resolution

Laser Interferometry in Radiation Harsh Environments made with the displacement sensor

Laser Interferometry in Radiation Harsh Environments

Vibration of high power precision laser mirror IDS3010  displacement sensor

Vibration of high-power precision laser mirror

Synchronous Data Acquisition for Detecting Vibration Propagation made with the displacement sensor

Synchronous Data Acquisition for Detecting Vibration Propagation

Rotation motion error compensation for stable probe positioning POS SEN Solution (x ray mic …)

Rotation motion error compensation for stable probe positioning

In situ Measurements of Irradiation Induced Creep on Amorphous Micropillars made with Ambient or Vacuum Nanopositioner and IDS3010

In situ Measurements of Irradiation-Induced Creep on Amorphous Micropillars

The SpaceDrive Project   The IDS3010 to gauge a thrust balance in the sub µN range IDS3010  displacement sensor

The SpaceDrive Project - The IDS3010 to gauge a thrust balance in the sub-µN range

Ultra wide frequency range vibrometry IDS3010  displacement sensor

Ultra-wide frequency range vibrometry

OEM Interferometers for motion tracking in coordinate measurement machines IDS3010  displacement sensor

OEM Interferometers for motion tracking in coordinate measurement machines

Ultra Precise In Line Travel Property Control IDS3010  displacement sensor

Ultra Precise In-Line Travel Property Control

Machine Integrated Sensors for Motion Capturing displacement sensing

Machine Integrated Sensors for Motion Capturing

Long distance and high speed displacement measurements made with the displacement sensor

Long distance and high-speed displacement measurements

In situ Position Capturing in Coordinate Measurement Machines made with the displacement sensor

In situ Position Capturing in Coordinate Measurement Machines

Environmental Compensation IDS3010  displacement sensor

Environmental Compensation

Customer Feedback

Prof. Dr. M. Tajmar

Institute for Aerospace Engineering, Dresden University of Technology, Germany

The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab – thanks to the great support from attocube.

Dipl.-Ing. Nanxi Kong

Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany

The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions.

Nicolas Stübe, Dr. Alke Meents

DESY/suna-precision GmbH, Hamburg, Germany

Thanks to the fast adjustment and precise sub-nanometer resolution of the sensor, we`re able to easily identify the trajectories and eigen frequencies for the optimization of flexure-based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications. With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of 2015, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm within by beginning of next year.

Dr. Stefan Kubsky

Synchrotron Soleil St. Aubin, France

An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensorheads. We rapidly managed to file a patent application implying interferometric metrology.

Dr. T. Zickler

CERN / Magnetic Measurement Section, Geneva, Switzerland

Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.

Dr. Jonathan Kelly

Diamond Light Source Ltd., Didcot, UK

The WAVE software has proved very useful in characterising and commissioning the interferometers on our P99, Ptychography test set-up.  It enabled easy measurement and identification of the mechanical resonances of the system.  It is also ideal for sampling positions at a wide range of rates for use in other applications.