Displacement Sensor

one dimensional interferometer with nanometer accuracy

attocube‘s laser displacement sensor measures linear motions of a target. The miniaturized interferometer device is capable of measuring in three axes. Based on a Fabry-Perot Interferometer, it enables large working distances ranging from a few millimeters to several meters. The laser interferometer performs most accurate measurements on different materials and geometries. The patented, fiber-based technology of attocube provides a modular measurement setup and extremely compact laser sensor heads. This technology also enables vibration measurements, runout measurements of rotations, or calibration of machine tools. The position signal can be used as the input for a closed-loop positioning system.

Application Snippets

Environmental Compensation displacement sensing

Environmental Compensation

In situ Position Capturing in Coordinate Measurement Machines IDS3010

In situ Position Capturing in Coordinate Measurement Machines

Long distance and high speed displacement measurements using the FPS3010 displacement sensing

Long distance and high-speed displacement measurements using the FPS3010

Machine Integrated Sensors for Motion Capturing displacement sensing

Machine Integrated Sensors for Motion Capturing

Ultra Precise In Line Travel Property Control displacement sensing

Ultra Precise In-Line Travel Property Control

OEM Interferometers for motion tracking in coordinate measurement machines displacement sensing

OEM Interferometers for motion tracking in coordinate measurement machines

Ultra wide frequency range vibrometry displacement sensing

Ultra-wide frequency range vibrometry

The SpaceDrive Project   The IDS3010 to gauge a thrust balance in the sub µN range displacement sensing

The SpaceDrive Project - The IDS3010 to gauge a thrust balance in the sub-µN range

In situ Measurements of Irradiation Induced Creep on Amorphous Micropillars Ambient or Vacuum Positioners  IDS3010

In situ Measurements of Irradiation-Induced Creep on Amorphous Micropillars

Rotation motion error compensation for stable probe positioning POS SEN Solution (x ray mic …)

Rotation motion error compensation for stable probe positioning

Synchronous Data Acquisition for Detecting Vibration Propagation IDS3010

Synchronous Data Acquisition for Detecting Vibration Propagation

Vibration of high power precision laser mirror displacement sensing

Vibration of high-power precision laser mirror

Laser Interferometry in Radiation Harsh Environments using the FPS3010 displacement sensing

Laser Interferometry in Radiation Harsh Environments using the FPS3010

Detecting vibration propagation and parasitic motions with picometer resolution displacement sensing

Detecting vibration propagation and parasitic motions with picometer resolution

Rotation motion error compensation using interferometry IDS3010

Rotation motion error compensation using interferometry

Using the FPS3010 Optical Interferometer in Quality Control of a Nanopositioner displacement sensing

Using the FPS3010 Optical Interferometer in Quality Control of a Nanopositioner

Measuring Water Surface Displacements IDS3010

Measuring Water Surface Displacements

Ultra precise contactless detection of bearing errors IDS3010

Ultra-precise contactless detection of bearing errors

Contactless Frequency Analysis of Motor Vibrations displacement sensing

Contactless Frequency Analysis of Motor Vibrations

Measuring Brownian Motion of Comercial Micro Cantilevers IDS3010

Measuring Brownian Motion of Comercial Micro-Cantilevers

Profilometry on Micron sized Objects IDS3010

Profilometry on Micron-sized Objects

Fiber based laser interferometry stimulating the development of highly precise micro manufacturing IDS3010

Fiber based laser interferometry stimulating the development of highly precise micro manufacturing

Measuring a speakers‘ frequency response using the FPS3010 interferometric sensor displacement sensing

Measuring a speakers‘ frequency response using the FPS3010 interferometric sensor

Characterizing a scanning fluorescence X ray microscope  IDS3010

Characterizing a scanning fluorescence X-ray microscope

Displacement Sensing in Additive Manufacturing with attocube's Interferometer IDS + OEM

Displacement Sensing in Additive Manufacturing with attocube's Interferometer

Detection of Object Displacement and Geometrical Errors of a Dimensional Cone beam Computed Tomography System displacement sensing

Detection of Object Displacement and Geometrical Errors of a Dimensional Cone-beam Computed Tomography System

Customer Feedback

Prof. Dr. M. Tajmar

Institute for Aerospace Engineering, Dresden University of Technology, Germany

The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab – thanks to the great support from attocube.

Dipl.-Ing. Nanxi Kong

Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany

The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions.

Nicolas Stübe, Dr. Alke Meents

DESY/suna-precision GmbH, Hamburg, Germany

Thanks to the fast adjustment and precise sub-nanometer resolution of the sensor, we`re able to easily identify the trajectories and eigen frequencies for the optimization of flexure-based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications. With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of 2015, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm within by beginning of next year.

Dr. Stefan Kubsky

Synchrotron Soleil St. Aubin, France

An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensorheads. We rapidly managed to file a patent application implying interferometric metrology.

Dr. T. Zickler

CERN / Magnetic Measurement Section, Geneva, Switzerland

Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.