Cryogenic Photonic Probe Station

Cryogenic Photonic Probe Station

combined probe station and confocal microscopy

2 independently movable fiber probes

adjust coupling of light into planar waveguides

integrated high-NA objective from above

free-beam confocal imaging of structures

XY motion of the complete fiber probe setup

check probe alignment & vertical probing

Photonic Integrated Circuits (PIC) are hot candidates for becoming the key components of the next generation of optical and quantum communication systems because of the promise of very high information transfer speed, robustness and the compatibility with standard microelectronics devices technology.
Furthermore, the extremely high sensitivity of resonant nanophotonics structures to light-matter interactions makes them candidates for a new classes of sensors with broad range of possible applications in physics, biology and chemistry.

The Photonic Probe Station, which combines two optical fiber probes and a free optical beam Confocal Microscope (CFMI) provides an ideal, ultra stable, extremely compact and easy-to-use table top setup for nano photonic device characterization. The lensed fibers couple light into and out of the the sample planar wave guides. The confocal microscope allows not only for sample surface probing, but also for out-of-plane coupling into photonic structures. The combination with the attoDRY800 cryo-optical table offers a powerful easy-to-use setup for characterization of photonic nanostructures in a temperature range from 4 K up to 320 K.

Cryogenic Tablet


Confocal Unit
pinhole configurationtwo pinholes (fiber apertures), different illumination and collection wavelength possible
pinhole sizedependent on fibers, typically 3 .. 9 µm mode field diameter
compatible LT-objectiveLT-APO/VIS, LT-APO/VISIR, LT-APO/NIR (see accessory section for more information)
inspection unitsample imaging with large field of view: ~ 100 µm
long-term stabilitylateral drift of confocal spot typically <2 nm/h
configurationcompact and modular design, two or more optical channels; standard configuration: one excitation and one detection channel
key benefitsquick and reliable alignment of each channel, steering mirror for combined beams long-term stability
quick-exchange of optical componentsoptional piezoelectric rotator with filter mount
Sample Positioning
total travel rangefiber probes 3 x 3 x 2.5 mm³ (closed loop)
sample 6 mm x 6 mm (closed loop)
step size0.05..3 µm @ 300 K, 10..500 nm @ 4 K
sample holdercarefully thermalized, quick exchange mechanism, including calibrated temperature sensor and heater
Suitable Operating Conditions
temperature range< 3K..300K
operating pressure1E-6 mbar .. 1 bar
Suitable Cooling Systems
compatible cryostatsattoDRY800(flow cryostats on request)
Compatibility with Electronics
laserLDM600 laser/detector module (for detailed specifications please see attoCONTROL section)
General Specifications
type of instrumentcombined side injection into planar waveguide structures and perpendicular confocal optics on top of the sample, perpendicular injection is possible
sensor head specificstwo independent lensed fiber probes with 3 individual degrees of freedom, low temperature compatible apochromatic objective and external confocal optics head
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Customer Feedback

Dr. Ivan Favero

Université Paris Diderot, CNRS, Paris, France

The photonic probe station has essentially solved cryogenic and mechanical stability problems in our experiments, such that we can today concentrate our efforts on other conceptual and technical aspects. Simply a great scientific instrument!