The stabilized laser source enables a certified repeatibility and accuracy in nanometer range. The PTB (Physikalisch Technische Bundesanstalt, Germany) has officially tested and proofed the high accuracy of IDS3010. Furthermore, each IDS3010 is NIST-traceable.
Displacement Measuring Interferometer
IDS3010 - minitaturized displacement measurement
The IDS3010 (Interferometric Displacement Sensor) is the newest and the miniaturized version of attocube’s laser interferometers for measuring displacements (incremental distance) in nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications. With its compact size, the IDS3010 can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.
For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of our interferometer enables sensor heads with less components and thus more stable measurements. A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).
Large Distance Range
The IDS3010 is capable of dynamic displacement measurements from a few millimeters until up to 30 m. The high bandwidth of up to 10 MHz allows also for vibration detection even at high distances.
Compact and Modular Design
The minituarized and fiber-based design of the IDS3010 controler and the sensor heads allow for integration into space-limited systems. Its modularity enables easy replacement and rearrangement.
The sensor heads and fibers work even under extreme environments, like high vacuum, ultra-high vacuum, low temperature, or radiation-harsh environments.
|number of sensor axes||3|
|working distance||0...5000 mm (depending on sensor head)|
|sensor resolution [pm]||1|
|sensor repeatibility||2 nm (at 10 mm working distance in vacuum conditions)|
|max. target velocity [m/s]||2|
|measurement bandwidth||10 MHz|
|signal stability (WD: 77 mm)||0.110 nm (2 s)|
|Modes of Operation|
|remote operation||integrated webserver|
|output signal: displacement measurement||laser light (IR)|
|output signal: alignment laser||laser light (VIS)|
|sensor alignment||via integrated webserver|
|sensor initialization||via integrated webserver|
|factory resetable||via GPIO connector|
|sensor heads||depending specifiactions|
|analog interfaces||sin/cos (real time), linear analog (real time, optional)|
|digital interfaces||AquadB, HSSL (real time)|
|interface bandwidth sin/cos [MHz]||up to 25|
|interface bandwidth field bus systems||depending on field bus system|
|resolution sin/cos (inc.)||freely assignable; 1 pm - 2^24 pm|
|resolution AquadB (inc.)||freely assignable|
|resolution HSSL (abs.) [bit]||8 - 48|
|resolution field bus systems||depending on implemented protocol|
|chassis||55 x 52 x 195 mm³|
|power supply||12 VDC|
|power consumption [W]||8|
|laser source (measurement laser)||DFBlaser (class1)|
|laser output power (measurement laser) [µW]||max. 400|
|laser wavelength (measurement laser) [nm]||1530|
|laser source (alignment laser)||fiber-coupled laser diode|
|laser output power (alignment laser) [mW]||< 0,5|
|laser wavelength (alignment laser) [nm]||650|
|Accessories||IDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs|
|web browser||no software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs|
Fields of Applications
Wafer and Mask Inspection
Components used in quality control and inspection of wafers or optical components.
Motion Analysis and Accuracy Determination.
Closed Loop Motion Control
Interferometric displacement sensing for closed loop motion control in integrated systems.
Laboratory tests and research applications, such as material deformation, vibration analysis or others.
Position control of devices under challenging conditions such as vacuum, extreme temperatures and harsh radiation.
Vibration detection for increasing manufacturing accuracy.
Positioning with highest accuracy in integrated setups using interferometric sensors and nanopositioners.
Calibration and accuracy evaluation for machine tools, measurement instruments, and drive systems.
High resolution FMCW Radar System
Interferometric Deformation Detection of Satellite Flight Instruments
Measuring the Deformation of a Magnetically Levitated Plate
Ultra Precise Motion Tracking in Multilayer Zone Plate Imaging
IDS3010 Detecting Vibrations with Picometer Resolution
Fast Calibration of Machine Tools based on the IDS3010
Detection of Object Displacement and Geometrical Errors of a Dimensional Cone-beam Computed Tomography System
Displacement Sensing in Additive Manufacturing with attocube's Interferometer
Characterizing a scanning fluorescence X-ray microscope
Measuring a speakers‘ frequency response using the interferometric sensor
Fiber based laser interferometry stimulating the development of highly precise micro manufacturing
Profilometry on Micron-sized Objects
Measuring Brownian Motion of Comercial Micro-Cantilevers
Contactless Frequency Analysis of Motor Vibrations
Ultra-precise contactless detection of bearing errors
Measuring Water Surface Displacements
Optical Interferometer in Quality Control of a Nanopositioner
Rotation motion error compensation using interferometry
Detecting vibration propagation and parasitic motions with picometer resolution
Laser Interferometry in Radiation Harsh Environments
Vibration of high-power precision laser mirror
Synchronous Data Acquisition for Detecting Vibration Propagation
Rotation motion error compensation for stable probe positioning
In situ Measurements of Irradiation-Induced Creep on Amorphous Micropillars
The SpaceDrive Project - The IDS3010 to gauge a thrust balance in the sub-µN range
Ultra-wide frequency range vibrometry
OEM Interferometers for motion tracking in coordinate measurement machines
Ultra Precise In-Line Travel Property Control
Machine Integrated Sensors for Motion Capturing
Long distance and high-speed displacement measurements
In situ Position Capturing in Coordinate Measurement Machines
Brochure IDS3010 >
IDS3010 product brochure with an overview of all features, accessories, services and various application examples.
PTB Calibration Certificate >
attocube’s IDS has been tested and certified by the National Metrology Institute of Germany (PTB).
IDS tutorials and movies >
Watch various IDS3010 tutorials and information videos on the working principle, components and applications of the interferometer