one dimensional displacement measuring interferometer with nanometer accuracy
certified accuracy
accuracy in nanometer range
large distance range
from a few mm up to 30 m
compact and modular design
3-Axis measurement, sensor heads down to Ø 1.2 mm
vacuum and clean room compatible
UHV .. 10 bar, a few mK .. 423 K
The IDS3010 (Interferometric Displacement Sensor) measures displacements (incremental distance) in the nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications.
With its compact size, the IDS3010 displacement measuring interferometer can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.
For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of the displacement measuring interferometer enables sensor heads with less components and thus more stable measurements.
A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).
Certified Accuracy
The stabilized laser source enables a certified repeatability and accuracy in the nanometer range. The PTB (Physikalisch Technische Bundesanstalt, Germany) has officially tested and proofed the high accuracy of IDS3010. Furthermore, each IDS3010 is NIST-traceable (Metrology Tech Note).
Large Distance Range
The IDS3010 is capable of dynamic displacement measurements from a few millimeters until up to 30 m. The high bandwidth of up to 10 MHz allows also for vibration detection even at high distances.
Compact and Modular Design
The minituarized and fiber-based design of the IDS3010 controler and the sensor heads allow for integration into space-limited systems. Its modularity enables easy replacement and rearrangement.
Extreme Environment Compatiblitiy
The sensor heads and optical fibers work even under extreme environments, like ultra-high vacuum, low temperature, or radiation-harsh environments. Due to the Fabry-Pérot interferometer principle, the sensor heads provide highest accuracy and reliability even during temperature changes.
| Sensor | |
|---|---|
| number of sensor axes | 3 |
| working distance | 0...5000 mm (depending on sensor head) |
| sensor resolution [pm] | 1 |
| max. target velocity [m/s] | 2 |
| measurement bandwidth | 10 MHz |
| signal stability (WD: 77 mm) | 0.110 nm (2 s) |
| Modes of Operation | |
| measurement mode | displacement |
| remote operation | integrated webserver |
| output signal: displacement measurement | laser light (IR) |
| output signal: alignment laser | laser light (VIS) |
| sensor alignment | via integrated webserver |
| sensor initialization | via integrated webserver |
| factory resetable | via GPIO connector |
| Working Conditions | |
| controller | ambient conditions |
| sensor heads | depending specifiactions |
| ECU | ambient conditions |
| Interfaces | |
| analog interfaces | sin/cos (real time), linear analog (real time, optional) |
| digital interfaces | AquadB, HSSL (real time) |
| real-time interface bandwidth [MHz] | up to 25 |
| interface bandwidth field bus systems | depending on field bus system |
| resolution sin/cos (inc.) | freely assignable; 1 pm - 2^24 pm |
| resolution AquadB (inc.) | freely assignable |
| resolution HSSL (abs.) [bit] | 8 - 48 |
| resolution field bus systems | depending on implemented protocol |
| Controller Hardware | |
| chassis | 55 x 52 x 195 mm³ |
| weight | 730 g |
| power supply | 12 VDC |
| power consumption [W] | 8 |
| laser source (measurement laser) | DFBlaser (class1) |
| laser output power (measurement laser) [µW] | max. 400 |
| laser wavelength (measurement laser) [nm] | 1530 |
| laser source (alignment laser) | fiber-coupled laser diode |
| laser output power (alignment laser) [mW] | < 0,5 |
| laser wavelength (alignment laser) [nm] | 650 |
| Accessories | |
| Accessories | IDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs |
| Software Drivers | |
| web browser | no software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs |
choose your sensor head
The modular design makes cutting-edge measurement performance of interferometry accessible for various applications, even in extreme environments, and allows flexible integration into space confined machines and setups. Multiple standard sensor heads and further customizations offer versatile solutions for interferometric measurement tasks.
Accuracy Evaluation
Motion Analysis and Accuracy Determination.
Wafer and Mask Inspection
Components used in quality control and inspection of wafers or optical components.
Vibrometry
Vibration detection for increasing manufacturing accuracy.
Infrastructure
Position control of devices under challenging conditions such as vacuum, extreme temperatures and harsh radiation.
Laboratory Test
Laboratory tests and research applications, such as material deformation, vibration analysis or others.
Calibration
Calibration and accuracy evaluation for machine tools, measurement instruments, and drive systems.
Beamlines
Positioning with highest accuracy in integrated setups using interferometric sensors and nanopositioners.
Closed Loop Motion Control
Interferometric displacement sensing for closed loop motion control in integrated systems.
More Information
PTB Calibration Certificate >
attocube’s IDS has been tested and certified by the National Metrology Institute of Germany (PTB).
OEM Components & Solutions >
Custom engineering, manufacturing & integration of high precsion motion and sensing components for semiconductor equipment, machine tooling, and photonics.
IDS tutorials and movies >
Watch various IDS3010 tutorials and information videos on the working principle, components and applications of the displacement measuring interferometer.
Customer Feedback
Prof. Dr. M. Tajmar
Institute for Aerospace Engineering, Dresden University of Technology, Germany
The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab – thanks to the great support from attocube.
Dipl.-Ing. Nanxi Kong
Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany
The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions.
Nicolas Stübe, Dr. Alke Meents
DESY/suna-precision GmbH, Hamburg, Germany
Thanks to the fast adjustment and precise sub-nanometer resolution of the sensor, we`re able to easily identify the trajectories and eigen frequencies for the optimization of flexure-based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications. With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of 2015, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm within by beginning of next year.
Dr. Stefan Kubsky
Synchrotron Soleil St. Aubin, France
An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensorheads. We rapidly managed to file a patent application implying interferometric metrology.
Dr. T. Zickler
CERN / Magnetic Measurement Section, Geneva, Switzerland
Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.
Dr. Jonathan Kelly
Diamond Light Source Ltd., Didcot, UK
The WAVE software has proved very useful in characterising and commissioning the interferometers on our P99, Ptychography test set-up. It enabled easy measurement and identification of the mechanical resonances of the system. It is also ideal for sampling positions at a wide range of rates for use in other applications.
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Glossary
