one dimensional displacement measuring interferometer with nanometer accuracy
certified accuracy
accuracy in nanometer range
large distance range
from a few mm up to 30 m
compact and modular design
3-Axis measurement, sensor heads down to Ø 1.2 mm
vacuum and clean room compatible
UHV .. 10 bar, a few mK .. 423 K
The IDS3010 (Interferometric Displacement Sensor) measures displacements (incremental distance) in the nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications.
With its compact size, the IDS3010 displacement measuring interferometer can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.
For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of the displacement measuring interferometer enables sensor heads with less components and thus more stable measurements.
A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).
Certified Accuracy
Large Distance Range
Compact and Modular Design
Extreme Environment Compatiblitiy
| Sensor | |
|---|---|
| number of sensor axes | 3 |
| working distance | 0...5000 mm (depending on sensor head) |
| sensor resolution [pm] | 1 |
| sensor repeatibility | 2 nm (at 10 mm working distance in vacuum conditions) |
| max. target velocity [m/s] | 2 |
| measurement bandwidth | 10 MHz |
| signal stability (WD: 77 mm) | 0.110 nm (2 s) |
| Modes of Operation | |
| measurement mode | displacement |
| remote operation | integrated webserver |
| output signal: displacement measurement | laser light (IR) |
| output signal: alignment laser | laser light (VIS) |
| sensor alignment | via integrated webserver |
| sensor initialization | via integrated webserver |
| factory resetable | via GPIO connector |
| Working Conditions | |
| controller | ambient conditions |
| sensor heads | depending specifiactions |
| ECU | ambient conditions |
| Interfaces | |
| analog interfaces | sin/cos (real time), linear analog (real time, optional) |
| digital interfaces | AquadB, HSSL (real time) |
| interface bandwidth sin/cos [MHz] | up to 25 |
| interface bandwidth field bus systems | depending on field bus system |
| resolution sin/cos (inc.) | freely assignable; 1 pm - 2^24 pm |
| resolution AquadB (inc.) | freely assignable |
| resolution HSSL (abs.) [bit] | 8 - 48 |
| resolution field bus systems | depending on implemented protocol |
| Controller Hardware | |
| chassis | 55 x 52 x 195 mm³ |
| weight | 730 g |
| power supply | 12 VDC |
| power consumption [W] | 8 |
| laser source (measurement laser) | DFBlaser (class1) |
| laser output power (measurement laser) [µW] | max. 400 |
| laser wavelength (measurement laser) [nm] | 1530 |
| laser source (alignment laser) | fiber-coupled laser diode |
| laser output power (alignment laser) [mW] | < 0,5 |
| laser wavelength (alignment laser) [nm] | 650 |
| Accessories | |
| Accessories | IDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs |
| Software Drivers | |
| web browser | no software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs |
choose your sensor head
The modular design makes cutting-edge measurement performance of interferometry accessible for various applications, even in extreme environments, and allows flexible integration into space confined machines and setups. Multiple standard sensor heads and further customizations offer versatile solutions for interferometric measurement tasks.
Calibration
Calibration and accuracy evaluation for machine tools, measurement instruments, and drive systems.
Laboratory Test
Laboratory tests and research applications, such as material deformation, vibration analysis or others.
Wafer and Mask Inspection
Components used in quality control and inspection of wafers or optical components.
Beamlines
Positioning with highest accuracy in integrated setups using interferometric sensors and nanopositioners.
Accuracy Evaluation
Motion Analysis and Accuracy Determination.
Infrastructure
Position control of devices under challenging conditions such as vacuum, extreme temperatures and harsh radiation.
Closed Loop Motion Control
Interferometric displacement sensing for closed loop motion control in integrated systems.
Vibrometry
Vibration detection for increasing manufacturing accuracy.
Motion Tracking for Load Tests of Gear Boxes and Drive Trains
High resolution FMCW Radar System
Interferometric Deformation Detection of Satellite Flight Instruments
Measuring the Deformation of a Magnetically Levitated Plate
Ultra Precise Motion Tracking in Multilayer Zone Plate Imaging
IDS3010 Detecting Vibrations with Picometer Resolution
Fast Calibration of Machine Tools based on the IDS3010
Displacement Sensing in Additive Manufacturing with attocube's Interferometer
Characterizing a scanning fluorescence X-ray microscope
Measuring a speakers‘ frequency response using the interferometric sensor
Fiber based laser interferometry stimulating the development of highly precise micro manufacturing
Profilometry on Micron-sized Objects
Measuring Brownian Motion of Comercial Micro-Cantilevers
Contactless Frequency Analysis of Motor Vibrations
Ultra-precise contactless detection of bearing errors
Measuring Water Surface Displacements
Optical Interferometer in Quality Control of a Nanopositioner
Rotation motion error compensation using interferometry
Detecting vibration propagation and parasitic motions with picometer resolution
Laser Interferometry in Radiation Harsh Environments
Vibration of high-power precision laser mirror
Synchronous Data Acquisition for Detecting Vibration Propagation
Rotation motion error compensation for stable probe positioning
In situ Measurements of Irradiation-Induced Creep on Amorphous Micropillars
The SpaceDrive Project - The IDS3010 to gauge a thrust balance in the sub-µN range
Ultra-wide frequency range vibrometry
OEM Interferometers for motion tracking in coordinate measurement machines
Ultra Precise In-Line Travel Property Control
Machine Integrated Sensors for Motion Capturing
Long distance and high-speed displacement measurements
In situ Position Capturing in Coordinate Measurement Machines
Environmental Compensation
More Information
PTB Calibration Certificate >
attocube’s IDS has been tested and certified by the National Metrology Institute of Germany (PTB).
OEM Components & Solutions >
Custom engineering, manufacturing & integration of high precsion motion and sensing components for semiconductor equipment, machine tooling, and photonics.
IDS tutorials and movies >
Watch various IDS3010 tutorials and information videos on the working principle, components and applications of the displacement measuring interferometer.
Glossary
