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Displacement Measuring Interferometer

IDS3010 - minitaturized displacement measurement

The IDS3010 (Interferometric Displacement Sensor) is the newest and the miniaturized version of attocube’s laser interferometers for measuring displacements (incremental distance) in nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications. With its compact size, the IDS3010 can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.

For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of our interferometer enables sensor heads with less components and thus more stable measurements. A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).

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Certified Accuracy

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Large Distance Range

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Compact and Modular Design

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Vacuum Compatible

Specifications

Sensor
number of sensor axes3
working distance0...5000 mm (depending on sensor head)
sensor resolution [pm]1
sensor repeatibility2 nm (at 10 mm working distance in vacuum conditions)
max. target velocity [m/s]2
measurement bandwidth10 MHz
signal stability (WD: 77 mm)0.110 nm (2 s)
Modes of Operation
measurement modedisplacement
remote operationintegrated webserver
output signal: displacement measurementlaser light (IR)
output signal: alignment laserlaser light (VIS)
sensor alignmentvia integrated webserver
sensor initializationvia integrated webserver
factory resetablevia GPIO connector
Working Conditions
controllerambient conditions
sensor headsdepending specifiactions
ECUambient conditions
Interfaces
analog interfacessin/cos (real time), linear analog (real time, optional)
digital interfacesAquadB, HSSL (real time)
interface bandwidth sin/cos [MHz]up to 25
interface bandwidth field bus systemsdepending on field bus system
resolution sin/cos (inc.)freely assignable; 1 pm - 2^24 pm
resolution AquadB (inc.)freely assignable
resolution HSSL (abs.) [bit]8 - 48
resolution field bus systemsdepending on implemented protocol
Controller Hardware
chassis55 x 52 x 195 mm³
weight730 g
power supply12 VDC
power consumption [W]8
laser source (measurement laser)DFBlaser (class1)
laser output power (measurement laser) [µW]max. 400
laser wavelength (measurement laser) [nm]1530
laser source (alignment laser)fiber-coupled laser diode
laser output power (alignment laser) [mW]< 0,5
laser wavelength (alignment laser) [nm]650
Accessories
AccessoriesIDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs
Software Drivers
web browserno software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs
Download PDF
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Application Snippets

High resolution FMCW Radar System interferomentric displacement sensor

High resolution FMCW Radar System

Interferometric Deformation Detection of Satellite Flight Instruments interferometric displacement sensor IDS3010

Interferometric Deformation Detection of Satellite Flight Instruments

Measuring the Deformation of a Magnetically Levitated Plate displacement sensor

Measuring the Deformation of a Magnetically Levitated Plate

Ultra Precise Motion Tracking in Multilayer Zone Plate Imaging laser interferometer IDS3010

Ultra Precise Motion Tracking in Multilayer Zone Plate Imaging

IDS3010 Detecting Vibrations with Picometer Resolution laser interferometer IDS3010

IDS3010 Detecting Vibrations with Picometer Resolution

Fast Calibration of Machine Tools based on the IDS3010 displacement sensing

Fast Calibration of Machine Tools based on the IDS3010

Detection of Object Displacement and Geometrical Errors of a Dimensional Cone beam Computed Tomography System IDS3010  displacement sensor

Detection of Object Displacement and Geometrical Errors of a Dimensional Cone-beam Computed Tomography System

Displacement Sensing in Additive Manufacturing with attocube's Interferometer IDS + OEM

Displacement Sensing in Additive Manufacturing with attocube's Interferometer

Characterizing a scanning fluorescence X ray microscope  made with the displacement sensor

Characterizing a scanning fluorescence X-ray microscope

Measuring a speakers‘ frequency response using the interferometric sensor made with the displacement sensor

Measuring a speakers‘ frequency response using the interferometric sensor

Fiber based laser interferometry stimulating the development of highly precise micro manufacturing made with the displacement sensor

Fiber based laser interferometry stimulating the development of highly precise micro manufacturing

Profilometry on Micron sized Objects made with the displacement sensor

Profilometry on Micron-sized Objects

Measuring Brownian Motion of Comercial Micro Cantilevers made with the displacement sensor

Measuring Brownian Motion of Comercial Micro-Cantilevers

Contactless Frequency Analysis of Motor Vibrations made with the displacement sensor

Contactless Frequency Analysis of Motor Vibrations

Ultra precise contactless detection of bearing errors made with the displacement sensor

Ultra-precise contactless detection of bearing errors

Measuring Water Surface Displacements made with the displacement sensor

Measuring Water Surface Displacements

Optical Interferometer in Quality Control of a Nanopositioner made with the displacement sensor

Optical Interferometer in Quality Control of a Nanopositioner

Rotation motion error compensation using interferometry made with the displacement sensor

Rotation motion error compensation using interferometry

Detecting vibration propagation and parasitic motions with picometer resolution IDS3010  displacement sensor

Detecting vibration propagation and parasitic motions with picometer resolution

Laser Interferometry in Radiation Harsh Environments made with the displacement sensor

Laser Interferometry in Radiation Harsh Environments

Vibration of high power precision laser mirror IDS3010  displacement sensor

Vibration of high-power precision laser mirror

Synchronous Data Acquisition for Detecting Vibration Propagation made with the displacement sensor

Synchronous Data Acquisition for Detecting Vibration Propagation

Rotation motion error compensation for stable probe positioning POS SEN Solution (x ray mic …)

Rotation motion error compensation for stable probe positioning

In situ Measurements of Irradiation Induced Creep on Amorphous Micropillars made with Ambient or Vacuum Nanopositioner and IDS3010

In situ Measurements of Irradiation-Induced Creep on Amorphous Micropillars

The SpaceDrive Project   The IDS3010 to gauge a thrust balance in the sub µN range IDS3010  displacement sensor

The SpaceDrive Project - The IDS3010 to gauge a thrust balance in the sub-µN range

Ultra wide frequency range vibrometry IDS3010  displacement sensor

Ultra-wide frequency range vibrometry

OEM Interferometers for motion tracking in coordinate measurement machines IDS3010  displacement sensor

OEM Interferometers for motion tracking in coordinate measurement machines

Ultra Precise In Line Travel Property Control IDS3010  displacement sensor

Ultra Precise In-Line Travel Property Control

Machine Integrated Sensors for Motion Capturing displacement sensing

Machine Integrated Sensors for Motion Capturing

Long distance and high speed displacement measurements made with the displacement sensor

Long distance and high-speed displacement measurements

In situ Position Capturing in Coordinate Measurement Machines made with the displacement sensor

In situ Position Capturing in Coordinate Measurement Machines

Environmental Compensation IDS3010  displacement sensor

Environmental Compensation

More Information

ressources, brochures, ids

Brochure IDS3010 >

IDS3010 product brochure with an overview of all features, accessories, services and various application examples. 

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PTB Calibration Certificate >

attocube’s IDS has been tested and certified by the National Metrology Institute of Germany (PTB).

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IDS tutorials and movies >

Watch various IDS3010 tutorials and information videos on the working principle, components and applications of the interferometer

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Customization of Motion & Sensing Components >

The compact and modular laser interferometer is easy to integrate into challenging OEM applications in ambient conditions or extreme environments.