Displacement Measuring Interferometer

IDS3010 - minitaturized displacement measurement

The IDS3010 (Interferometric Displacement Sensor) is the newest and the miniaturized version of attocube’s laser interferometers for measuring displacements (incremental distance) in nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications. With its compact size, the IDS3010 can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.

For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of our interferometer enables sensor heads with less components and thus more stable measurements. A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).

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Certified Accuracy

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Large Distance Range

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Compact and Modular Design

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Vacuum Compatible


number of sensor axes3
3 mm
working distance0...5000 mm (depending on sensor head)
sensor resolution [pm]1
1 m°
sensor repeatibility2 nm (at 10 mm working distance in vacuum conditions)
max. target velocity [m/s]2
2 mm/s
measurement bandwidth10 MHz
signal stability (WD: 77 mm)0.110 nm (2 s)
Modes of Operation
measurement modedisplacement
remote operationintegrated webserver
output signal: displacement measurementlaser light (IR)
output signal: alignment laserlaser light (VIS)
sensor alignmentvia integrated webserver
sensor initializationvia integrated webserver
factory resetablevia GPIO connector
Working Conditions
controllerambient conditions
sensor headsdepending specifiactions
ECUambient conditions
analog interfacessin/cos (real time), linear analog (real time, optional)
digital interfacesAquadB, HSSL (real time)
interface bandwidth sin/cos [MHz]up to 25
interface bandwidth AquadB [MHz]
interface bandwidth HSSL [MHz]
interface bandwidth field bus systemsdepending on field bus system
resolution sin/cos (inc.)freely assignable; 1 pm - 2^24 pm
resolution AquadB (inc.)freely assignable
resolution HSSL (abs.) [bit]8 - 48
resolution field bus systemsdepending on implemented protocol
Controller Hardware
chassis55 x 52 x 195 mm³
weight730 g
power supply12 VDC
power consumption [W]8
8 mm
laser source (measurement laser)DFBlaser (class1)
laser output power (measurement laser) [µW]max. 400
laser wavelength (measurement laser) [nm]1530
wavelength stability (measurement laser) [ppb]
laser source (alignment laser)fiber-coupled laser diode
laser output power (alignment laser) [mW]< 1
laser wavelength (alignment laser) [nm]650
AccessoriesIDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs
Software Drivers
web browserno software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs
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