Displacement Measuring Interferometer
IDS3010 - minitaturized displacement measurement
certified accuracy
10 ppb vacuum wavelength accuracy, 10 ppb wavelength stability
10 years lifetime and low maintenance
unique combination of DFB laser and highly accurate reference gas cell
compact and modular design
3-Axis measurement, sensor heads down to Ø 1.2 mm
vacuum and clean room compatible
10-10 mbar .. 10 bar, a few mK .. 423 K
The IDS3010 (Interferometric Displacement Sensor) measures displacements (incremental distance) in the nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications.
With its compact size, the IDS3010 displacement measuring interferometer can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.
For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology (learn more about the underlying technology, including various interferometer concepts here), of the displacement measuring interferometer enables sensor heads with less components and thus more stable measurements.
A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).
Performance Measurements
Highest Precision. Various Environments. Maximum Reliability.
Noise
sub-nm noise level at various bandwidths and distances
Noise
The IDS3010 exhibits sub-nm intrinsic noise as demonstrated by amplitude spectral density (ASD) measurements across a wide frequency range and at multiple working distances. The results reflect stable and realistic performance under typical laboratory conditions, with a moderate noise increase at longer working distances. One key enabler for this high level of precision is the outstanding and certified wavelength stability of 10 ppb (k=1).
Tech Note 'MAS 16 - IDS Noise Analysis'
CLOSE
Wavelength Accuracy
traceable 10 ppb wavelength accuracy
Wavelength Accuracy
The displacement accuracy of the IDS3010 is fundamentally determined by the accuracy of the laser wavelength. The utilized acetylene reference gas cell enables an exceptional accuracy of 10 ppb (k=1). Long-term calibration results from the German National Metrology Institute (PTB) confirm excellent stability over many years, supporting a guaranteed accuracy specification over the full lifetime of 10 years.
Tech Note 'MAS 21 - IDS Interferometric System Measurement Uncertainty (p. 1-2)'
CLOSE
Environmental Compensation Accuracy
traceable 200 ppb environmental compensation accuracy
Environmental Compensation Accuracy
Interferometric measurements are sensitive to changes in the refractive index of air. The Environmental Compensation Unit (ECU) continuously measures temperature, pressure, and humidity to correct for these influences. The ECU enables an environmental compensation accuracy of 200 ppb (k=1) with standard factory calibration and 100 ppb (k=1) with optional calibration by a DAkkS-accredited laboratory. A certification at the German National Metrology Institute (PTB) confirms low average systematic errors across the entire interferometer system (see chart).
Tech Note 'MAS 21 - IDS Interferometric System Measurement Uncertainty (p. 3-4)'
CLOSE
Lifetime
10 years life-time and no maintenance
Lifetime
DFB-based interferometers, as used in the IDS3010, offer significantly higher lifetime compared to traditional HeNe systems, making them ideally suited for continuous 24/7 operation. While HeNe tubes typically require replacement after a few years, the IDS3010 is designed for stable performance per a 10 year lifetime, reducing cost of ownership in OEM applications. This long lifetime minimizes maintenance and calibration requirements, ensuring maximum system uptime and operational reliability.
CLOSE
Linearity
down to 1 nm cyclic errors (non-linearity)
Linearity
Periodic nonlinearities are inherent to interferometric measurements and limit nanometer-scale accuracy unless actively compensated. The IDS3010 reduces these effects through automatic system compensation and optimized signal generation, minimizing errors already at the source. As a result, typical nonlinearities are reduced to 2 - 5 nm, depending on the sensor head. With additional LUT-based compensation, nonlinearities can be further reduced to approximately 1 nm.
Tech Note 'MAS 20 - Dynamic Compensation of Periodic Nonlinearities'
CLOSE
Specifications
For a detailed definition of used terms and descriptions please visit our Displacement Sensor Glossary
| Sensor | |
|---|---|
| type | fiber-based laser interferometric measurement system |
| sensor head environment compatibility | ambient, ultra-high vacuum (UHV), cryogenic |
| number of sensor axes | 3 |
| working distance | 0 – 5 m (30 m with optional long-range feature) |
| target reflectivity | 4 - 100 % |
| max. target velocity | 2 m/s |
| max. measurement bandwidth | 10 MHz |
| sensor resolution | 1 pm |
| noise | see table page 2 ¹ |
| wavelength accuracy (10 years) | 10 ppb = 10 nm/m (k = 1) ² |
| environmental compensation accuracy | 200 ppb (k = 1) ² |
| periodic non-linearities (p-p) | guaranteed 5 nm ³, typical 3 nm ³ |
| laser frequency stability (60 hours) | 10 ppb = 10 nm/m (k = 1) ² |
| laser class | 1 |
| expected lifetime | 10 years ² |
| MTBF (electronics) | 51 years ² |
| warm-up time | not required |
| absolute position referencing | µm-scale (highly depending on setup stability) |
| Interfaces | |
| analog interfaces | sin/cos, linear analog (optional) |
| digital interfaces | AquadB, HSSL, BiSS-C (optional) |
| real-time interface bandwidth | up to 25 MHz |
| resolution sin/cos (inc.) | freely assignable; 1 pm - 2^24 pm |
| resolution AquadB (inc.) | freely assignable |
| resolution HSSL (abs.) | 8 - 48 bit |
| Software and Communication Interfaces | |
| web browser | no software drivers necessary as all functionality is accessible via Ethernet |
| APIs | C, C#, LabVIEW, Python, MATLAB, JSON-RPC |
| WAVE-Software (optional) | data streaming and measurement visualization (up to 1 MHz) |
| Controller Hardware | |
| chassis | 55 x 52 x 195 mm³ |
| weight | 730 g |
| power supply | 12 VDC |
| power consumption | 8 W |
| laser source (measurement laser) | DFB laser |
| laser output power (measurement laser) | max. 400 µW |
| laser wavelength (measurement laser) | 1 530 371 078 fm |
| laser source (alignment laser) | laser diode |
| laser output power (alignment laser) | < 0,5 mW |
| laser wavelength (alignment laser) | 650 nm |
| wavelength reference | acetylene gas absorbtion cell |
| controller operating environment | ambient conditions |
choose your sensor head
The modular design makes cutting-edge measurement performance of interferometry accessible for various applications, even in extreme environments, and allows flexible integration into space confined machines and setups. Multiple standard sensor heads and further customizations offer versatile solutions for interferometric measurement tasks.
Key Applications
High Speed Motion Control. Multi-Axis Measurements. Nanometer Precision.
More Information
Loan Service for IDS >
For checking the applicability and performance of the laser interferometer, attocube offers a loan service for testing it.
Measurement Explained >
Learn how to install and use the interferometer.
A Guide to Laser Interferometry >
Visit our technology page to gain a deeper understanding of the patented IDS3010 Fabry-Pérot technology.
OEM Components & Solutions >
Custom engineering, manufacturing & integration of high precsion motion and sensing components for semiconductor equipment, machine tooling, and photonics.
IDS Tutorials & Movies >
Watch tutorials and information videos on the working principle, components and applications.
Customer Feedback
Prof. Dr. M. Tajmar
Institute for Aerospace Engineering, Dresden University of Technology, Germany
The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab – thanks to the great support from attocube.
Dipl.-Ing. Nanxi Kong
Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany
The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions.
Nicolas Stübe, Dr. Alke Meents
DESY/suna-precision GmbH, Hamburg, Germany
Thanks to the fast adjustment and precise sub-nanometer resolution of the sensor, we`re able to easily identify the trajectories and eigen frequencies for the optimization of flexure-based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications. With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of 2015, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm within by beginning of next year.
Dr. Stefan Kubsky
Synchrotron Soleil St. Aubin, France
An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensorheads. We rapidly managed to file a patent application implying interferometric metrology.
Dr. T. Zickler
CERN / Magnetic Measurement Section, Geneva, Switzerland
Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.
Dr. Jonathan Kelly
Diamond Light Source Ltd., Didcot, UK
The WAVE software has proved very useful in characterising and commissioning the interferometers on our P99, Ptychography test set-up. It enabled easy measurement and identification of the mechanical resonances of the system. It is also ideal for sampling positions at a wide range of rates for use in other applications.
