The stabilized laser source enables a certified repeatibility and accuracy in nanometer range. The PTB (Physikalisch Technische Bundesanstalt, Germany) has officially tested and proofed the high accuracy of IDS3010. Furthermore, each IDS3010 is NIST-traceable.
Displacement Measuring Interferometer
IDS3010 - minitaturized displacement measurement
The IDS3010 (Interferometric Displacement Sensor) is the newest and the miniaturized version of attocube’s laser interferometers for measuring displacements (incremental distance) in nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications. With its compact size, the IDS3010 can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.
For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of our interferometer enables sensor heads with less components and thus more stable measurements. A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).
Certified Accuracy
Large Distance Range
Compact and Modular Design
Vacuum Compatible
Specifications
| Sensor | |
|---|---|
| number of sensor axes | 3 |
| working distance | 0...5000 mm (depending on sensor head) |
| sensor resolution [pm] | 1 |
| sensor repeatibility | 2 nm (at 10 mm working distance in vacuum conditions) |
| max. target velocity [m/s] | 2 |
| measurement bandwidth | 10 MHz |
| signal stability (WD: 77 mm) | 0.110 nm (2 s) |
| Modes of Operation | |
| measurement mode | displacement |
| remote operation | integrated webserver |
| output signal: displacement measurement | laser light (IR) |
| output signal: alignment laser | laser light (VIS) |
| sensor alignment | via integrated webserver |
| sensor initialization | via integrated webserver |
| factory resetable | via GPIO connector |
| Working Conditions | |
| controller | ambient conditions |
| sensor heads | depending specifiactions |
| ECU | ambient conditions |
| Interfaces | |
| analog interfaces | sin/cos (real time), linear analog (real time, optional) |
| digital interfaces | AquadB, HSSL (real time) |
| interface bandwidth sin/cos [MHz] | up to 25 |
| interface bandwidth field bus systems | depending on field bus system |
| resolution sin/cos (inc.) | freely assignable; 1 pm - 2^24 pm |
| resolution AquadB (inc.) | freely assignable |
| resolution HSSL (abs.) [bit] | 8 - 48 |
| resolution field bus systems | depending on implemented protocol |
| Controller Hardware | |
| chassis | 55 x 52 x 195 mm³ |
| weight | 730 g |
| power supply | 12 VDC |
| power consumption [W] | 8 |
| laser source (measurement laser) | DFBlaser (class1) |
| laser output power (measurement laser) [µW] | max. 400 |
| laser wavelength (measurement laser) [nm] | 1530 |
| laser source (alignment laser) | fiber-coupled laser diode |
| laser output power (alignment laser) [mW] | < 1 |
| laser wavelength (alignment laser) [nm] | 650 |
| Accessories | |
| Accessories | IDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs |
| Software Drivers | |
| web browser | no software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs |
