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Displacement Measuring Interferometer

IDS3010 - minitaturized displacement measurement

certified accuracy

accuracy in nanometer range

large distance range

from a few mm up to 30 m

compact and modular design

3-Axis measurement, sensor heads down to Ø 1.2 mm 

vacuum and clean room compatible

UHV .. 10 bar, a few mK .. 423 K

The IDS3010 (Interferometric Displacement Sensor) measures displacements (incremental distance) in the nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications.

With its compact size, the IDS3010 displacement measuring interferometer can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.

For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of the displacement measuring interferometer enables sensor heads with less components and thus more stable measurements.

A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).

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Certified Accuracy

The stabilized laser source enables a certified repeatability and accuracy in the nanometer range. The PTB (Physikalisch Technische Bundesanstalt, Germany) has officially tested and proofed the high accuracy of IDS3010. Furthermore, each IDS3010 is NIST-traceable (Metrology Tech Note).

 

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Large Distance Range

The IDS3010 is capable of dynamic displacement measurements from a few millimeters until up to 30 m. The high bandwidth of up to 10 MHz allows also for vibration detection even at high distances.

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Compact and Modular Design

The minituarized and fiber-based design of the IDS3010 controler and the sensor heads allow for integration into space-limited systems. Its modularity enables easy replacement and rearrangement.

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Extreme Environment Compatiblitiy

The sensor heads and optical fibers work even under extreme environments, like ultra-high vacuum, low temperature, or radiation-harsh environments. Due to the Fabry-Pérot interferometer principle, the sensor heads provide highest accuracy and reliability even during temperature changes.

Specifications

Sensor
number of sensor axes3
working distance0...5000 mm (depending on sensor head)
sensor resolution [pm]1
sensor repeatibility2 nm (at 10 mm working distance in vacuum conditions)
max. target velocity [m/s]2
measurement bandwidth10 MHz
signal stability (WD: 77 mm)0.110 nm (2 s)
Modes of Operation
measurement modedisplacement
remote operationintegrated webserver
output signal: displacement measurementlaser light (IR)
output signal: alignment laserlaser light (VIS)
sensor alignmentvia integrated webserver
sensor initializationvia integrated webserver
factory resetablevia GPIO connector
Working Conditions
controllerambient conditions
sensor headsdepending specifiactions
ECUambient conditions
Interfaces
analog interfacessin/cos (real time), linear analog (real time, optional)
digital interfacesAquadB, HSSL (real time)
interface bandwidth sin/cos [MHz]up to 25
interface bandwidth field bus systemsdepending on field bus system
resolution sin/cos (inc.)freely assignable; 1 pm - 2^24 pm
resolution AquadB (inc.)freely assignable
resolution HSSL (abs.) [bit]8 - 48
resolution field bus systemsdepending on implemented protocol
Controller Hardware
chassis55 x 52 x 195 mm³
weight730 g
power supply12 VDC
power consumption [W]8
laser source (measurement laser)DFBlaser (class1)
laser output power (measurement laser) [µW]max. 400
laser wavelength (measurement laser) [nm]1530
laser source (alignment laser)fiber-coupled laser diode
laser output power (alignment laser) [mW]< 0,5
laser wavelength (alignment laser) [nm]650
Accessories
AccessoriesIDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs
Software Drivers
web browserno software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs
show more icon Download PDF

Application Snippets

More Information

PTB Calibration Certificate >

attocube’s IDS has been tested and certified by the National Metrology Institute of Germany (PTB).

OEM Components & Solutions >

Custom engineering, manufacturing & integration of high precsion motion and sensing components for semiconductor equipment, machine tooling, and photonics.

IDS tutorials and movies >

Watch various IDS3010 tutorials and information videos on the working principle, components and applications of the displacement measuring interferometer.

Customer Feedback

Prof. Dr. M. Tajmar

Institute for Aerospace Engineering, Dresden University of Technology, Germany

The noise and stability of the attocube FPS interferometer is up to two orders of magnitude better than the second best system on the market. The installation and use of the sensor was so easy that we could obtain high quality measurements within two weeks after they first arrived at our lab – thanks to the great support from attocube.

Dipl.-Ing. Nanxi Kong

Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany

The motion of a feed unit for micro manufacturing needs to be very precise and accurate. As linear encoders allow only the measurement of the position along one axis, the attocube FPS interferometer can be easily configured to directly measure the position of the tool center point at the feed unit in all directions.

Nicolas Stübe, Dr. Alke Meents

DESY/suna-precision GmbH, Hamburg, Germany

Thanks to the fast adjustment and precise sub-nanometer resolution of the sensor, we`re able to easily identify the trajectories and eigen frequencies for the optimization of flexure-based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications. With the closed-loop integration of the IDS3010 in our X-ray microscope by the end of 2015, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm within by beginning of next year.

Dr. Stefan Kubsky

Synchrotron Soleil St. Aubin, France

An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensorheads. We rapidly managed to file a patent application implying interferometric metrology.

Dr. T. Zickler

CERN / Magnetic Measurement Section, Geneva, Switzerland

Before purchasing a laser interferometer, we were not sure about the applicability of the interferometer for our requirements. During the short testing phase, we became familiar with the interferometer and its operation. While using the sensor for the intended application, we verified the advantages of the device and decided for purchasing it.

Dr. Jonathan Kelly

Diamond Light Source Ltd., Didcot, UK

The WAVE software has proved very useful in characterising and commissioning the interferometers on our P99, Ptychography test set-up.  It enabled easy measurement and identification of the mechanical resonances of the system.  It is also ideal for sampling positions at a wide range of rates for use in other applications.