focused on your application
The IDS can be operated with different sensor heads: ultra compact heads for the most confined spaces or alternative designs where priority is given to easy alignment or to the compatibility with various target materials (glass, aluminum, ceramic, etc.).
for vacuum chambers
KF flange: We supply KF vacuum flanges with FC/APC optical feedthrough in sizes KF16 to KF63, with one to three optical feedthroughs (depending on flange size). KF flanges are vacuum compatible down to 10-8 mbar (high vacuum).
CF flange: We supply CF vacuum flanges with FC/APC optical feedthrough in sizes CF16 to CF63, with one to three optical feedthroughs (depending on flange size). CF flanges are compatible down to 5x10-11 mbar and can be baked out at up to 180 °C. These CF flange feedthroughs are designed for UHV operation.
connecting to feedthroughs and sensor heads
attocube’s interferometer setups are all fiber-based systems allowing for convenient usage both in ambient conditions as well as extreme environments. Consequently, a wide variety of suitable standard and customized fibers is available.
/RT (ambient conditions): 0 .. 100 °C, 1x10-4 mbar .. 10 bar
/HV (high vacuum): 0 .. 150 °C, 1x10-8 mbar .. 10 bar
/UHV (ultra high vacuum): 0 .. 150 °C, 1x10-10 mbar .. 10 bar
/LT (low temperature): mK .. 423 K (150 °C 1x10-4 mbar .. 10 bar
/RAD (radiation hard): 0 .. 150 °C, up to 10 MGy radiation dose
Environmental Compensation Unit - ECU
for ambient conditions
In order to reduce position inaccuracy due to air-induced variations of the index refraction, attocube supplies an environmental compensation unit (ECU). By locally measuring environmental parameters, an accuracy of typically better ± 1 ppm can be achieved in air. The ECU is plug and-play compatible with all IDS models and can be screw- or magnet mounted.
small targets for measurements
Plane mirrors are used in applications were miniature size matters and where vacuum/ low temperature compatibility is key. Available in different standard sizes and customized dimensions of up to 400 mm length.
Recommended sensor heads: D4/F20, M12/F40, M15.5/F40/FLEX
|aluminium mirror Ø 5 mm:||1010847|
|aliminium mirror Ø 9 mm:||1010846|
targets with high angular tolerance
Retroreflectors are used for large dynamic working ranges, such as wafer stage position tracking, industrial machining or coordinate measurement machines Working range up to 5000 mm.
Recommended sensor heads: M12/C7.6
|mounted retroreflector Ø 12.7 mm ambient||1010022|
|mounted retroreflector Ø 12.7 mm LT/HV/UHV||1014798|
|mounted retroreflector Ø 3 mm LT/HV/UHV||1014800|
|retroreflector Ø 12.7 mm LT/HV/UHV||1013420|
|retroreflector Ø 3 mm LT/HV/UHV||1013418|
for individual customer wishes
For specific applications, we offer adapted accessories components. We can change the flange of a vacuum feedthrough, we can adapt the focal length of our sensor heads, and we offer individual targets for customized sensor heads, e.g. varying dimensions of mirrors or specific retroreflectors. Depending on our customers’ requirements, we can also change the length or the materials of the fibers. If you want to know the technical feasibility of your customization idea, please contact our sales team.