Sensor Head M15.5/F40/FLEX

Sensor Head M15.5/F40/FLEX

Ø 22 mm, length 22.7 mm

With the same optics like the M12/F40, the sensor head M15.5/F40/FLEX can also be used for measuring vibrations or material deformations on various surfaces. It is additionally equipped with a flexible structure for an easier alignment of the sensor head: the head can be tilted with a range of 1°.

The sensor kit package for ambient conditions includes a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV).

displacement sensors, sensor heads


Sensor Head
optics typefocusing
dimensionsØ 22 mm , length 22.7 mm
weight [g]16.1
mountingmetric M15.5 x 0.5
focal length [mm]40
typical beam diameter at focal point [µm]~ 45
working range (target: glass) [mm]38.5 .. 41.5
angular tolerance (target: glass) [°]± 0.35
working range (target: mirror) [mm]46 .. 50
angular tolerance (target: mirror) [°]± 0.35
fiber connectionscrewed
filterND filter (KG2 material)
Flex Structure
tilt range
pressureambient pressure
temperature0 .. 50°C
Main Materials
housingTitanium Grade 2 (3.7035)
lensglass (with AR C coating)
flexure greaseUHV grease
Scope of Delivery
fiber IDS-sensor headIDSMF/PC/RT (1009980)
number of axes1
alignment toolhexagon wrench key
mirrorØ 9 mm, Al coated (1010846)
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