Measurement Explained

how to install and use the interferometer

For measuring displacements in a nanometer scale, the sensor system has to suit the application specific conditions. As each application has its own characteristics, it is important to adapt and install the sensor and sensor heads accordingly.

For each measurement set-up, the following details have to be taken in consideration: geometrical shape of target, type of motion, material/surface quality, environmental conditions, and working distance. Check the graphic below for further explanation.

displacement sensors, services, measurement explained, heroshot

  1. Geometrical Shape of Target
  • Flat
  • Spherical
  • Circular
 displacement sensors, services, measurement explained, geometrical shape
  1. Type of Motion
  • High-frequency Vibration
  • Low-frequency Vibration
  • Rotation
  • Overshoots
  • Linear Motion
 displacement sensors, services, measurement explaines, type of motion
  1. Material/Surface quality
  • Mirror & Retroreflector
  • Steel (polished)
  • Silicon/Wafer
  • Glass
 displacement sensors, services, measurement explained, material/surface quality

 

  1. Environmental Conditions
  • Radiation Harsh
  • Ultra-high Vacuum
  • Low Temperature
  • High Vacuum
  • Ambient Conditions
 displacement sensors, services, measurement explained, environmental conditions
  1. Working Distance
  • Ultra High (up to 5m)
  • High (up to 1m)
  • Medium (a few cm)
  • Small (a few mm)
 displacement sensors, services, measurement explained, working distance
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How to select the appropriate sensor head?

In order to provide a sensor system adapted to the specific conditions of your application, our sales personnel supports you in finding the fitting standard sensor head or defines the criteria for a customized sensor head. They will also attend the installation and testing of your measurement setup.