Sensor Head M12/C1.6

Sensor Head M12/C1.6

Ø 14 mm, length 17.4 mm

The sensor head M12/C1.6 is the perfect choice for long-range measurements on miniaturized retroreflectors and plane mirrors. It is capable to measure displacements of more than 1 meter, and thus it is the perfect choice for XY-stage position control or in applications with space constraints for the retroreflector.

The sensor kit package for ambient conditions includes a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV).

displacement sensors, sensor heads


Sensor Head
optics typecollimating
dimensionsØ 14 mm, length 17.4 mm
weight [g]5.1
mountingmetric M12 x 0.5
spot size1.6 mm
beam diameter [mm]1.6
focal length [mm]infinity
working range (target: mirror) [mm]up to 1000
angular tolerance (target: mirror) [°]± 0.02
lateral tolerance (target: retroreflector) [mm]± 0.5
angular tolerance (target: retroreflector) [°]± 6
pressureambient pressure
temperature0 .. 50°C
Main Materials
housingTitanium Grade 2 (3.7035)
lensglass (with AR C coating)
Scope of Delivery
fiber IDS-sensor headIDSMF/PC/RT (1009980)
number of axes1
mirrorØ 9 mm, Al coated (1010846)
attenuatorConnector. SC/APC, Attenuation: 1dB
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