Sensor Head D12/F2.8
Ø 12 mm, length 32.3 mm
The D12/F2.8 sensor head convinces with a high angular tolerance in combination with a small spot size and a short distance between the target and the sensor head. It is used for measuring directly on surfaces, e.g. to capture the surface structure (profilometry).
The sensor kit package for ambient conditions includes a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV).
Specifications
| Sensor Head | |
|---|---|
| optics type | focusing |
| dimensions | Ø 12 mm, length 32.3 mm |
| mounting | clamped |
| spot size | 14 µm |
| focal length [mm] | 2.8 |
| connector | FC/PC |
| working range (target: glass) [mm] | 2.8 (± 4 µm) |
| alignment tolerance (target: glass) [°] | ± 4 |
| working range (target: wafer) [mm] | 2.8 (± 14 µm) |
| alignment tolerance (target: wafer) [°] | ± 7 |
| working range (target: mirror) [mm] | 2.8 (± 20 µm) |
| alignment tolerance (target: mirror) [°] | ± 10 |
| Scope of delivery | |
| number of axes | 1 |
