Sensor Head D12/F2.8

Sensor Head D12/F2.8

Ø 12 mm, length 32.3 mm

The D12/F2.8 sensor head convinces with a high angular tolerance in combination with a small spot size and a short distance between the target and the sensor head. It is used for measuring directly on surfaces, e.g. to capture the surface structure (profilometry).

The sensor kit package for ambient conditions includes a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV).

displacement sensors, sensor heads


Sensor Head
optics typefocusing
dimensionsØ 12 mm, length 32.3 mm
spot size14 µm
focal length [mm]2.8
working range (target: glass) [mm]2.8 (± 4 µm)
alignment tolerance (target: glass) [°]± 4
working range (target: wafer) [mm]2.8 (± 14 µm)
alignment tolerance (target: wafer) [°]± 7
working range (target: mirror) [mm]2.8 (± 20 µm)
alignment tolerance (target: mirror) [°]± 10
Scope of Delivery
number of axes1
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