2 kg
30 mm
0 .. 50°C
5E-11 mbar
1 nm
ECSx3050/StSt/NUM/UHV
linear bearing based nanopositioner for horizontal motion
The ECSx3050 provides high-resolution positioning over a travel range of 30 mm. Its high accuracy is achieved with crossed roller bearings.
The positioner is designed for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C
.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Specifications
For a detailed definition of used terms and descriptions please visit our Nanopositioners Glossary
Size and Dimensions | |
---|---|
footprint; height | 30 mm x 50 mm; 9.5 mm |
maximum installation space | 30 mm x 81.6 mm; 9.5 mm |
weight (stainless steel version) | 90 g |
height | 9.5 mm |
Materials | |
positioner body | stainless steel |
actuator | PZT ceramics |
connecting wires | copper, jacket: RT: PTFE, HV/UHV: fiberglass |
Coarse Positioning Mode | |
travel range (step mode) | 30 mm |
maximum drive velocity @ 300 K | 4.5 mm/s |
input voltage range | 0 - 45 V |
Fine Positioning Mode | |
fine linear positioning range @ 300 K | 1.6 µm |
fine positioning resolution | sub-nm |
input DC voltage range | 0 - 45 V |
Position Encoder | |
readout mechanism | optoelectronic sensor |
encoded travel range | entire travel |
sensor resolution | 1 nm |
sensor power (when measuring) | 300 mW |
repeatability | 50 nm (bidirectional) |
Load (@ ambient conditions) | |
maximum load | 2 kg |
maximum dynamic force along the axis | 1 N |
Error Motion | |
roll E_AX | specified* 1.25 mrad (expected** <0.25 mrad) |
pitch E_BX | specified* 1.75 mrad (expected** <1 mrad) |
yaw E_CX | specified* 1.25 mrad (expected** <0.4 mrad) |
y-Straightness E_YX | specified* 4 µm (expected** <3 µm) |
z-Straightness E_ZX | specified* 8 µm (expected** <6 µm) |
* | specified: guaranteed for every positioner |
** | expected: typically met by most positioners |
General Specifications | |
environment | ultra-high vacuum |