ANPx321 RES UHV   Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions
Icon Load

2 kg

Icon Travel Range Linear

15 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

5E-11 mbar

Icon Magnetic Fields

0 - 31 T

Icon Resolution

~ 200 nm

ANPx321/RES/UHV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion

The ANPx321 nanopositioner incorporates ceramic bearings to provide high stability positioning for applications under extreme conditions like cryogenic temperature, high magnetic fields, and vacuum conditions.
The positioner is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV) .
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Cryogenic Tablet

Specifications

Load (@ ambient conditions)
maximum dynamic force along the axis2 N
maximum load2 kg
Size and Dimensions
footprint; height44 mm x 41.6 mm; 11.5 mm
maximum installation space44 mm x 49.1 mm; 11.5 mm
weight80 g
Materials
positioner bodytitanium
actuatorPZT ceramics
connecting wiresinsulated twisted pair, copper
Coarse Positioning Mode
travel range (step mode)15 mm
maximum drive velocity @ 300 K~ 3 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K7.5 µm
fine positioning resolutionsub-nm
Accuracy of Movement
repeatability of step sizestypically 5 % over full range
typ. forward / backward step asymmetry typically 5 %
Position Encoder
readout mechanismresistive sensor
encoded travel rangefull travel
sensor resolution~ 200 nm
repeatability1..2 µm (unidirectional)
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