0 .. 100°C
linear bearing based nanopositioner for horizontal motion
The ECSx3050 provides high-resolution positioning over a travel range of 30 mm. Its high accuracy is achieved with crossed roller bearings.
The positioner is designed for high vacuum pressures down to 1 E-8 mbar and ambient temperature: 0..100°C .
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
|Size and Dimensions|
|footprint; height||30 mm x 50 mm; 9.5 mm|
|maximum installation space||30 mm x 81.6 mm; 9.5 mm|
|weight (stainless steel version)||90 g|
|positioner body||stainless steel|
|connecting wires||copper, jacket: RT: silicon, HV/UHV: fiberglass|
|Coarse Positioning Mode|
|travel range (step mode)||30 mm|
|maximum drive velocity @ 300 K||4.5 mm/s|
|input voltage range||0 - 60 V|
|Fine Positioning Mode|
|fine linear positioning range @ 300 K||1.6 µm|
|fine positioning resolution||sub-nm|
|input DC voltage range @ 300 K||0 - 60 V|
|Load (@ ambient conditions)|
|maximum load||15 kg|
|maximum dynamic force along the axis||1 N|