24 kg
50 mm
0 .. 100°C
1E-8 mbar
1 nm
ECSx3080/StSt/NUM/HV
linear bearing based nanopositioner for horizontal motion
The ECSx3080 provides high-resolution positioning over a travel range of 50 mm. Its high guiding accuracy is achieved with crossed roller bearings.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Specifications
| Size and Dimensions | |
|---|---|
| footprint; height | 30 mm x 80 mm; 9.5 mm |
| maximum installation space | 30 mm x 131.6 mm; 9.5 mm |
| weight (aluminium version) | 78 g |
| weight (stainless steel version) | 147 g |
| Materials | |
| positioner body | stainless steel |
| actuator | PZT ceramics |
| connecting wires | copper, jacket: RT: silicon, HV/UHV: fiberglass |
| Coarse Positioning Mode | |
| travel range (step mode) | 50 mm |
| maximum drive velocity @ 300 K | 4.5 mm/s |
| Fine Positioning Mode | |
| fine linear positioning range @ 300 K | 1.6 µm |
| fine positioning resolution | sub-nm |
| Accuracy of Movement | |
| repeatability of step sizes | typically 5 % over full range |
| typ. forward / backward step asymmetry | 0.1 |
| Position Encoder | |
| readout mechanism | optoelectronic sensor |
| encoded travel range | |
| sensor resolution | 1 nm |
| repeatability | 50 nm (bidirectional) |
| Load (@ ambient conditions) | |
| maximum load | 24 kg |
| maximum dynamic force along the axis | 1 N |
Suitable Controller
AMC100
