

24 kg

50 mm

0 .. 100°C

1E-8 mbar

1 nm
ECSx3080/StSt/NUM/HV
linear bearing based nanopositioner for horizontal motion
The ECSx3080 provides high-resolution positioning over a travel range of 50 mm. Its high guiding accuracy is achieved with crossed roller bearings.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.

Specifications
Size and Dimensions | |
---|---|
footprint; height | 30 mm x 80 mm; 9.5 mm |
maximum installation space | 30 mm x 131.6 mm; 9.5 mm |
weight (stainless steel version) | 147 g |
Materials | |
positioner body | stainless steel |
actuator | PZT ceramics |
connecting wires | copper, jacket: RT: silicon, HV/UHV: fiberglass |
Coarse Positioning Mode | |
travel range (step mode) | 50 mm |
maximum drive velocity @ 300 K | 4.5 mm/s |
Fine Positioning Mode | |
fine linear positioning range @ 300 K | 1.6 µm |
fine positioning resolution | sub-nm |
Position Encoder | |
readout mechanism | optoelectronic sensor |
encoded travel range | entire travel |
sensor resolution | 1 nm |
repeatability | 50 nm (bidirectional) |
Load (@ ambient conditions) | |
maximum load | 24 kg |
maximum dynamic force along the axis | 1 N |