ECSxy5050 Al NUM RT Nanopositioners for Ambient and Vacuum Conditions
Icon Load

15000 g

Icon Travel Range Linear

25 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

1E-4 mbar

Icon Resolution

1 nm

ECSxy5050/Al/NUM/RT

monolithic bearing based xy positioner for horizontal motion

The ECSxy5050 is dedicated for xy horizontal movement with a drive force of up to 2N. It provides high-resolution positioning and its high guiding accuracy is achieved with crossed roller bearings.
The positioner is designed for ambient conditions (/RT).
Our aluminum models combine a powerful piezoelectric motor with a lightweight body for easy integration in setups in atmospheric conditions.
Cryogenic Tablet

Specifications

Load (@ ambient conditions)
maximum load15000 g
maximum dynamic force along the axis2 N
Suitable Operating Conditions
temperature range0..100°C
Size and Dimensions
footprint; height50 mm x 50 mm; 16.4 mm
maximum installation space75 mm x 75 mm; 16.4 mm
weight109 g
Materials
positioner bodyaluminum
positioner body (/HV, /UHV)stainless steel
actuatorPZT ceramics
connecting wirescopper, jacket: RT: Fluoropolymer
Coarse Positioning Mode
travel range (step mode)25 mm
maximum drive velocity @ 300 K4.5 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K1.6 µm
fine positioning resolutionsub-nm
Accuracy of Movement
repeatability of step sizestypically 5 % over full range
typ. forward / backward step asymmetry 10 %
Position Encoder
readout mechanismoptoelectronic sensor
encoded travel rangeentire travel
sensor resolution1 nm
repeatability50 nm (bidirectional)
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