2 kg
30 mm
0 .. 50°C
5E-11 mbar
1 nm
ECSx5050/StSt/HL/NUM/UHV
linear bearing based nanopositioner for horizontal motion
The ECSx5050 provides high-resolution positioning over a travel range of 30 mm. For xyz-positioning, two ECSx5050 positioners can be mounted on top of each other and combined with a third one attached to an L-bracket. Its high accuracy is achieved with crossed roller bearings.
The positioner comes with an integrated optoelectronic encoder (/NUM),with high dynamic force for higher loads (/HL) and is designed for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C
.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Specifications
For a detailed definition of used terms and descriptions please visit our Nanopositioners Glossary
| Size and Dimensions | |
|---|---|
| footprint; height | 50 mm x 50 mm; 9.5 mm |
| maximum installation space | 50 mm x 81.6 mm; 9.5 mm |
| weight (stainless steel version) | 149 g |
| height | 9.5 mm |
| Materials | |
| positioner body | stainless steel |
| actuator | PZT ceramics |
| connecting wires | copper, jacket: RT: PTFE, HV/UHV: fiberglass |
| Coarse Positioning Mode | |
| travel range (step mode) | 30 mm |
| maximum drive velocity @ 300 K | 4.5 mm/s |
| input voltage range | 0 - 45 V |
| Fine Positioning Mode | |
| fine linear positioning range @ 300 K | 1.6 µm |
| fine positioning resolution | sub-nm |
| input DC voltage range | 0 - 45 V |
| Position Encoder | |
| readout mechanism | optoelectronic sensor |
| encoded travel range | |
| sensor resolution | 1 nm |
| sensor power (when measuring) | 300 mW |
| repeatability | 50 nm (bidirectional) |
| Load (@ ambient conditions) | |
| maximum load | 2 kg |
| maximum dynamic force along the axis | 5 N |
| Error Motion | |
| roll E_AX | specified* 1.25 mrad (expected** <0.25 mrad) |
| pitch E_BX | specified* 1.75 mrad (expected** <1 mrad) |
| yaw E_CX | specified* 1.25 mrad (expected** <0.35 mrad) |
| y-Straightness E_YX | specified* 5 µm (expected** <2 µm) |
| z-Straightness E_ZX | specified* 9 µm (expected** <5 µm) |
| * | specified: guaranteed for every positioner |
| ** | expected: typically met by most positioners |
| General Specifications | |
| environment | ultra-high vacuum |
Suitable Controller
AMC110
