ECSx3030 StSt NUM+ HV Nanopositioners for Ambient and Vacuum Conditions
Icon Load

1 kg

Icon Travel Range Linear

20 mm

Icon Room Temperature

0 .. 55°C

Icon Pressure

1E-8 mbar

Icon Resolution

1 nm


linear bearing based nanopositioner for horizontal motion

The ECSx3030 has the smallest footprint of attocube's Industrial Line nanopositioners. It provides high resolution positioning over a travel range of 20 mm. For xyz-positioning, two ECSx3030 positioners can be mounted on top of each other and combined with a third one attached to an L-bracket. Its high accuracy is achieved with crossed roller bearings.
The positioner is designed for high vacuum pressures down to 1 E-8 mbar.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Cryogenic Tablet


For a detailed definition of used terms and descriptions please visit our Nanopositioners Glossary

Size and Dimensions
footprint; height30 mm x 30 mm; 9.5 mm
maximum installation space30 mm x 51.6 mm; 9.5 mm
weight (stainless steel version)51 g
height9.5 mm
positioner bodystainless steel
actuatorPZT ceramics
connecting wirescopper, jacket: RT: PTFE, HV/UHV: fiberglass
Coarse Positioning Mode
travel range (step mode)20 mm
maximum drive velocity @ 300 K4.5 mm/s
input voltage range0 - 45 V
Fine Positioning Mode
fine linear positioning range @ 300 K1.6 µm
fine positioning resolutionsub-nm
input DC voltage range0 - 45 V
Position Encoder
readout mechanismoptoelectronic sensor
encoded travel rangeentire travel
sensor resolution1 nm
sensor power (when measuring)50 mW
repeatability50 nm (bidirectional)
Load (@ ambient conditions)
maximum load1 kg
maximum dynamic force along the axis1 N
General Specifications
environmenthigh vacuum
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