0 .. 100°C
0 - 31 T
ANPx321/UHV - linear x-nanopositioner
bearing based linear nanopositioner for horizontal motion
The ANPx321 nanopositioner incorporates ceramic bearings to provide high stability positioning for applications under extreme conditions like cryogenic temperature, high magnetic fields, and vacuum conditions.
The positioner is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV) .
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
|Load (@ ambient conditions)|
|maximum dynamic force along the axis||2 N|
|maximum load||2 kg|
|Size and Dimensions|
|footprint; height||40 mm x 41.6 mm; 11.5 mm|
|maximum installation space||40 mm x 56.6 mm; 11.5 mm|
|connecting wires||insulated twisted pair, copper|
|Coarse Positioning Mode|
|travel range (step mode)||15 mm|
|maximum drive velocity @ 300 K||~ 3 mm/s|
|Fine Positioning Mode|
|fine linear positioning range @ 300 K||7.5 µm|
|fine positioning resolution||sub-nm|
|Accuracy of Movement|
|repeatability of step sizes||typically 5 % over full range|
|typ. forward / backward step asymmetry||typically 5 %|