ECSx3080 StSt NUM+ HV Nanopositioners for Ambient and Vacuum Conditions
Icon Load

24 kg

Icon Travel Range Linear

50 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

1E-8 mbar

Icon Resolution

1 nm

ECSx3080/StSt/NUM+/HV

linear bearing based nanopositioner for horizontal motion

The ECSx3080 provides high-resolution positioning over a travel range of 50 mm. Its high guiding accuracy is achieved with crossed roller bearings.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Cryogenic Tablet

Specifications

Size and Dimensions
footprint; height30 mm x 80 mm; 9.5 mm
maximum installation space30 mm x 131.6 mm; 9.5 mm
weight (aluminium version)78 g
Materials
positioner bodystainless steel
actuatorPZT ceramics
connecting wirescopper, jacket: RT: silicon, HV/UHV: fiberglass
Coarse Positioning Mode
travel range (step mode)50 mm
maximum drive velocity @ 300 K4.5 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K1.6 µm
fine positioning resolutionsub-nm
Accuracy of Movement
repeatability of step sizestypically 5 % over full range
typ. forward / backward step asymmetry 10 %
Position Encoder
readout mechanismoptoelectronic sensor
encoded travel rangeentire travel
sensor resolution1 nm
repeatability50 nm (bidirectional)
Load (@ ambient conditions)
maximum load24 kg
maximum dynamic force along the axis1 N
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