50 g
2.5 mm
0 .. 150°C
5E-11 mbar
0 - 35 T
~ 200 nm
ANPz51/RES/UHV - linear z-nanopositioner
compact linear nanopositioner for vertical motion
The compact ANPz51 provides high resolution nanopositioning to fit 1" diameter setups. For a full 3D motion stack, two ANPx51 can be combined with an ANPz51.
The positioner is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV), all positioners can be baked out up to 150°C
.
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Specifications
For a detailed definition of used terms and descriptions please visit our Nanopositioners Glossary
Size and Dimensions | |
---|---|
footprint; height | 15 mm x 18 mm; 13.5 mm |
maximum installation space | 15 mm x 18 mm; 16 mm |
weight | 13 g |
height | 13.5 mm |
Materials | |
positioner body | titanium |
actuator | PZT ceramics |
connecting wires | insulated twisted pair, copper |
Coarse Positioning Mode | |
travel range (step mode) | 2.5 mm |
maximum drive velocity @ 300 K | ~ 1 mm/s |
input voltage range | 0 - 60 V |
Fine Positioning Mode | |
fine linear positioning range @ 300 K | 3.5 µm |
fine positioning resolution | sub-nm |
input DC voltage range @ 300 K | 0 - 100 V |
Position Encoder | |
readout mechanism | resistive sensor |
encoded travel range | full travel |
sensor resolution | ~ 200 nm |
sensor power (when measuring) | 0.01 - 1 mW |
repeatability | 1..2 µm (unidirectional) |
Load (@ ambient conditions) | |
maximum load | 50 g |
maximum dynamic force along the axis | 1 N |
General Specifications | |
environment | /UHV |