1 kg
20 mm
0 .. 50°C
5E-11 mbar
1 nm
ECSx3030/StSt/NUM/UHV
linear bearing based nanopositioner for horizontal motion
The ECSx3030 has the smallest footprint of attocube's Industrial Line nanopositioners. It provides high resolution positioning over a travel range of 20 mm. For xyz-positioning, two ECSx3030 positioners can be mounted on top of each other and combined with a third one attached to an L-bracket. Its high accuracy is achieved with crossed roller bearings.
The positioner is designed for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C
.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Specifications
For a detailed definition of used terms and descriptions please visit our Nanopositioners Glossary
| Size and Dimensions | |
|---|---|
| footprint; height | 30 mm x 30 mm; 9.5 mm |
| maximum installation space | 30 mm x 51.6 mm; 9.5 mm |
| weight (stainless steel version) | 51 g |
| height | 9.5 mm |
| Materials | |
| positioner body | stainless steel |
| actuator | PZT ceramics |
| connecting wires | copper, jacket: RT: PTFE, HV/UHV: fiberglass |
| Coarse Positioning Mode | |
| travel range (step mode) | 20 mm |
| maximum drive velocity @ 300 K | 4.5 mm/s |
| input voltage range | 0 - 45 V |
| Fine Positioning Mode | |
| fine linear positioning range @ 300 K | 1.6 µm |
| fine positioning resolution | sub-nm |
| input DC voltage range | 0 - 45 V |
| Position Encoder | |
| readout mechanism | optoelectronic sensor |
| encoded travel range | entire travel |
| sensor resolution | 1 nm |
| sensor power (when measuring) | 300 mW |
| repeatability | 50 nm (bidirectional) |
| Load (@ ambient conditions) | |
| maximum load | 1 kg |
| maximum dynamic force along the axis | 1 N |
| General Specifications | |
| environment | ultra-high vacuum |
Suitable Controller
AMC110
