ANSxyz50 UHV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions
Icon Load

50 g

Icon Room Temperature

0 .. 150°C

Icon Pressure

5E-11 mbar

Icon Magnetic Fields

0 - 35 T

ANSxyz50/UHV xyz-Scanner made from Titanium

compact open loop xyz-scanner

The ANSxyz50 precision xyz scanner is designed to provide large scan areas with minimal spatial requirements. It is compatible with all ANP51-series positioners.
The positioner is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV), all positioners can be baked out up to 150°C .
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Cryogenic Tablet


Size and Dimensions
footprint; height15 mm x 15 mm; 13 mm
maximum installation space15 mm x 15 mm; 13 mm
weight11.5 g
positioner bodytitanium
actuatorPZT ceramics
connecting wiresinsulated twisted pair, copper
Fine Positioning Mode
fine linear positioning range @ 300 K30 x 30 x 4.3 µm
fine linear positioning range @ 4 K15 x 15 x 2 µm
fine positioning resolutionsub-nm
typical actuator capacitance fine (z) @ 300 K2.5 µF
typical actuator capacitance fine @ 300 K1.4 µF
input DC voltage range @ 300 K0 - 60 V
*scan range depends on environment
Load (@ ambient conditions)
maximum load50 g
General Specifications
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