0 .. 100°C
linear bearing based nanopositioner for horizontal motion
The ECSx3030 has the smallest footprint of attocube's Industrial Line nanopositioners. It provides high resolution positioning over a travel range of 20 mm. For xyz-positioning, two ECSx3030 positioners can be mounted on top of each other and combined with a third one attached to an L-bracket. Its high accuracy is achieved with crossed roller bearings.
The positioner is designed for ultra-high vacuum with pressures down to 5E-11 mbar (/UHV), all positioners can be baked out up to 150°C .
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
|Size and Dimensions|
|footprint; height||30 mm x 30 mm; 9.5 mm|
|maximum installation space||30 mm x 51.6 mm; 9.5 mm|
|weight (aluminium version)||29 g|
|weight (stainless steel version)||51 g|
|positioner body||stainless steel|
|connecting wires||copper, jacket: RT: silicone, HV/UHV: fiberglass|
|Coarse Positioning Mode|
|travel range (step mode)||20 mm|
|maximum drive velocity @ 300 K||4.5 mm/s|
|input voltage range||0 - 45 V|
|Fine Positioning Mode|
|fine linear positioning range @ 300 K||1.6 µm|
|fine positioning resolution||sub-nm|
|input DC voltage range||0 - 45 V|
|Load (@ ambient conditions)|
|maximum load||9 kg|
|maximum dynamic force along the axis||1 N|