ECSz3030 Al RT Nanopositioners for Ambient and Vacuum Conditions
Icon Load

800 g

Icon Travel Range Linear

5 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

1E-4 mbar

ECSz3030/Al/RT

compact linear bearing based nanopositioner for vertical motion

The ECSz3030 is dedicated for vertical movement with a drive force of up to 8N with a compact footprint. It provides high-resolution z-positioning, and its high guiding accuracy is achieved with crossed roller bearings.
The positioner is designed for ambient conditions (/RT).
Our aluminum models combine a powerful piezoelectric motor with a lightweight body for easy integration in setups in atmospheric conditions.
Cryogenic Tablet

Specifications

Size and Dimensions
footprint; height30 mm x 31 mm; 31.5 mm
maximum installation space30 mm x 36.1 mm; 36.5 mm
weight (aluminium version)90 g
Materials
positioner bodyaluminum
actuatorPZT ceramics
connecting wirescopper, jacket: RT: Teflon/PTFE
Coarse Positioning Mode
travel range (step mode)5 mm
maximum drive velocity @ 300 K2 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K0.8 µm
fine positioning resolutionsub-nm
Accuracy of Movement
repeatability of step sizestypically 5 % over full range
typ. forward / backward step asymmetry 10 %
Load (@ ambient conditions)
maximum load800 g
maximum dynamic force along the axis8 N
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