ECSx50180 StSt UHV Nanopositioners for Ambient and Vacuum Conditions
Icon Load

15 kg

Icon Travel Range Linear

125 mm

Icon Room Temperature

0 .. 100°C

Icon Pressure

5E-11 mbar


linear bearing based nanopositioner for horizontal motion

The ECSx50180 provides high-resolution positioning over a travel range of 125 mm. Its high guiding accuracy is achieved with crossed roller bearings.
The positioner is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV) .
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Cryogenic Tablet


Size and Dimensions
footprint; height50 mm x 180 mm; 11.5 mm
maximum installation space50 mm x 305 mm; 11.5 mm
weight (stainless steel version)700 g
positioner bodystainless steel
actuatorPZT ceramics
connecting wirescopper, jacket: RT: PTFE, HV/UHV: fiberglass
Coarse Positioning Mode
travel range (step mode)125 mm
maximum drive velocity @ 300 K3 mm/s
input voltage range0 - 100 V
Fine Positioning Mode
fine linear positioning range @ 300 K1.6 µm
fine positioning resolutionsub-nm
input DC voltage range @ 300 K0 - 60 V
Load (@ ambient conditions)
maximum load15 kg
maximum dynamic force along the axis5 N
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