ECSx50120 StSt NUM HV Nanopositioners for Ambient and Vacuum Conditions
Icon Load

15 kg

Icon Travel Range Linear

80 mm

Icon Low Temperature

273 - 328

Icon Pressure

1E-8 mbar

Icon Resolution

1 nm

ECSx50120/StSt/NUM/HV

linear bearing based nanopositioner for horizontal motion

The ECSx50120 provides high-resolution positioning over a travel range of 80 mm. Its high guiding accuracy is achieved with crossed roller bearings.
The positioner is designed for high vacuum pressures down to 1 E-8 mbar and ambient temperature: 0..100°C.
Stainless steel is a rugged, cost effective material for the nanopositioner body that is compatible with demanding vacuum conditions up to UHV.
Cryogenic Tablet

Specifications

Size and Dimensions
footprint; height50 mm x 120 mm; 11.5 mm
maximum installation space50 mm x 200 mm; 11.5 mm
weight (stainless steel version)460 g
Materials
positioner bodystainless steel
actuatorPZT ceramics
connecting wirescopper, jacket: RT: PTFE, HV/UHV: fiberglass
Coarse Positioning Mode
travel range (step mode)80 mm
maximum drive velocity @ 300 K3 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K1.6 µm
fine positioning resolutionsub-nm
input DC voltage range @ 300 K0 - 60 V
Position Encoder
readout mechanismoptoelectronic sensor
encoded travel rangeentire travel
sensor resolution1 nm
repeatability50 nm (bidirectional)
Load (@ ambient conditions)
maximum load15 kg
maximum dynamic force along the axis5 N
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