0 .. 100°C
ECSx3050/Al/HL/RT - nanopositioner made from Aluminum,
linear bearing based nanopositioner for horizontal motion
The ECSx3050 provides high-resolution positioning over a travel range of 30 mm. Its high accuracy is achieved with crossed roller bearings.
The positioner comes with high dynamic force for higher loads (/HL) and is designed for ambient conditions (/RT).
Our aluminum models combine a powerful piezoelectric motor with a lightweight body for easy integration in setups in atmospheric conditions.
|Size and Dimensions|
|footprint; height||30 mm x 50 mm; 9.5 mm|
|maximum installation space||30 mm x 81.6 mm; 9.5 mm|
|weight (aluminium version)||49 g|
|weight (stainless steel version)|
|connecting wires||copper, jacket: RT: silicon, HV/UHV: fiberglass|
|Coarse Positioning Mode|
|travel range (step mode)||30 mm|
|maximum drive velocity @ 300 K||4.5 mm/s|
|Fine Positioning Mode|
|fine linear positioning range @ 300 K||1.6 µm|
|fine positioning resolution||sub-nm|
|Accuracy of Movement|
|repeatability of step sizes||typically 5 % over full range|
|typ. forward / backward step asymmetry||0.1|
|Load (@ ambient conditions)|
|maximum load||15000 g|
|maximum dynamic force along the axis||1 N|