ECSx3050 Al NUM HL RT   Nanopositionierer aus Aluminium  Nanopositioners for Ambient and Vacuum Conditions
Icon Load

15000 g

Icon Travel Range Linear

30 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

1E-4 mbar

Icon Resolution

1 nm

ECSx3050/Al/HL/NUM/RT - nanopositioner made from Aluminum,

linear bearing based nanopositioner for horizontal motion

The ECSx3050 provides high-resolution positioning over a travel range of 30 mm. Its high accuracy is achieved with crossed roller bearings.
The positioner comes with an integrated optoelectronic encoder (/NUM),with high dynamic force for higher loads (/HL) and is designed for ambient conditions (/RT).
Our aluminum models combine a powerful piezoelectric motor with a lightweight body for easy integration in setups in atmospheric conditions.
Cryogenic Tablet

Specifications

Accuracy of Movement
typ. forward / backward step asymmetry 0.1
repeatability of step sizestypically 5 % over full range
Position Encoder
readout mechanismoptoelectronic sensor
encoded travel rangeentire travel
sensor resolution1 nm
repeatability50 nm (bidirectional)
Load (@ ambient conditions)
maximum load15000 g
maximum dynamic force along the axis1 N
Size and Dimensions
footprint; height30 mm x 50 mm; 9.5 mm
maximum installation space30 mm x 81.6 mm; 9.5 mm
weight (aluminium version)49 g
weight (stainless steel version)
Materials
positioner bodyaluminum
actuatorPZT ceramics
connecting wirescopper, jacket: RT: silicon, HV/UHV: fiberglass
Coarse Positioning Mode
travel range (step mode)30 mm
maximum drive velocity @ 300 K4.5 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K1.6 µm
fine positioning resolutionsub-nm
Download PDF
show more icon

Suitable Controller

AMC100.jpg

AMC100