ANSxyz100hs UHV xyz Scanner aus Titan Nanopositioners for Ambient and Vacuum Conditions
Icon Load

100 g

Icon Travel Range Linear

40 x 40 x 4.3 µm³

Icon Room Temperature

0 .. 100°C

Icon Pressure

5E-11 mbar

Icon Magnetic Fields

0 - 31 T

ANSxyz100hs/UHV xyz-Scanner made from Titanium

high stability open loop xyz-scanner

The ANSxyz100hs piezoelectric scanner enables high precision scanning while providing a balance between large scan ranges and stability in three dimensions, even at cryogenic temperatures.
The positioner is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV) .
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Cryogenic Tablet


Size and Dimensions
footprint; height24 mm x 24 mm; 10 mm
maximum installation space24 mm x 24 mm; 10 mm
weight (aluminium version)19 g
positioner bodytitanium
actuatorPZT ceramics
connecting wiresinsulated twisted pair, copper
Coarse Positioning Mode
input voltage range0 - 120 V
Fine Positioning Mode
fine positioning range @ 300 K40 x 40 x 4.3 µm³
fine positioning resolutionsub-nm
typical actuator capacitance fine (z) @ 300 K2.5 µF
typical actuator capacitance fine @ 300 K0.6 µF
input DC voltage range @ 300 K0.34 V
input DC voltage range (z) @ 300 Ksub-nm
Load (@ ambient conditions)
maximum load100 g
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