ANPz101 RES HL UHV   Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions
Icon Load

200 g

Icon Travel Range Linear

5 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

5E-11 mbar

Icon Magnetic Fields

0 - 31 T

Icon Resolution

~ 200 nm

ANPz101/RES/HL/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion

The ANPz101 provides high resolution z-nanopositioning for setups to fit 2" diameter setups. A powerful xyz nanopositioning unit is possible when combining two ANPx101 with an ANPz101 positioner.
The positioner comes with an integrated resistive encoder (/RES),with high dynamic force for higher loads (/HL) and is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV) .
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Cryogenic Tablet

Specifications

Coarse Positioning Mode
travel range (step mode)5 mm
maximum drive velocity @ 300 K~ 3 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K5 µm
fine positioning resolutionsub-nm
Accuracy of Movement
repeatability of step sizestypically 5 % over full range
typ. forward / backward step asymmetry typically 5 - 10 % depending on load
Position Encoder
readout mechanismresistive sensor
encoded travel rangefull travel
sensor resolution~ 200 nm
repeatability1..2 µm (unidirectional)
Load (@ ambient conditions)
maximum load200 g
maximum dynamic force along the axis5 N
Size and Dimensions
footprint; height24 mm x 24 mm; 20 mm
maximum installation space24 mm x 24 mm; 25 mm
weight38 g
Materials
positioner bodytitanium
actuatorPZT ceramics
connecting wiresinsulated twisted pair, copper
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