ANPz101 RES HL UHV   Linearer z Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions
Icon Load

200 g

Icon Travel Range Linear

5 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

5E-11 mbar

Icon Magnetic Fields

0 - 31 T

Icon Resolution

~ 200 nm

ANPz101/RES/HL/UHV - linear z-nanopositioner

linear nanopositioner for vertical motion

The ANPz101 provides high resolution z-nanopositioning for setups to fit 2" diameter setups. A powerful xyz nanopositioning unit is possible when combining two ANPx101 with an ANPz101 positioner.
The positioner comes with an integrated resistive encoder (/RES),with high dynamic force for higher loads (/HL) and is designed for ultra-high vacuum with pressures down to 5 E-11 mbar (/UHV) .
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Cryogenic Tablet


Coarse Positioning Mode
travel range (step mode)5 mm
maximum drive velocity @ 300 K~ 3 mm/s
Fine Positioning Mode
fine linear positioning range @ 300 K5 µm
fine positioning resolutionsub-nm
Accuracy of Movement
repeatability of step sizestypically 5 % over full range
typ. forward / backward step asymmetry typically 5 - 10 % depending on load
Position Encoder
readout mechanismresistive sensor
encoded travel rangefull travel
sensor resolution~ 200 nm
repeatability1..2 µm (unidirectional)
Load (@ ambient conditions)
maximum load200 g
maximum dynamic force along the axis5 N
Size and Dimensions
footprint; height24 mm x 24 mm; 20 mm
maximum installation space24 mm x 24 mm; 25 mm
weight38 g
positioner bodytitanium
actuatorPZT ceramics
connecting wiresinsulated twisted pair, copper
Download PDF
show more icon