ANPx321 RES HV   Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions
Icon Load

2 kg

Icon Travel Range Linear

15 mm

Icon Travel Range Rotator

0 .. 100°C

Icon Pressure

1E-8 mbar

Icon Magnetic Fields

0 - 31 T

Icon Resolution

~ 200 nm

ANPx321/RES/HV - linear x-nanopositioner

bearing based linear nanopositioner for horizontal motion

The ANPx321 nanopositioner incorporates ceramic bearings to provide high stability positioning for applications under extreme conditions like cryogenic temperature, high magnetic fields, and vacuum conditions.
The positioner is designed for high vacuum pressures down to 1 E-8 mbar and ambient temperature: 0..100°C.
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Cryogenic Tablet

Specifications

Coarse Positioning Mode
maximum drive velocity @ 300 K~ 3 mm/s
travel range (step mode)15 mm
Fine Positioning Mode
fine linear positioning range @ 300 K7.5 µm
fine positioning resolutionsub-nm
Accuracy of Movement
repeatability of step sizestypically 5 % over full range
typ. forward / backward step asymmetry typically 5 %
Position Encoder
readout mechanismresistive sensor
encoded travel rangefull travel
sensor resolution~ 200 nm
repeatability1..2 µm (unidirectional)
Load (@ ambient conditions)
maximum load2 kg
maximum dynamic force along the axis2 N
Size and Dimensions
footprint; height44 mm x 41.6 mm; 11.5 mm
maximum installation space44 mm x 49.1 mm; 11.5 mm
weight80 g
Materials
positioner bodytitanium
actuatorPZT ceramics
connecting wiresinsulated twisted pair, copper
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