ANPx101 RES HV   Linearer x Nanopositionierer Nanopositioners for Ambient and Vacuum Conditions
Icon Load

100 g

Icon Travel Range Linear

5 mm

Icon Room Temperature

0 .. 100°C

Icon Pressure

1E-8 mbar

Icon Magnetic Fields

0 - 35 T

Icon Resolution

~ 200 nm

ANPx101/RES/HV - linear x-nanopositioner

linear nanopositioner for horizontal motion

The ANPx101 provides high resolution nanopositioning for 2" diameter setups. For full xyz nanopositioning, two ANPx101 can be combined with an ANPz101.
The positioner is designed for high vacuum pressures down to 1 E-8 mbar.
Titanium is the material of choice for our cryogenic nanopositioners, as it is light, nonmagnetic, and has a coefficient of expansion matching the piezo and other elements of the drive for reliable low temperature performance.
Cryogenic Tablet

Specifications

Size and Dimensions
footprint; height24 mm x 24 mm; 11 mm
maximum installation space24 mm x 29 mm; 11 mm
weight20 g
Materials
positioner bodytitanium
actuatorPZT ceramics
connecting wiresinsulated twisted pair, copper
Coarse Positioning Mode
travel range (step mode)5 mm
maximum drive velocity @ 300 K~ 3 mm/s
input voltage range0 - 60 V
Fine Positioning Mode
fine linear positioning range @ 300 K3.5 µm
fine positioning resolutionsub-nm
input DC voltage range @ 300 K0 - 100 V
Position Encoder
readout mechanismresistive sensor
encoded travel rangefull travel
sensor resolution~ 200 nm
sensor power (when measuring)0.01 - 1 mW
repeatability1..2 µm (unidirectional)
Load (@ ambient conditions)
maximum load100 g
maximum dynamic force along the axis2 N
General Specifications
environment/HV
show more icon Download PDF