Ultra Precise In-Line Travel Property Control
Sensoric Solutions
OEM Interferometers for real-time stage guiding accuracy
In many industrial processes, motion and accuracy of motion are of utmost importance. This is true for machining processes (e.g. ultra- precision machining), wafer processing and inspection, metrology measurements, and many other applications.
For this purpose, attocube has designed a three-axis miniature laser interferometer, which provides ultra precise real-time measurement of linear target motion as well as analysis of parasitic pitch and yaw motions. If embedded in a closed loop circuitry, motion in three degrees of freedom can be controlled down to the nanometer scale.
Customers can choose:
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sensor head diameter from 1.2 mm up to 15.5.mm
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distance sensor head to target from 0 mm to > 5 meters
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target velocity up to 2 m/s
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direct beam or mirror deflection
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customized housing
Typical applications:
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calibration of machine tools, linear motors, spindles or Coordinate Measurement Machines
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in-line displacement, pitch, and yaw measurement/control (embedded in closed-loop circuitry)
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multiple degree of freedom measurements in quality control for the detection and limitation of errors in production
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tilt control between die and substrate in Flip-Chip-Bonding Systems