Machine-Integrated Sensors for Motion Capturing

Sensoric Solutions

sensorics, applications, machine integrated sensors for motion capturing

OEM Interferometers optimized for machine integration

The growing demand for high accuracy position sensing in machine tools requests cost efficient yet flexible sensors with high resolution at potentially large working ranges. Up to today, interferometry has been well known for highest accuracy but also high costs and demanding space requirements, making it unattractive for mass application and machine integration.

attocube’s IDS3010 now solves this challenge: the ultra compact OEM interferometer is an economic solution and optimized for machine integration with an unrivaled optical performance. Especially for applications exceeding the specifications of industry-wide used glass-scales, the IDS3010 is capable of capturing motions more accurate than other measurement systems.

Customers can choose:

  • a wide range of interfaces (analog sin/cos, digital incremental, field busses)
  • various sensor head designs for environments ranging from low temperature to 400°C. Sensor head diameter from 1.2 mm up to 15.5 mm
  • distance sensor head to target from 0 mm to > 5 meters
  • target velocity up to 2 m/s
  • direct beam or mirror deflection
  • customized housing


Typical applications:

  • position sensing/control of stages in machine tool building or semiconductor industry
  • increasing accuracy of conventional glass-scales, e.g. for testing devices used in semiconductor inspection/backend markets