IDSH/D12/F2.8/LT/HV
Ø 12 mm, length 32.3 mm
The D12/F2.8 sensor head convinces with a high angular tolerance in combination with a small spot size and a short distance between the target and the sensor head. It is used for measuring directly on surfaces, e.g. to capture the surface structure (profilometry).
The sensor head is designed for temperatures between mK..423 K and pressures down to 1 E-8 mbar. The sensor kit package includes two glass fibers. A LT/HV compatible glass fiber (length: 2m) connecting the sensor head to an optical feedthrough, and an ambient glass fiber (length: 5 m) connecting the feedthrough to the interferometer controller.
Specifications
| Sensor Head | |
|---|---|
| optics type | focusing |
| dimensions | Ø 12 mm, length 32.3 mm |
| weight [g] | 8.8 |
| mounting | clamped |
| spot size | 14 µm |
| focal length [mm] | 2.8 |
| typical beam diameter at focal point [µm] | ~ 14 |
| connector | FC/PC |
| working range (target: glass) [mm] | 2.8 (± 4 µm) |
| angular tolerance (target: glass) [°] | ± 4 |
| working range (target: wafer) [mm] | 2.8 (± 14 µm) |
| angular tolerance (target: wafer) [°] | ± 7 |
| working range (target: mirror) [mm] | 2.8 (± 20 µm) |
| angular tolerance (target: mirror) [°] | ± 10 |
| fiber connection | screwed |
| Environment | |
| pressure | 1E-8 mbar .. 5 bar |
| temperature | mK .. 423K |
| Main Materials | |
| housing | Titanium Grade 2 (3.7035) |
| lens | glass (with AR C coating) |
| adhesive | NASA outgassing compliant adhesive |
| Scope of Delivery | |
| fiber IDS-feedthrough | IDSMF/APC/RT (1009981) |
| fiber feedthrough-sensor head | IDSMF/LT/HV metal tubing (1015965) |
| number of axes | 1 |
| mirror | Ø 9 mm, Al coated (1010846) |