Sensor Head M12/C1.6
Ø 14 mm, length 17.4 mm
The sensor head M12/C1.6 is the perfect choice for long-range measurements on miniaturized retroreflectors and plane mirrors. It is capable to measure displacements of more than 1 meter, and thus it is the perfect choice for XY-stage position control or in applications with space constraints for the retroreflector.
The sensor kit package for ambient conditions includes a glass fiber (length: 5 m) for connecting the sensor head to the interferometer controller. Depending on the environmental option chosen, an additional fiber for connecting the sensor head in-situ is also included (/LT/HV, /RAD, /UHV).
Specifications
| Sensor Head | |
|---|---|
| optics type | collimating |
| dimensions | Ø 14 mm, length 17.4 mm |
| weight [g] | 5.1 |
| mounting | metric M12 x 0.5 |
| spot size | 1.6 mm |
| beam diameter [mm] | 1.6 |
| focal length [mm] | infinity |
| connector | FC/PC |
| working range (target: mirror) [mm] | up to 1000 |
| angular tolerance (target: mirror) [°] | ± 0.02 |
| lateral tolerance (target: retroreflector) [mm] | ± 0.5 |
| angular tolerance (target: retroreflector) [°] | ± 6 |
| Environment | |
| pressure | ambient pressure |
| temperature | 0 .. 50°C |
| Main Materials | |
| housing | Titanium Grade 2 (3.7035) |
| lens | glass (with AR C coating) |
| Scope of Delivery | |
| fiber IDS-sensor head | IDSMF/PC/RT (1009980) |
| number of axes | 1 |
| mirror | Ø 9 mm, Al coated (1010846) |
| attenuator | Connector. SC/APC, Attenuation: 1dB |