6 DoF Position Tracking and Control
close to the POI for high accuracy motion stages
High accuracy xy-stages are an integral part for applications in industries such as semiconductors, optics, photonics, and machine tooling. Expectations on precision and speed are constantly rising, maximum reliability goes hand in hand with the demand for high volume throughput rates in mass production. Even minor quality deviations can be extremely costly, making ultimate accuracy in all degrees of freedom (DoF) essential.
Magnetic drive technologies enable highly dynamic sub-nanometer movements over long ranges, while non-contact bearing systems (e.g. air bearings) minimize mechanical motion errors. However, to exactly determine the accuracy relatively to a target an external interferometric sensor that measures close to the Point of Interest (POI) is needed. Due to their bulky or complex optical design, conventional laser interferometers reach their limits in achieving external 6 DoF measurements over long ranges for high-speed stages.
attocube's solution
The IDS3010 provides ultra-precise, high-speed measurements over multiple meters, ideal for stage characterization and closed-loop motion control via versatile real-time interfaces. Its ultra-compact, fiber-based sensor heads integrate seamlessly into complex motion systems, enabling multi-axis measurements. By using inclined mirrors, it is even possible to realize 6 DoF measurements just from the sides of a stage, preserving accessibility and usability of the mounting surface.
Displacement Sensor IDS3010
Control Unit
- nanometer precision & certified accuracy
- 2 m/s target velocity & real-time interfaces
- multi-degree of freedom measurement
Sensor Heads
- miniaturized & combinable sensor heads
- ultra high vacuum compatible
- travel ranges up to 5 m