Auto Focus & Axial Motion Control
for optical lens metrology
The demand for geometrical accuracy of lenses in optical systems such as ultra-precision microscopes, cameras, laser processing as well as virtual & augmented reality systems is steadily rising. Therefore, lens inspection and metrology systems, such as our partner Opto Alignment’s QuickPRO-CUBE have to deliver sub-micrometer accuracy combined with ever shorter cycle times.
Advanced systems allow fast and very precise dual-surface characterization utilizing confocal sensors with nanometer axial resolution. However, a limiting factor for these systems are uncertainties in the movement of the inspection stage, as conventional optical encoders cannot offer the required measurement resolution and bandwidth. To overcome this challenge the system requires an ultra-precise reference sensor for closed-loop motion control in axial direction (z-axis), ideally offering higher resolution than the confocal sensor.
attocube's solution
With its modular and fiber-based design, attocube´s nanoprecise laser interferometer IDS3010 offers cost efficient displacement measurement based on easy to integrate and ultra-compact sensor heads. The up to 10 MHz bandwidth and multiple real-time interfaces make it the ideal choice for dynamic closed-loop motion control required in systems like the QuickPRO-CUBE™ Mini by Opto Alignment.
Displacement Sensor IDS3010
Control Unit
- nanometer precision & certified accuracy
- 10 MHz measurement bandwidth
- multiple real-time interfaces
Sensor Heads
- miniaturized sensor heads
- compatible with various targets & materials
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Fabry-Pérot principle for improved thermal stability