Scientific Instruments

Atom Probe Tomography

multi-axis sample positioning in ultra-high vacuum

As the exclusive manufacturer of atom probe tomography (APT) solutions CAMECA enables both 3D imaging and chemical composition measurements at the atomic scale, in a single material analysis technique. A frozen specimen tip is biased at high DC voltage. By using laser or high voltage pulsing, single atoms can be evaporated and projected onto a position sensitive detector. Analyzing the time of flight allows the identification of each atom and detecting the position of impact reveals the original arrangement.  

To enable resolutions down to 0.1 nm, the specimen tip - with an end radius of only 50-100 nm - needs to be accurately positioned along 3 axes (X, Y, and Z) within ultra-high vacuum environment.  
 

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