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OEM Interferometers for in-line travel property control

 

In many industrial processes, motion and accuracy of motion are of utmost importance. This is true for machining processes (e.g. ultra-precision machining), wafer processing and inspection, metrology measurements, and many other applications.

 

For this purpose, attocube has designed a three-axis miniature laser interferometer, which provides ultra precise real-time measurement of linear target motion as well as analysis of parasitic pitch and yaw motions. If embedded in a closed loop circuitry, motion in three degrees of freedom can be controlled down to the nanometer scale. Customers can choose:

  • sensor head diameter from 1 mm up to 15.5.mm
  • distance sensor head to target from 0 mm to > 1 meters
  • target velocity up to 2 m/s
  • direct beam or mirror deflection
  • customized housing

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Typical Applications

  • in-line displacement, pitch, and yaw measurement
  • in-line displacement, pitch, and yaw control
    (embedded in closed-loop circuitry)
  • multiple degree of freedom measurements in quality control for the detection and limitation of errors in production
  • tilt control between die and substrate in Flip-Chip-Bonding Systems
 
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OEM Interferometers for glass-scale replacement

 

The growing demand for high accuracy position sensing in machine tools requests cost efficient yet flexible sensors with high resolution at potentially large working ranges. Up to today, interferometry has been well known for highest accuracy but also high costs, making it unattractive for mass application.

 

attocube's IDS3010 now solves this challenge: the ultra compact OEM interferometer is optimized for machine integration and reaches unrivaled optical performance at costs comparable to industry-wide applied glass scales. With an accuracy in the 0.0x ppm range, a bandwidth of 10MHz, latencies of 1µs or less, and a full range of industrial interfaces – there is no better sensor for your machine. Customers can choose:

  • a wide range of interfaces (analog sin/cos, digital incremental, field busses)
  • various sensor head designs for environments ranging from low temperature to 400°C. sensor head diameter from 1 mm up to 15.5 mm
  • distance sensor head to target from 0 mm to > 5 meters
  • target velocity up to 2 m/s
  • direct beam or mirror deflection
  • customized housing

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Typical Applications

  • position sensing/sontrol of stages in machine tool building or semiconductor industry
  • increasing accuracy of conventional glass scales, e.g. for testing devices used in semiconductor inspection/backend markets