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Ultra Precise In-Line Travel Property Control

 

In many industrial processes, motion and accuracy of motion are of utmost importance. This is true for machining processes (e.g. ultra-precision machining), wafer processing and inspection, metrology measurements, and many other applications.

 

For this purpose, attocube has designed a three-axis miniature laser interferometer, which provides ultra precise real-time measurement of linear target motion as well as analysis of parasitic pitch and yaw motions. If embedded in a closed loop circuitry, motion in three degrees of freedom can be controlled down to the nanometer scale.

Customers can choose:

 

  • sensor head diameter from 1 mm up to 15.5.mm
  • distance sensor head to target from 0 mm to > 1 meters
  • target velocity up to 2 m/s
  • direct beam or mirror deflection
  • customized housing

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Typical Applications

  • Calibration of machine tools, linear motors, spindles or Coordinate Measurement Machines
  • In-Line displacement, pitch, and yaw measurement/control
    (embedded in closed-loop circuitry)
  • Multiple degree of freedom measurements in quality control for the detection and limitation of errors in production
  • tilt control between die and substrate in Flip-Chip-Bonding Systems
 
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Machine Integrated Sensors for Motion Capturing

 

The growing demand for high accuracy position sensing in machine tools requests cost efficient yet flexible sensors with high resolution at potentially large working ranges. Up to today, interferometry has been well known for highest accuracy but also high costs and demanding space requirements, making it unattractive for mass application and machine integration.

 

attocube's IDS3010 now solves this challenge: the ultra compact OEM interferometer is an economic solution and optimized for machine integration with unrivaled optical performance. Especially for applications exceeding the specifications of industry-wide used glass-scales, the IDS3010 is capable of capturing motions more accurate than other measurement systems. Customers can choose:

 

  • a wide range of interfaces (analog sin/cos, digital incremental, field busses)
  • various sensor head designs for environments ranging from low temperature to 400°C. sensor head diameter from 1 mm up to 15.5 mm
  • distance sensor head to target from 0 mm to > 5 meters
  • target velocity up to 2 m/s
  • direct beam or mirror deflection
  • customized housing

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Typical Applications

  • Position sensing/control of stages in machine tool building or semiconductor industry
  • Increasing accuracy of conventional glass scales, e.g. for testing devices used in semiconductor inspection/backend markets
 
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Volumetric Compensation of Machine Tools and Coordinate Measurement Machines

 

The recurring calibration and volumetric compensation of machine tools and CMMs requires expensive technical equipment as well as expertise and experience. Existing systems need to be installed individually for each machine axis which makes calibration expensive and time-consuming.

The IDS3010 is the core component of the LineCAL® calibration system offered by ETALON AG. It allows simultaneous, automated determination of all 21 systematic deviation parameters of a tool or probe inside the working volume of a three-axes machine. These parameters comprise positioning deviations, straightness, pitch, yaw and roll in all three axes as well as the perpendicularity of these axes relative to each other.

 

  • working range up to 5m (with specific sensor heads up to 30m)
  • target velocity up to 2m/s
  • space-saving design of controler and sensor heads
  • data acquisition bandwidth of 10 MHz

Typical Applications

  • Automated determination of all 21 systematic deviation parameters in a three-axes machine
  • Frequent calibration of machine tools or coordinate measurement machines
  • Repeated calibration of several similar machines
 
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Vibration Analysis and Compensation

 

Manufacturers of fast-running machine tools or manufacturers in semiconductor industries are facing diverse challenges in handling vibrations and unintended movements of machine‘s components and of work pieces. Limited spaces, ultra-high frequencies in different dimensions, and short amplitudes hinder the integration of conventional sensors.

The laser interferometer IDS3010 is capable of measuring high frequency vibrations under limited space conditions. Using more than one measurement axis enables the acquisition of relative velocities between different components – the basis for active vibration compensation. The manufacturing accuracy of a milling machine could be increased by reducing the relative velocities of the milling head and the work piece based on their vibrations.
  

  • bandwidth up to 10 MHz – suits high-frequency vibrations of up to 5MHz
  • linear analog output with a highpass filter for easy post-processing
  • real-time Fast-Fourier-Transformation (FFT) in WAVE
  • small sensor heads for machine integration and space-limited applications

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Typical Applications

  • Vibration monitoring of components in machine tools and semi conductor industries
  • Synchronous capturing of relative velocities between different components for active vibration compensatione
  • Capturing movements of components for predictive maintenance or condition monitoring
 
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Motion Tracking in Coordinate Measurement Machines

 

Coordinate measurement machines (CMM) have highest requirements towards precision. CMM determine geometrical dimensions of simple and complex products and components for quality control (e.g., measurements of manufacturing accuracy or tribological measurements). Those applications require an accuracy in a sub-micrometer range, while the calibration and the machine-integrated control need a higher level of accuracy.

The laser interferometers of attocube are solutions providing highest precision and large working distances at the same time – suiting the challenging requirements of CMM. While the IDS3010 allows to measure displacements of up to 5 meters, it simultaneously detects overshoots in the nanometer range. Furthermore, the compact design of the IDS3010 and the sensor heads fits machine-integrated applications.
  

  • target velocity up to 2 m/s
  • direct beam or mirror deflection
  • Workings distances of up to 5 meters with a constant precision in nanometer range
  • In situ measurements on the touching probe without Abbe errors instead of mechanically transmitted position acquisition (e.g glass-scales)
  • Compact interferometer unit for machine-integration

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Typical Applications

  • Calibration of coordinate measurement machines
  • In situ position acquisition of the touching probe
  • Vibration analysis of the touching probe and components of CMMs
    (e.g. identification of overshoots)

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