INTRODUCTION NANOTOOLING

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attocube systems now offers a range of cryogenic and high vacuum probe systems which reflects the know-how of the company as a leading supplier of equipment for low temperature and vacuum microscopy. Our systems are known for modularity and flexibility, and are always customized to the needs of the user. In perfect accordance, the nanopositioning stages of attocube systems are designed for these extreme conditions and were optimized for the applications in cryogenic probing.
Dependent on your needs, we offer complete systems elective with He-bath cryostat/dewar or low-vibration, cryogen-free pulse-tube cooler, and optional superconducting magnet up to 15+ T. The outstanding design allows ultra high stability facilitating a variety of electrical measurements over a wide temperature and high magnetic field range.
For sensitive probing, smooth, fine probe tips are used to ensure a non-destructive contact as well as precise positioning. Up to four three-axes probe heads can be operated using our reliable, nano-precise and backlash-free positioning stages. A CCD camera on the top of the instrument captures the image of the samples under investigation. The integrated optics can be adjusted to view any part of the sample at different zoom levels.

Many optical devices, as well as samples in Nanoelectronics, Photonic Storage, NEMS / MEMS and other nanoscaled structures must be tested in a closed chamber under controlled conditions such as low temperature or high or ultra high vacuum. Analytical probing of various devices under these conditions poses many challenges. attocube systems provides now versatile cryogenic micro-manipulated probe stations used for non-destructive testing of these devices.

Product Options

	integration of up to four ultra high resolution three-axes stages
	variable probe design - e.g. optical fiber tips, DC tips, HF tips
	system can be ordered without a magnet, and can be upgraded at a later point of time
	probe station design can be combined with scanning probe microscopy methods - e.g. Scanning Near Field Microscopy (SNOM)
	Variable Temperature Insert (VTI) and sample heater available for continuous temperature control

Product key features

	probing under low temperature, high vacuum and high fields (up to 15 T)
	non-destructive device testing
	integrated optics and video system
	probes fully cooled to the device temperature
	no thermal gradients
	substrate sizes for samples up to 13 mm
	high modularity, system customized to user’s needs
	fast cool-down and warm-up cycles, fast thermal stabilization
	stable, well-defined temperature
	low (or even no) coolant consumption
	complete software control