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attoFPSensor
long range, high precision, ultra compact interferometric displacement
sensor
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The attoFPSensor is
based on a Fabry Perot interferometer consisting of a single mode
fiber
and a sensing element. The compact design
(6 mm long, 3 mm diameter) and the attocube-typical
compatibility with extreme environments such as ultra high vacuum
und very low
temperature open up new possibilities and applications for interferometric
measurements. From a technical point of view, the attoFPSensor has
a stunning resolution of up to 30 pm (@ 100 Hz bandwidth and 75 µW
laser power) even over large distances of 10 cm and more. The uniqueness
of this system arises from the use of only one single fiber which
is inserted into the sensor head of the high precision positioning
interferometer. As the design allows for high tolerances in mirror
adjustment, the time-consuming alignment procedure typical for
standard interferometers can be eliminated.
The vacuum and low
temperature
compatibility opens up new possibilities in interferometric displacement
measurements under extreme conditions.
Measure distances with a stunning picometer resolution
The attoFPSensor relies on a fiber based Fabry Perot interferometer
consisting of a single-mode fiber mounted into a fiber probe and
a sensing element. The space between fiber and reflecting surface
is called cavity length. The reflected light is modulated in exact
accordance with the cavity length.
Unlike usual Fabry Perot sensing cavities, the attoFPSensor benefits
from an attocube patented technology (WO 2009/043421 A1). The
laser light entering the cavity is wavelength modulated, allowing
the
sensor to obtain two sinusoidal alike signals in quadrature (see
schematic). This extra feature not only overrules the usual Fabry-
Perot blind spot limitations but also allows the sensing of displacement
direction. Therefore it paves the way towards ultra high resolution
displacement sensing on the overall mirror displacement range.
Moreover, by means of a special in-factory engineering technique,
the fiber probe allows a tilt of over 1° on 10 cm range, thus
allowing a plug-and-measure use of the sensor without the need
for prior careful alignment. All these features enable easy use
of the sensor for highly sensitive applications such as displacement
and long range distance measurements or low noise vibrometry.

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RESULTING
KEY FEATURES |
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no blind spots |
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sensing of displacement
direction |
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| Wavelength |
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tuneable near
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1300 nm, 1550 nm |
| other wavelengths |
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on demand |
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| Range |
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collimated light |
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working distance
up to 100 mm (more on demand) |
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spot diameter
~500 µm @100mm (fiber: Corning SMF-28) |
focused light |
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diffraction limited |
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- focusing lens
with NA ranging from 0.1 to 0.6 |
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- confocal microscopy
objectives |
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| Smallest detectable motion |
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@ 10 Hz |
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225 pm (at 75 µW
laser power; 300Hz BW) |
@ 100 Hz |
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100 pm (at 75 µW
laser power; 300Hz BW) |
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| Head Characteristics |
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collimating lens
holder |
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based on M12 thread, length 15 mm (smaller on request) |
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stainless steel,
titanium, (other material on request) |
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| Power at Sensor Exit |
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| about 75 µW |
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| lower
power |
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on demand |
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| Repeatability |
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| limited by wavelength |
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lower than 4 nm over target distance
of 20 mm |
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| Speed |
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| reading |
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6 µm/s (faster on demand) |
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| Maximum Bandwidth |
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1 ms per data point |
| higher |
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on demand |
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| Optical fibre |
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| single mode fiber |
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250 µm diameter, plastic coated
for RT and LT operation |
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metal coated for UHV compatibility
on demand |
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| Linearity |
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+/- 10 nm (lower on demand) |
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Request Quotation & Support : |
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attoFPSensor - the smallest interferometric
sensor on the market
| Product
Key Features
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ultra compact,
thermally compensated design |
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vacuum compatible |
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ultra low laser power |
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single fiber based |
| Benefits
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30 pm resolution
at cm range |
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ultra-low thermal drift |
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measurements in UHV and at
ultra-low temperatures possible |
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single fiber based, no electrical
connections |
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“plug and measure” (high
tolerance on mirror adjustment) |
| Examplary
Applications
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high
resolution long range position sensing |
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low noise vibrometry |
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low noise AFM deflection detection
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