attoAFMsolutions

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"Combining Atomic Force (AFM) and Scanning Electron Micropscope (SEM) techniques greatly increases the research possibilites of each individual instrument."
The Scanning Electron Microscope (SEM) has long become a standard tool for inspection applications in nanotechnology, nowadays routinely delivering sub-nm lateral resolution. Over the years, SEM has acquired additional capabilities extending its application range from formerly pure imaging purposes to a large number of spectroscopic analysis techniques. Among these techniques, Energy Dispersive X-ray Spectroscopy (EDS) and Raman Spectroscopy are most well know.

In contrast to SEM, the Atomic Force Microscope (AFM) is capable of providing atomic resolution imaging in both vertical and horizontal direction. Particularly in the vertical direction, where the electron microscope is virtually blind on the atomic scale, attocube's AFMs routinely provide topographic imaging with an rms noise of less than 30 picometer. Apart from these topographic imaging capabilities, the AFM provides additional information on magnetic, electrostatic and viscoelastic properties of the sample, making it an extremely powerful and complementary tool to conventional electron microscopy. For an introduction of AFM fundamentals, please refer to the microscopy section.

attocube's AFMs are designed as complete system solutions, capable of being integrated into virtually any electron microscope currently on the market. The AFMs offer highest levels of usability and flexibility, enabling scientists to perform high-precision measurements in material science, structural biology, solid state physics, and other fields of nanotechnology.

attocube systems in-situ SEM AFMs:

Two different AFM setups optimized to meet various customer requirements are the result of a decade of experience in scanning probe microscopy. All attocube microscopes are compatible with vacuum environments down to 1E-9 mbar.

attoAFM I:
This cantilever-based, compact system ensures outstanding stability enabling ultra high resolution imaging. The adjustment of the cantilever is performed outside of the SEM prior to operation of the microscope. Compatible with commercially available cantilevers, this system is ideally suited for imaging modes such as MFM and EFM, for tensile strength testing, and for nanoindentation.

attoAFM III:
Based on a non-optical tuning fork detection technique, this system is ideally suited for applications where a combination of smallest size (footrpint and height) and highest resolution imaging is required. A typical application is topographic imaging of undeveloped e-beam resist and nanoindentation.