attoPROBESTATION
in-situ SEM probe station
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When built into high-resolution scanning electron microscopes (SEMs), attocube’s NTS product line provides access to a variety of applications in the fi elds of materials research, life science, and biology. Boosted by its superior mechanical stability and the integrated lowcurrent four-probe measurement system, the attoProbeStation excels in the characterization of electrical devices and advanced materials on the sub-nanometer scale. The attoProbeStation is based on attocube’s state-of-the-art, modular nanopositioning devices which can be equipped with optical or resistive encoders for closed-loop operation (optional).

The attoProbeStation consists of four probes which can be positioned independently of each other, allowing probe movement in Cartesian coordinates with sub-nm resolution in all directions. Each probe is electrically contacted by highest quality coaxial cables, ensuring low current, high signal-to-noise electrical measurements.Taking advantage of a specially designed probe retainer makes the station fully compatible with most commercially available probes. Most important, however, is the fact that attocube’s probe station can be operated in most available SEMs without any decrease in the SEM’s functionality. As an upgrade option, attocube offers a mounting platform for the attoProbe Station which includes two ANTx200/NUM/HV positioners, allowing fully automated sample positioning within an area of 7 x 7 mm² with a positioning resolution of 10 nm. An additional ANR51 rotator allows for endless rotation of the sample.

attocube's attoPROBESTATION in combination with the mounting platfom