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INTRODUCTION

HIGH PERFORMANCE PLATFORMS

 

CONFOCAL IMAGING

 

attoCFM I
 

attoCFM-DRY
 

attoRAMAN
 

OPTIONAL CONFIGURATIONS
 

MAGNETIC IMAGING

 

attoMFM I
 

ALIGNMENT-FREE CANTILEVER
 

attoSHPM
 

SURFACE CHARACTERIZATION

 

attoAFM I
 

ALIGNMENT-FREE CANTILEVER
 

attoAFM/SEM
 

attoSPHERE
 

CRYOGENIC PROBE STATIONS

 

Photonic Probe Station
 

attoCPS I
 

attoCPS II
 

attoPROBESTATION
 

ACCESSORIES

CUTTING EDGE RESEARCH SYSTEMS

 

attoCSFM
 

attoSNOM
 

attoAFM III
 

attoAFM/STM
 

attoAFM/CFM
 

attoSTM

FUNDAMENTALS

 

CFM
 

SNOM
 

MFM
 

SHPM
 

AFM
 

STM
 

CLOSED LOOP SCANNING

 

 


attoCPS II
ultra stable cryogenic probe station
:.........................................................................................

In comparison with the attoCPS I where the sample is fixed, the attoCPS II offers the possibility to move the sample in addition to up to four xyz tip manipulators. The sample can be positioned in x,y and z direction as well as rotated by 360°. This setup is particularly useful for multiple device testing with identical contact pad spacing. The probes are adjusted in the right pattern once, and subsequently the sample can be moved from one device to the next allowing time efficient multiple device testing within one cooling cycle.
Optical inspection of the sample / probes is provided via a CCD camera and sample illumination via IR-LED.

01 LT and HV compatible feedthroughs

02 vacuum window

03 probe station insert

04 superconducting magnet (optional)

05 liquid He dewar (optional)

06 xyz coarse positioners

07 DC /HF probe

Scheme of a cryogenic probe station insert including cryostat and superconducting magnet.
 

 

     
configuration
  up to 4 independent probes, sample on independent xyz stage
advantages   flexible setup, use for repeated structures with identical pitch,
sample size more than 1", sample rotation on request
       
     
sample positioning
sample mounted on independent ANPxyz101 positioner
sample travel range
5 x 5 x 6 mm³,
additional sample rotation (360°+) on request
sample size   < Ø 30 mm
probe positioning
each probe mounted on an independent ANPxyz51 positioning stage
number of probes
up to 4 probes, each accessible in xyz
probe travel range
4 x 4 x 3 mm³ manipulation space for each probe
minimum step size
approx. 50 nm @ 300 K, 10 nm @ 4 K
       
     
DC probes
double tip probes, GS type, ideal for DC biasing
standard pitch 50 µm (others on request)
HF probes standard
GSG probes up to 5 GHz (others on request),
standard pitch 50 µm (others on request)
fiber probes
single/multi mode fibers for localized illumination
       
     
DC wiring / feed-throughs
up to 40 contacts for positioners, temperature sensor, heater, LED (additional DC wiring on request)
HF wiring
4 coaxial HF lines including SMA feed-throughs (more on request)
length
1 .. 1.5 m, customized
diameter
2 " (50.8 mm)
sample monitoring
sample / probe monitoring via free space optics and
CCD camera, resolution approx. 5 - 10 µm,
field of view max. 5 - 6 mm, magnification to CCD chip max. 1:10
sample illumination
infrared LED (others on request)
temperature control of sample
standard setup incl. temperature sensor and heater
       
     
temperature range
1 .. 300 K (dependent on cryostat)
magnetic field range
0 .. 15 T + (dependent on magnet)
operating pressure range
1E-6 mbar .. 1 bar (designed for exchange gas atmosphere)
       
     
bore size   designed for a 2" (50.8 mm) cryostat/magnet bore
cryostat   LTSYS-He4, LTSYS-Cc
     

 

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