| Product Name |
Description |
Footprint x
Height
|
Travel
|
Max. Load
|
Step Size Min. @ 4K |
Scan Ability |
Details |
|
|
[mm] |
[mm] |
[g] |
[nm] |
|
|
| ANPz30 |
the smallest stepper positioner for linear,
vertical motion
|
Ø11x11 |
2.5 |
~10 |
5 |
yes |
[Details] |
| ANPx51 |
linear, horizontal, and compact stepper
positioner |
15x15x9.2 |
3 |
~25 |
10 |
yes |
[Details] |
| ANPz51 |
linear, vertical, and compact stepper
positioner |
15x15x13.5 |
2.5 |
~50 |
10 |
yes |
[Details] |
| ANPx101 |
linear, horizontal stepper positioner providing
highest stability |
24x24x11 |
5 |
~100 |
~10 |
yes |
[Details] |
| ANPz101 |
linear, vertical stepper positioner providing
highest stability |
24x24x18 |
5 |
~200 |
~10 |
yes |
[Details] |
| ANPx101/NUM |
linear, horizontal stepper positioner with
optoelectronic encoder for closed loop
operation |
24x28x11.5 |
5 |
~100 |
50 nm @ 300K |
yes |
[Details] |
| ANPz101/NUM |
linear, vertical stepper positioner with
optoelectronic encoder for closed loop
operation |
24x28x18 |
5 |
~200 |
50 nm @ 300K |
yes |
[Details] |
| ANPx101/RES |
linear, horizontal stepper positioner with
resistive encoder for closed loop operation
|
24x24x11 |
5 |
~100 |
~10 |
yes |
[Details] |
| ANPz101/RES |
linear, vertical stepper positioner with
resistive encoder for closed loop operation
|
24x24x18 |
5 |
~200 |
~10 |
yes |
[Details] |
| ANPx100/IND |
linear, horizontal stepper positioner with
inductive encoder for closed loop operation
|
24x24x14.5 |
5 |
~100 |
~10 |
yes |
[Details] |
| ANPz100/IND |
linear, vertical stepper positioner with
inductive encoder for closed loop operation |
24x24x25 |
6 |
~200 |
~10 |
yes |
[Details] |
| ANT200/NUM |
linear, horizontal stepper positioner with
large aperture
|
45 x45x11 |
7 |
~300 |
50 nm @ 300K |
yes |
[Details] |
