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ANSxyz100sr

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This piezo-electric scanner allows for high precision scanning over large scan ranges in the xy direction and for high precision scanning over a small scan range in the z direction, even at low temperatures.

                                               
environments                               LT; UHV; magnetic field  
motion                               linear scanning  
scan range                               40 x 40 x 4.3 µm  
resolution                               sub nm  
size                               24 x 24 x 10 mm  
load                               100 g  
                                                               
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