This ultra compact linear stage allows for precise positioning over several millimeters and fits perfectly into setups with diameters of only 23mm. The modularity allows a stacking of two stages to achieve xy positioning.
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| travel mechanism |
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inertial piezo drive |
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| Size and Travel |
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| footprint; height; diagonal |
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15 x 15; 10; 17.5 mm |
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| linear travel (discrete steps) |
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4 mm |
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| maximum size (including travel) |
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17.5 x 15 x 10 mm |
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| typical step size
(min .. max) |
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25 .. 2000 nm @ 300 K,
10 .. 500 nm @ 4 K |
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| repeatability of step sizes |
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typically 5 % over full range |
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| forward / backward step asymmetry |
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typically 5 - 10 % depending on
load |
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| max. speed (@ 300 K, no load) |
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ca. 1 mm/s |
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| fine positioning range |
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0 .. 4.3 µm @ 300 K,
0 .. 0.6 µm @ 4 K |
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| Materials |
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| material of the body |
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Titanium*, partly CuBe |
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| material of the piezo |
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PZT ceramics, Ag metal layers |
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| material of the wires |
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twisted pair Cu wires, 2 x 0.2 mm² |
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| weight [g] |
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6.6 |
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