ANPx320/FPS
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The ANPx320/FPS with an interferometric encoder allows
for ultra precise, closed loop positioning control. This
readout solution can be delivered compatible with low temperature, ultra high vacuum.
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UHV |
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| closed loop |
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resolution: 1 nm |
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| motion |
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linear stepping & scanning |
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| travel |
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15 mm |
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| resolution |
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sub nm |
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| size |
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41.6 x 45; 11.5 mm |
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| load |
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200 g |
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| encoder type |
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optoelectronic |
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| repeatibility |
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1 nm |
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Request Quotation & Support : |
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Available Controller for this Product: |
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Multi-functional controller for the operation of attocube scanners and closed-loop operation of all encoded positioners. |
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Multi-axis metrology controller with up to 12.5 MHz sampling rate |
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