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ANPx101/NUM

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The ANPx101/NUM with an optoelectronic encoder allows for ultra precise, closed loop positioning control. This readout solution can be delivered compatible with ultra high vacuum.

                                               
environments                               UHV  
closed loop                               resolution: 10 nm  
motion                               linear stepping & scanning  
travel                               5 mm  
resolution                               sub nm  
size                               24 x 28 x 14.5 mm  
load                               100 g  
encoder type       optoelectronic  
repeatibility       400 nm  
                                                               
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Multi-functional piezo controller for driving attocube positioners
Piezo controller for driving attocube positioners at ambient condition


 
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inner position
 
outer position